Light receiving member having a divided-functionally structured light receiving layer having CGL and CTL for use in electrophotography

ABSTRACT

An improved light receiving member for use in electrophotography having a light receiving layer provided with a charge carrier generation layer (hereinafter referred to as &#34;CGL&#34;) and a charge carrier transport layer (hereinafter referred to as &#34;CTL&#34;), the CGL being formed of a non-single-crystal material composed substantially of silicon atom as the main constituent atom and at least one kind selected from hydrogen atom and halogen atom and the CTL being formed of a Non-Si(H,X) material containing carbon atom and a conductivity controlling element selected from the group consisting of boron, aluminum, gallium, indium and thallium belonging to group III of the Periodic Table or from the group consisting of phosphorus, arsenic, antimony and bismuth belonging to group V of the Periodic Table in an uneven state in the thicknesswise direction, and optionally at least one kind selected from oxygen atom and nitrogen atom in this order from the side of a substrate. 
     The above light receiving member is that electrical, optical and photoconductive properties are always substantially stable scarcely depending on the working circumstances, that is excellent against optical fatigue, causes no degreadation upon repeating use and that is excellent in durability and moisture-proofness and exhibits no or scarce residual potential.

This application is a continuation of application Ser. No. 111,768 filed Oct. 23, 1987, now abandoned.

FIELD OF THE INVENTION

This invention relates to an improved light receiving member for use in electrophotography which is sensitive to electromagnetic waves such as light (which herein means in a broader sense those lights such as ultra-violet rays, visible rays, infrared rays, X-rays and γ-rays).

BACKGROUND OF THE INVENTION

For the photoconductive material to consitute a light receiving layer in a light receiving member for use in electrophotography, it is required to be highly sensitive, to have a high SN ratio [photocurrent (Ip)/dark current (Id)], to have absorption spectrum characteristics suited for the spectrum characteristics of an electromagnetic wave to be irradiated, to be quickly responsive and to have a desired dark resistance. It is also required to be not harmful to living things as well as man upon use.

Especially, in the case where it is the light receiving member to be applied in an electrophotographic machine for use in office, causing no pollution is indeed important.

From these standpoints, the public attention has been focused on light receiving members having a light receiving layer comprised of an amorphous material containing silicon atoms (hereinafter referred to as "A-Si"), for example, as disclosed in Offenlegungsschriftes Nos. 2746967 and 2855718 which disclose use of such light receiving member as an image-forming member in electrophotography.

For the conventional light receiving members having a light receiving layer comprised of A-Si material, there have been made improvements in their optical, electric and photoconductive characteristics such as dark resistance, photosensitivity, and photoresponsiveness, use-environmental characteristics, economic stability and durability.

However, there are still left subjects to make further improvements in their characteristics in the synthesis situation in order to make such light receiving member practically usable.

For example, in the case where such conventional light receiving member is employed as a light receiving member for use in electrophotography with aiming at heightening the photosensitivity and dark resistance, there are often observed a residual potential on the conventional light receiving member upon the use, and when it is repeatedly used for a long period of time, fatigue due to the repeated use will be accumulated to cause the so-called ghost phenomena inviting residual images.

Further, in the preparation of the light receiving layer of the conventional light receiving member for use in electrophotography using an A-Si material, hydrogen atoms, halogen atoms such as fluorine atoms or chlorine atoms, elements for controlling the electrical conduction type such as boron atoms or phosphorus atoms, or other kinds of atoms for improving the characteristics are selectively incorporated in the light receiving layer.

However, the resulting light receiving layer sometimes is accompanied with defects on electrical characteristics, photoconductive characteristics and/or breakdown voltage resistance depending upon the way the constituents to are employed.

That is, in the case of using the light receiving member having such light receiving layer, there often occur problems that the life of a photocarrier generated in the layer upon irradiation of light is not sufficient, inhibition of a charge injection from the side of the substrate in a dark layer region is not sufficiently carried out, and image defects likely due to a local breakdown phenomenon which is so-called "white oval marks on half-tone copies" or other image defects likely due to abrasion upon using a blade for the cleaning which is so-called "white line" are apt to appear on the transferred images on a paper sheet.

Further, in the case where the above light receiving member is used in a very moist atmosphere, or in the case where after being placed in that atmosphere it is used, the so-called "image flow" sometimes appears on the transferred images on a paper sheet.

In consequence, it is necessary to make further improvements not only in an A-Si material itself but also in the layer constitution, chemical composition for each constituent layer and preparation method in order to overcome the foregoing problems.

SUMMARY OF THE INVENTION

The object of this invention is to provide a light receiving member for use in electrophotography which has a light receiving layer mainly composed of A-Si, free from the foregoing problems and capable of satisfying various kinds of requirements in electrophotography.

That is, the main object of this invention is to provide a light receiving member for use in electrophotography which has a light receiving layer formed of a silicon containing amorphous material, that electrical, optical and photoconductive properties are always substantially stable generally independent of the working circumstances, that is excellent against optical fatigue, causes no degradation upon repeating use and that is excellent in durability and moisture-proofness and exhibits no or scarce residual potential.

Another object of this invention is to provide a light receiving member for use in electrophotography which has a light receiving layer formed of a silicon containing amorphous material which is excellent in the adhesion with a substrate on which the layer is disposed or between the layers laminated, dense and stable in view of the structural arrangement and is of high quality.

A further object of this invention is to provide a light receiving member for use in electrophotography which has a light receiving layer formed of a silicon containing amorphous material which exhibits a sufficient charge-maintaining function in the charging process of forming electrostatic latent images and excellent electrophotographic characteristics when it is used in electrophotographic method.

A still further object of this invention is to provide a light receiving member for use in electrophotography which has a light receiving layer formed of a silicon containing amorphous material which invites neither an image defect nor an image flow on the resulting visible images on a paper sheet upon repeated use in a long period of time and which gives highly resolved visible images with clearer half-tone which are highly dense and quality.

Other object of this invention is to provide a light receiving member for use in electrophotography which has a light receiving layer formed of a silicon containing amorphous material which has a high photosensitivity, high S/N ratio and high electrical voltage withstanding property.

The present inventors have made earnest studies for overcoming the foregoing problems on the conventional light receiving members for use in electrophotography and attaining the objects as described above and, as a result, has accomplished this invention based on the finding as described below. That is, the present inventors have found that the above objects of this invention can be desirably attained by the provision of a light receiving layer constituted with a charge carrier generation layer (hereinafter referred to as "CGL") and a charge carrier transport layer (hereinafter referred to as "CTL"), the CGL being formed of a non-single-crystal material composed substantially of silicon atoms as the main constituent atoms and at least one kind selected from hydrogen atoms and halogen atoms [hereinafter referred to as "Non-Si(H,X)"] and the CTL being formed of a Non-Si(H,X) material containing carbon atoms and a conductivity controlling element selected from the group consisting of boron, aluminum, gallium, indium and thallium belonging to group III of the Periodic Table (hereinafter referred to as "the group III atom") or from the group consisting of phosphorus, arsenic, antimony and bismuth belonging to group V of the Periodic Table (hereinafter referred to as "the group V atom") in an uneven state in the thicknesswise direction, and optionally at least one kind selected from oxygen atoms and nitrogen atoms hereinafter, the non-single-crystal material to constitute the CTL being referred to as "Non-SiMC(O,N)(H,X)", wherein M stands for the above-mentioned selected group III atom or the group V atom) in this order from the side of a substrate.

Therefore, in one specific embodiment of this invention there is provided an improved light receiving member for use in electrophotography comprised of a substrate, and thereover a light receiving layer constituted the CGL and the CTL in this order from the side of the substrate. In second specific embodiment of this invention there is provided an improved light receiving member for use in electrophotography comprised of a substrate, and thereover a light receiving layer constituted by a charge injection inhibition layer formed of a non-single-crystal silicon containing material (hereinafter referred to as "Non-Si material") containing a conductivity controlling element (hereinafter referred to as "MO") and at least one kind selected from hydrogen atoms and halogen atoms (hereinafter referred to as "Non-SiMo(H,X) material"), a Non-Si material containing at least one kind selected from carbon atoms, oxygen atoms and nitrogen atoms (hereinafter referred to as "Non-Si(C,O,N) material") or a Non-Si(C,O,N) material containing at least one kind selected from the group consisting of hydrogen atoms and halogen atoms and a conductivity controlling element (Mo) (hereinafter referred to as Non-Si(C,O,N)(H,X,Mo), the CGL and the CTL in this order from the side of the substrate. In third specific embodiment of this invention there is provided an improved light receiving member for use in electrophotography comprised of a substrate, and thereover a light receiving layer constituted by one or more kinds selected from the above-mentioned charge injection inhibition layer and an infrared absorption layer (hereinafter referred to as "IR absorption layer") formed of a non-single-crystal material containing germanium atoms and/or tin atoms, optionally silicon atoms, and at least one kind selected from hydrogen atoms and halogen atoms (hereinafter referred to as "Non-(Ge,Sn)(Si)(H,X) material"), the CGL and the CTL in this order from the side of the substrate. In fourth specific embodiment of this invention there is provided an improved light receiving layer for use in electrophotography that has a surface layer formed of a Non-Si (C,O,N)(H,X) material being placed on the CTL in any of the above-mentioned light receiving member.

The light receiving member for use in electrophotography having the above-mentioned light receiving layer according to this invention is free from the foregoing problems on the conventional light receiving members for use in electrophotography, has a wealth of practically applicable excellent electric, optical and photoconductive characteristics and is accompanied with an excellent durability and satisfactory use environmental characteristics.

In addition, the light receiving member for use in electrophotography of this invention has a high photosensitivity against light in the visible region and an improved photoresponse property.

Further, the light receiving member for use in electrophotography according to this invention has substantially stable electric characteristics without depending on the working circumstances, maintains a high photosensitivity and a high S/N ratio and does not invite any undesirable influence due to residual potential even when it is repeatedly used for along period of time. In addition, it has sufficient moisture resistance and optical fatigue resistance, and causes neither degradation upon repeating use nor any defect of breakdown voltage. Because of this, according to the light receiving member for use in electrophotography of this invention, even upon repeated use for a long period of time, a highly resolved visible image with a clear half tone which is in a highly dense and quality can be stably obtained.

In view of the above, the light receiving member for use in electrophotography is suited for use in the image-making based on a digital signal and makes it possible to repeatedly and stably obtain a highly resolved desired image of high quality at high speed.

Furthermore, since the light receiving layer of the light receiving member for use in electrophotography according to this invention is of a divided-functional structure comprised of the specific CGL to serve for generation of a charge carrier and the specific CTL to serve for transport of said photocarrier, the freedom in designing the layer composition becomes large and the resultant becomes accompanied with desired many practically applicable characteristics. It is possible for the CTL to reduce a relative dielectric constant because it contains at least one kind selected from carbon atoms, oxygen atoms and nitrogen atoms. In addition to this, it becomes possible not only to reduce the capacity per the thickness of a constituent layer but also to improve the charge-retentivity and photosensitivity.

There are further advantages that the breakdown voltage resistance and durability are improved. Further in addition, because the CTL contains the foregoing selected conductivity controlling element in an uneven state in the thicknesswise direction, the CTL may be so designed as to have a desired charge carrier transporting ability depending upon the requirements therefor.

Other than the above, for the light receiving member for use in electrophotography according to this invention, the state of a charge to be injected at the interface between the CGL and the CTL is remarkably improved so that the problems relative to charge-retentivity, photosensitivity, residual potential, ghost, uneven density caused by sensitivity shift, durability and resolution power which are found on the conventional light receiving member for use in electrophotography are desirably eliminated.

In the case where the light receiving layer of the light receiving member for use in electrophotography according to this invention has the foregoing IR absorption layer the foregoing charge injection inhibition layer either between the substrate and the CGL or between the substrate and the foregoing charge injection inhibition layer, part of long wavelength light remained unabsorbed during from the incident surface side through the substrate is efficiently absorbed by the IR absorption layer to thereby sufficiently prevent the occurrence of undesirable interference phenomena caused by reflection of such long wavelength light at the surface of the substrate which is found on the conventional light receiving member for use in electrophotography. Because of this, the quality of an image obtained is highly improved.

In the case where the light receiving layer of the light receiving member for use in electrophotography according to this invention has the foregoing surface layer, there are various advantages that the mechanical strength and breakdown voltage resistance are further improved, injection of a charge from the free surface of the light receiving layer at the time of being engaged in charging process is effectively prevented, and the charge retentivity, use-environmental characteristic, durability and breakdown voltage resistance are remarkably improved.

BRIEF DESCRIPTION OF THE DRAWINGS

For a better understanding of this invention and further features thereof, reference is made to the following detailed description of various preferred embodiments wherein,

FIG. 1(A) through FIG. 1(H) are partially schematic cross-sectional views illustrating the typical layer constitution of a representative light receiving member for use in electrophotography according to this invention;

FIG. 2(A) through FIG. 2(C) are partially schematic cross-sectional views illustrating examples of the shape at the surface of the substrate in the light receiving member for use in electrophotography according to this invention;

FIGS. 3 and 4 are schematic explanatory views of a preferred method for preparing a substrate having a desirable surface suited as the substrate in the light receiving member for use in electrophotography according to this invention;

FIG. 5 is a partially schematic cross-sectional view illustrating a preferred example of the light receiving member for use in electrophotography according to this invention which has a light receiving layer having the layer constitution as shown in FIG. 1(H) on the substrate having a desirable surface prepared in accordance with the method shown in FIGS. 3 and 4;

FIG. 6 through FIG. 11 are explanatory views illustrating a distribution state of germanium atom and tin atom in the IR absorption layer;

FIG. 12 through FIG. 16 are explanatory views illustrating a distribution state of a conductivity controlling element in the charge injection inhibition layer;

FIG. 17 through FIG. 23 are explanatory views illustrating a distribution state of at least one kind selected from carbon atoms, oxygen atoms and nitrogen atoms in the charge injection inhibition layer;

FIG. 24 through FIG. 39 are explanatory views illustrating a distribution state of a conductivity controlling element in the CTL;

FIG. 40 through FIG. 49 are explanatory views illustrating a distribution state of at least one kind selected from carbon atoms, oxygen atoms and nitrogen atoms in the CTL;

FIG. 50 through FIG. 59 are explanatory views illustrating a distribution state of at least one kind selected from carbon atoms, oxygen atoms and nitrogen atoms in the surface layer;

FIG. 60 is a schematic explanatory view of a RF glow discharging fabrication apparatus for preparing a light receiving layer of the light receiving member for use in electrophotography according to this invention;

FIG. 61 is a schematic explanatory view of a microwave glow discharging fabrication apparatus for preparing a light receiving layer of the light receiving member for use in electrophotography according to this invention;

FIG. 62 is a schematic explanatory view of a fabrication apparatus by means of hydrogen radical chemical vapor deposition (hereinafter referred to as "HRCVD") for preparing a light receiving layer of the light receiving member for use in electrophotography according to this invention;

FIG. 63 is a schematic explanatory view of a fabrication apparatus by means of fluorine oxidation chemical vapor deposition (hereinafter referred to as "FOCVD") for preparing a light receiving layer of the light receiving member for use in electrophotography;

FIG. 64(1) through FIG. 64(8) are explanatory views illustrating diversification patters for the flow rates of an impurity supplying raw material gas and a doping raw material gas at the time of forming the CTL of the light receiving member for use in electrophotography according to this invention by means of RF glow discharging process;

FIG. 65(1) through FIG. 65(8) are explanatory views illustrating diversification patterns for the flow rates of an impurity supplying raw material gas and a doping raw material gas at the time of forming the CTL of the light receiving member for use in electrophotography according to this invention by means of microwave glow discharging process;

FIG. 66(1) through FIG. 66(8) are explanatory views illustrating diversification patterns for the flow rates of an impurity supplying raw material gas and a doping raw material gas at the time of forming the CTL of the light receiving member for use in electrophotography according to this invention by means of HRCVD;

FIG. 67(1) through FIG. 67(8) are explanatory views illustrating diversification patterns for the flow rates of an impurity supplying raw material gas and a doping raw material gas at the time of forming the CTL of the light receiving member for use in electrophotography according to this invention by means of FOCVD;

FIG. 68 is a partially schematic cross-sectional view illustrating an example of the surface shape composed of reverse V-form irregularities for the cylindrical substrate of the light receiving member for use in electrophotography according to this invention;

FIG. 69 is a partially schematic cross-sectional view illustrating an example of the surface shape composed of a plurality of fine spherical dimples for the cylindrical substrate of the light receiving member for use in electrophotography according to this invention; and

FIG. 70(1) through FIG. 70(8) are another explanatory views illustrating diversification patterns for the flow rates of an impurity supplying raw material gas and a doping raw material gas at the time of forming the CTL of the light receiving member for use in electrophotography according to this invention by means of RF glow discharging process.

DETAILED DESCRIPTION OF THE INVENTION

Representative embodiments of the light receiving member for use in electrophotography according to this invention will now be explained more specifically referring to the drawings. The description is not intended to limit the scope of this invention.

Representative light receiving members for use in electrophotography according to this invention are as shown in FIG. 1(A) through FIG. 1(H), in which are shown a light receiving member 100 and a light receiving layer 102 having a CGL 105 consisting substantially of the foregoing Non-Si(H,X) material and a CTL 106 which is composed of the foregoing Non-SiCM(O,N) material. Illustrated in FIG. 1(A) is a typical representative light receiving member for use in electrophotography according to this invention comprised of the substrate 101 and a light receiving layer 102 constituted by the CGL 105 and the CTL 106 having a free surface 108.

Illustrated in FIG. 1(B) is another representative light receiving member for use in electrophotography according to this invention comprised of the substrate 101 and a light receiving layer 102 constituted by a charge injection inhibition layer 104, the CGL 105 and the CTL having a free surface 108.

Illustrated in FIG. 1(C) is another representative light receiving member for use in electrophotography according to this invention comprised of the substrate 101 and a light receiving layer 102 constituted by an IR absorption layer 103, the CGL 105 and the CTL 106 having a free surface 108.

Illustrated in FIG. 1(D) is another representative light receiving member for use in electrophotography according to this invention comprised of the substrate 101 and a light receiving layer 102 constituted by the CGL 105, the CTL 106 and a surface layer 107 having a free surface 108.

Illustrated in FIG. 1(E) is another representative light receiving member for use in electrophotography according to this invention comprised of the substrate 101 and a light receiving layer 102 constituted by the charge injection inhibition layer 104, the CGL 105, the CTL 106 and the surface layer 107 having a free surface 108.

Illustrated in FIG. 1(F) is another representative light receiving member for use in electrophotography according to this invention comprised of the substrate 101 and a light receiving layer 102 constituted by the IR absorption layer 103, the charge injection inhibition layer 104, the CGL 105 and the CTL 106 having a free surface 108.

Illustrated in FIG. 1(G) is another representative light receiving member for use in electrophotography according to this invention comprised of the substrate 101 and a light receiving layer 102 constituted by the IR absorption layer 103, the CGL 105, the CTL 106 and the surface layer 107 having a free surface 108.

Illustrated in FIG. 1(H) is another representative light receiving member for use in electrophotography according to this invention comprised of the substrate 101 and a light receiving layer 102 constituted by the IR absorption layer 103, the charge injection inhibition layer 104, the CGL 105, the CTL 106 and the surface layer 107 having a free surface 108.

Now, explanation will be made for the substrate and each constitutent layer in the light receiving member of this invention.

Substrate 101 (or 501)

The substrate 101 for use in this invention may either be electroconductive or insulative. The electroconductive substrate can include, for example, metals such as NiCr, stainless steels, Al, Cr, Mo, Au, Nb, Ta, V, Ti, Pt and Pb or the alloys thereof.

The electrically insulative substrate can include, for example, films or sheets of synthetic resins such as polyester, polyethylene, polycarbonate, cellulose acetate, polypropylene, polyvinyl chloride, polyvinylidene chloride, polystyrene, and polyamide, glass, ceramic and paper. It is preferred that the electrically insulative substrate is applied with electroconductive treatment to at least one of the surfaces thereof and deposited with a light receiving layer on the thus treated surface.

In the case of glass, for instance, electroconductivity is applied by disposing, at the surface thereof, a thin film made of NiCr, Al, Cr, Mo, Au, Ir, Nb, Ta, V, Ti, Pt, Pd, In₂ O₃, SnO₂, ITO (In₂ O₃ +SnO₂), etc. In the case of the synthetic resin film such as a polyester film, the electroconductivity is provided to the surface by disposing a thin film of metal such as NiCr, Al, Ag, Pv, Zn, Ni, Au, Cr, Mo, Ir, Nb, Ta, V, Tl and Pt by means of vacuum deposition, electron beam vapor deposition, sputtering, etc., or applying lamination with the metal to the surface. The substrate may be of any configuration such as cylindrical, belt-like or plate-like shape, which can be properly determined depending on the application uses.

The thickness of the support member is properly determined so that the light receiving member as desired can be formed.

In the case where flexibility is required for the light receiving member, it can be made as thin as possible within a range capable of sufficiently providing the function as the substrate. However, the thickness is usually greater than 10 μm in view of the fabrication and handling or mechanical strength of the substrate.

And, it is possible for the surface of the substrate to be uneven in order to eliminate occurrence of defective images caused by a so-called interference fringe pattern being apt to appear in the formed images in the case where the image formation is carried out using coherent monochromatic light such as laser beams.

In that case, the uneven surface shape of the substrate can be formed by the grinding work with means of an appropriate cutting tool, for example, having a V-form bite.

That is, said cutting tool is firstly fixed to the predetermined position of milling machine or lathe, then, for example, a cylindrical substrate is moved regularly in the predetermined direction while being rotated in accordance with the predetermined program to thereby obtain a surface-treated cylindrical substrate of a surface having irregularities in reverse V-form with a desirably pitch and depth.

The irregularities thus formed at the surface of the cylindrical substrate form a helical structure along the center axis of the cylindrical substrate. The helical structure of making the reverse V-form irregularities of the surface of the cylindrical substrate may be double or treble. Or otherwise, it may be of a cross-helical structure.

Further, the irregularities at the surface of the cylindrical substrate may be composed of said helical structure and a delay line formed along the center axis of the cylindrical substrate. The cross-sectional form of the convex of the irregularity formed at the substrate surface is in a reverse V-form in order to attain controlled unevenness of the layer thickness in the minute column for each layer to be formed and secure desired adhesion and electric contact between the substrate and the layer formed directly thereon.

And it is desirable for the reverse V-form to be an equilateral triangle, right-angled triangle or inequilateral triangle as shown in FIG. 2(A) through FIG. 2(C). Among these triangle forms, equilateral triangle form and right-angled triangle form are most preferred.

Each dimension of the irregularities to be formed at the substrate surface under the controlled conditions is properly determined having a due regard on the following points.

That is, firstly, a layer composed of A-Si(H,X) to constitute a light receiving layer, for instance, is structurally sensitive to the surface state of the layer to be formed and the layer quality is apt to largely change in accordance with the surface state.

Therefore, it is necessary for the dimension of the irregularity to be formed at the substrate surface to be determined not to invite any decrease in the layer quality of the layer composed of A-Si(H,X).

Secondly, should there exist extreme irregularities on the free surface of the light receiving layer, cleaning in the cleaning process after the formation of visible images becomes difficult to sufficiently carry out. In addition, in the case of carrying out the cleaning with a blade, the blade will be soon damaged.

From the viewpoints of avoiding the problems in the layer formation and the electrophotographic processes, and from the conditions to prevent occurrence of the problems due to interference fringe patterns, the pitch of the irregularity to be formed at the substrate surface is preferably 0.3 to 50 μm, more preferably 1 to 200 μm, and, most preferably, 5.0 to 50 μm.

As for the maximum depth of the irregularity, it is preferably 0.1 to 5.0 μm, more preferably 0.3 to 3.0 μm, and, most preferably, 0.6 to 2.0 μm.

And when the pitch and the depth of the irregularity lie respectively in the above-mentioned range, the inclination of the slope of the dent (or the linear convex) of the irregularity is preferably 1° to 20°, more preferably 3° to 15°, and, most preferably, 4° to 10°.

Further, as for the maximum figure of a thickness difference based on the ununiformity in the layer thickness of each layer to be formed on such substrate surface, in the meaning within the same pitch, it is preferably 0.1 to 2.0 μm, more preferably 0.1 to 1.5 μm, and, most preferably, 0.2 μm to 1 μm.

In alternative, the irregularity at the substrate surface may be composed of a plurality of fine spherical dimples which are more effective in eliminating the occurrence of defective images caused by the interference fringe patterns especially in the case of using coherent monochromatic light such as laser beams.

In that case, the scale of each of the irregularities composed of a plurality of fine spherical dimples is smaller than the resolving power required for the light receiving member for use in electrophotography.

A typical method of forming the irregularities composed of a plurality of fine spherical dimples at the substrate surface will be hereunder explained referring to FIG. 3 and FIG. 4.

FIG. 3 is a schematic view for a typical example of the shape at the surface of the substrate in the light receiving member for use in electrophotography according to this invention, in which a portion of the uneven shape is enlarged. In FIG. 3, there are shown a substrate 301, a substrate surface 302, a rigid true sphere 303, and a spherical dimple 304.

FIG. 3 also shows a preferred method of preparing the surface shape as mentioned above. That is, the rigid true sphere 303 is caused to fall gravitationally from a position at a predetermined height above the substrate surface 302 and collides against the substrate surface 302 to thereby form the spherical dimple 304. A plurality of fine spherical dimples 304 each substantially of an identical radius of curvature R and of an identical width D can be formed to the substrate surface 302 by causing a plurality or rigid true spheres 303 substantially of an identical diameter R' to fall from identical height h simultaneously or sequentially.

FIG. 4 shows a typical embodiment of a substrate formed with the uneven shape composed of a plurality of spherical dimples at the surface as described above.

In the embodiment shown in FIG. 4, a plurality of dimples pits 404, 404 . . . substantially of an identical radius of curvature and substantially of an identical width are formed while being closely overlapped with each other thereby forming an uneven shape regularly by causing to fall a plurality of spheres 403, 403, . . . regularly and substantially from an identical height to different positions at the surface 402 of the substrate 401. In this case, it is naturally required for forming the dimples 404, 404, . . . overlapped with each other that the spheres 403, 403, . . . are graviationally dropped such that the times of collision of the respective spheres 403 to the support 402 and displaced from each other.

By the way, the radius of curvature R and the width D of the uneven shape formed by the spherical dimples at the substrate surface of the light receiving member for use in electrophotography according to this invention constitute an important factor for effectively attaining the advantageous effect of preventing occurrence of the interference fringe in the light receiving member for use in electrophotography according to this invention. The present inventors carried out various experiments and, as a result, found the following facts.

That is, if the radius of curvature R and the width D satisfy the following equation: ##EQU1## 0.5 or more Newton rings due to the sharing interference are present in each of the dimples. Further, if they satisfy the following equation: ##EQU2## one or more Newton rings due to the sharing interference are present in each of the dimples. From the foregoing, it is preferred that the ratio D/R is greater than 0.035 and, preferably, greater than 0.055 for dispersing the interference fringes resulted throughout the light receiving member in each of the dimples thereby preventing occurrence of the interference fringe in the light receiving member.

Further, it is desired that the width D of the unevenness formed by the scraped dimple is about 500 μm at the maximum, preferably, less than 200 μm and, more preferably less than 100 μm.

Illustrated in FIG. 5 is a schematic view illustrating a desired embodiment of the light receiving member according to this invention in which is shown the light receiving member comprising the above-mentioned substrate 501 and the light receiving layer 502 constituted by an IR absorption layer 503, a charge injection inhibition layer 504, the CGL 505, the CTL 506 and a surface layer 507 having a free surface 508.

IR Absorption Layer 103 (or 503)

The IR absorption layer 103 (or 503) in the light receiving member for use in electrophotography according to this invention is composed of a non-single-crystal material containing at least one kind selected from germanium atoms (Ge) and tin atoms (Sn) [hereinafter referred to as "atoms (Ge,Sn)", at least one kind selected from hydrogen atoms (H) and halogen atoms (X), and preferably silicon atoms (Si) also hereinafter referred to as "Non-(Ge,Sn)(Si)(H,X)" . For the atoms (Ge,Sn) to be contained in the IR absorption layer, they may be distributed uniformly in its entire layer region or unevenly in the direction toward the layer thickness of its entire layer region.

But in any case, it is necessary for the atoms (Ge,Sn) to be distributed uniformly in the direction parallel to the surface of the substrate in order to provide the uniformness of the characteristics to be brought out.

(Herein or hereinafter, the uniform distribution means that the distribution of related atoms in a layer is uniform both in the direction parallel to the surface of the substrate and in the thicknesswise direction. The uneven distribution means that the distribution of related atoms in a layer is uniform in the direction parallel to the surface of the substrate but is uneven in the thicknesswise direction).

That is, in the case where the atoms (Ge,Sn) are contained unevenly in the thicknesswise direction in the entire layer region the atoms (Ge,Sn) are so incorporated as to be in a distributed state that such atoms are more largely distributed in the layer region adjacent to the substrate than in the layer region apart from the substrate (namely in the layer region adjacent to the interface) or in a distributed state opposite to the above state.

In the light receiving member for use in electrophotography according to this invention, it is desired for the state of the atoms (Ge,Sn) to be contained in the IR absorption layer to be distributed in such state as above stated in thicknesswise direction, and in the direction parallel to the surface of the substrate, to be nonuniformly distributed.

In a preferred embodiment, the atoms (Ge,Sn) are being continuously distributed in the entire layer region with a concentration distribution being changed in a way of being decreased from the layer region adjacent to the substrate toward the layer region adjacent to the interface with the CGL or the charge injection inhibition layer. Because of this, the affinity of the IR absorption layer with the CGL or the charge injection inhibition layer becomes sufficient.

In addition, in the case where the distributing concentration of germanium atom is made significantly large in the extreme layer region of the IR absorption layer adjacent to the substrate, such long wavelength light remained unabsorbed during from the CTL through the CGL that is often observed in the case of using a semiconductor laser as the light source becomes absorbed substantially and completely by the IR absorption layer. As a result, occurrence of the interference caused by light reflection from the surface of the substrate can be effectively prevented.

Explanation will be made to the typical embodiments of the distribution of the atoms (Ge,Sn) to be contained unevenly in the thicknesswise direction of the IR absorption layer with reference to FIG. 6 through FIG. 11. However, this invention is not way limited only to these embodiments.

In FIGS. 6 through 11, the abscissa represent the distribution concentration C of the atoms (Ge,Sn) and the ordinate represents the thickness of the IR absorption layer; and t_(B) represents the extreme position of the IR absorption containing the atoms (Ge,Sn). And the IR absorption layer is formed from the t_(B) side toward the t_(T) side.

FIG. 6 shows the first typical example of the thicknesswise distribution of the atoms (Ge,Sn) in the IR absorption layer. In this example, the atoms (Ge,Sn) are distributed such that the concentration C remains constant at a value C₁ in the range from position t_(B) to position t₁, and the concentration C gradually and continuously decreases from C₂ in the range from position t₁ to position t_(T), where the concentration of the atoms (Ge,Sn) is C₃.

In the example shown in FIG. 7, the distribution concentration C of the atoms (Ge,Sn) contained in the IR absorption layer is such that concentration C₄ at position B continuously decreases to concentration C₅ at position t_(T).

In the example shown in FIG. 8, the distribution concentration C of the atoms (Ge,Sn) is such that the concentration C₆ remains constant in the range from position t_(B) and position t₂ and it gradually and continuously decreases from C₇ in the range from position t₂ and position t_(T). The concentration at position t_(T) is substantially zero. ("Substantially zero" means that the concentration is lower than the detectable limit.)

In the example shown in FIG. 9, the distribution concentration C of the atoms (Ge,Sn) is such that concentration C₈ gradually and continously decreases in the range from position t_(B) and position t_(T), at which it is substantially zero.

In the example shown in FIG. 10, the distribution concentration C of the atoms (Ge,Sn) is such that concentration C₉ remains constant in the range from position t_(B) to position t₃, and concentration C₉ linearly decreases to concentration C₁₀ in the range from position t₃ to position t_(T).

In the example shown in FIG. 11, the distribution concentration C of the atoms (Ge,Sn) is such that concentration C₁₁ linearly decreases in the range from position t_(B) to position t_(T), at which the concentration is substantially zero.

Several examples of the thicknesswise distribution of the atoms (Ge,Sn) in the IR absorption layer are illustrated in FIG. 6 through FIG. 11. In the light receiving member for use in electrophotography of this invention, the IR absorption layer is desired to be such that contains not only the atoms (Ge,Sn) but also silicon atoms and the concentration C of the atoms (Ge,Sn) is high in the layer region adjacent to the substrate but it is considerably low in the opposite layer region adjacent to the interface. In this case, it is desired for the IR absorption layer to be so formed that the maximum concentration C_(max) of the atoms (Ge,Sn) to be distributed in the thicknesswise direction becomes a specific amount in the quantitative relationship of the amount of the atoms (Ge,Sn) versus the sum of the amount of the atoms (Ge,Sn) and the amount of silicon atoms to be contained in the IR absorption layer, which is preferably greater than 1×10³ atomic ppm, more preferably greater than 5×10³ atomic ppm, and most preferably, greater than 1×10⁴ atomic ppm.

And the amount of the atoms (Ge,Sn) to be contained in the IR absorption layer should be properly determined depending upon the requirements for the provision of the IR absorption layer. In view of this, it is preferably 1 to 1×10⁶ atomic ppm, more preferably 1×10² to 9.5×10⁵ atomic ppm, and, most preferably, 5×10² to 8×10⁵ atomic ppm.

Further, the IR absorption layer may contain at least one kind selected from a conductivity controlling element (Mr), carbon atoms (C), oxygen atoms (0) and nitrogen atoms (N).

As the conductivity controlling element (Mr), so-called impurities in the field of semiconductor can be mentioned, and those usable herein can include the group III atoms which provide p-type conductivity and the group V atoms which provide n-type conductivity.

Specifically, the group III atoms can include B (boron), Al (aluminum), Ga (gallium), In (indium) and Tl (thallium), B and Ga being particularly preferred. The group V atoms can include P (phosphorus), As (arsenic), Sb (antimony), and Bi (bismuth), P and Sb being particularly preferred.

The amount of such conductivity controlling element (Mr) to be contained in the IR absorption layer is preferably 1×10⁻² to 5×10⁵ atomic ppm, more preferably 5×10⁻¹ to 1×10⁴ atomic ppm, and, most preferably, 1 to 5×10³ atomic ppm.

As for the amount of at least one kind selected from carbon atoms, oxygen atoms and nitrogen atoms to be contained in the IR absorption layer, it is preferably 1×10⁻² to 40 atomic %, more preferably 5×10⁻² to 30 atomic %, and most preferably, 1×10⁻¹ to 25 atomic %.

As above described, the IR absorption layer may contain hydrogen atoms (H) or/and halogen atoms (X).

In the case where at least one kind selected from hydrogen atoms (H) and halogen atoms (X) is incorporated into the IR absorption layer, dangling bonds are effectively compensated to thereby make the layer to be in high quality.

The halogen atom (X) includes, specifically, fluorine, chlorine, bromine and iodine. And among these halogen atoms, fluorine and chlorine are particularly preferred.

The amount of the hydrogen atoms (H), the amount of the halogen atom (X) or the sum of the amounts for the hydrogen atoms and the halogen atoms (H+X) to be contained in the IR absorption layer is preferably 1×10⁻² to 40 atomic %, more preferably 5×10⁻² to 30 to atomic %, and most preferably 1×10⁻¹ to 25 atomic %.

For the thickness of the IR absorption layer, it is preferably 0.05 to 25 μm, more preferably, 0.07 to 20 μm, and, most preferably, 0.1 to 15 μm in the viewpoints of bringing about desired electrophotographic characteristics and economical effects.

Charge Injection Inhibition Layer 104 (or 504)

The charge injection inhibition layer 104 (or 504) of the light receiving member for use in electrophotography is composed typically of a Non-SiMo(H,X) material. It may be composed also of a Non-Si(C,O,N) material or a Non-Si(C,O,N)(H,X,Mo) material. The charge injection inhibition layer in the light receiving member for use in electrophotography of this invention is formed so as to have a rectification property of preventing a charge carrier from being injected from the substrate side into the CGL at the time when one polarity charge is applied on the surface of the light receiving layer 102 and of not exhibiting said function in the case where the other polarity charge is applied thereon.

In order for the charge injection inhibition layer to be accompanied with such function, a relatively large amount of a conductivity controlling element (Mo) providing the corresponding conduction type is incorporated thereinto. And the conductivity controlling element (Mo) is so incorporated into the charge injection inhibition layer that it is contained in the entire layer region in an uniform state or in an uneven state for its concentration distribution C (Mo) in the thicknesswise direction.

The conductivity controlling element (Mo) to be contained in the charge injection inhibition layer may be such that provides a different polarity from or the same polarity as that of the conductivity controlling element (M) or (Mr) to be contained in the CTL or the IR absorption layer. It may be also such that is different from or the same as the conductivity controlling element (M) or (Mr).

However, in a preferred embodiment, the conductivity controlling element (Mo) to be contained in the charge injection inhibition layer is desired to be such that provides a different polarity from that of the conductivity controlling element (M) to be contained in the CTL.

In any case, what are above stated should be properly determined depending upon the requirements for a light receiving member for use in electrophotography intended to obtain.

Explanation will be made to the typical embodiments for incorporating the conductivity controlling element (Mo) of the group III or the group V into the charge injection inhibition layer in an uneven concentration distribution state in the thicknesswise direction with reference to FIG. 12 through FIG. 16.

In FIG. 12 through FIG. 16, the abscissa represents the distribution concentration C of the group III atoms or group V atoms and the ordinate represents the thickness of the charge injection inhibition layer; and t_(B) represents the extreme position of the layer adjacent to the substrate and t_(T) represents the other extreme position of the layer which is opposite to the substrate side.

The charge injection inhibition layer is formed from the t_(B) side toward the t_(T) side.

FIG. 12 shows the first typical example of the thicknesswise distribution of the group III atoms or group V atoms in the charge injection inhibition layer. In this example, the group III atoms or group V atoms are distributed such that the concentration C remains constant at a value C₁₂ in the range from position t_(B) to position t₄, and the concentration C gradually and continuously decreases from C₁₃ in the range from position t₄ to position t_(T), where the concentration C of the group III atoms or group V atoms is C₁₄.

In the example shown in FIG. 13, the distribution concentration C of the group III atoms or group V atoms contained in the layer is such that concentration C₁₅ at position t_(B) continuously decreases to concentration C₁₆ at position t_(T).

In the example shown in FIG. 14, the distribution concentration C of the group III atoms or group V atoms is such that concentration C₁₇ remains constant in the range from position t_(B) to position t₅, and concentration C₁₇ linearly decreases to concentration C₁₈ in the range from position t₅ to position t_(T).

In the example shown in FIG. 15, the distribution concentration C of the group III atoms or group V atoms is such that concentration C₁₉ remains constant in the range from position t_(B) and position t₆ and it linearly decreases from C₂₀ to C₂₁ in the range from position t₆ to position t_(T).

In the example shown in FIG. 16, the distribution concentration C of the group III atoms or group V atoms is such that concentration C₂₂ remains constant in the range from position t_(B) and position t_(T).

In the case of incorporating the conductivity controlling element (Mo) into the charge injection inhibition layer in a state that it is distributed largely in a layer region in the substrate side, it is desired for the layer to be so formed that the maximum concentration C_(max) of the conductivity controlling element (Mo) to be distributed therein becomes preferably greater than 50 atomic ppm, more preferably greater than 80 atomic ppm and most preferably, greater than 100 atomic ppm.

For the amount of the conductivity controlling element (Mo) to be contained in the charge injection inhibition layer, it is properly determined according to desired requirements. However, it is preferably 3×10 to 5×10⁴ atomic ppm, more preferably 5×10 to 1×10⁴ atomic ppm, and, most preferably, 1×10² to 5×10³ atomic ppm.

Now the incorporation of at least one kind selected from carbon atoms, oxygen atoms and nitrogen atoms [hereinafter referred to as "the atoms (C,O,N)"] into the charge injection inhibition layer causes improvements in the adhesion of the charge injection inhibition layer with the substrate or other constituent layer.

Explanation will be made to the typical embodiments for incorporating the atoms (C,O,N) in a state that they are distributed in the thicknesswise direction of the charge injection inhibition layer while referring to FIG. 17 through FIG. 23.

In FIG. 17 through FIG. 23, the abscissa represents the distribution concentration C of the atoms (C,O,N), and the ordinate represents the thickness of the charge injection inhibition layer; and t_(B) represents the extreme position of the layer adjacent to the substrate and t_(T) represents the other extreme position of the layer which is opposite to substrate side. The charge injection inhibition layer is formed from the t_(B) side toward the t_(T) side.

FIG. 17 shows the first typical example of the thicknesswise distribution of the atoms (C,O,N) in the charge injection inhibition layer. In this example, the atoms (C,O,N) are distributed such that the concentration C remains constant at a value C₂₃ in the range from position t_(B) to position t₇, and the concentration C gradually and continuously decreases from C₂₄ in the range from position t₇ to position t_(T), where the concentration of the atoms (C,O,N) is C₂₅.

In the example shown in FIG. 18, the distribution concentration C of the atoms (C,O,N) contained in the charge injection inhibition layer is such that concentration C₂₆ at position t_(B) continuously decreases to concentration C₂₇ at position t_(T).

In the example shown in FIG. 19, the distribution concentration C of the atoms (C,O,N) is such that the concentration C remains constant at a value C₂₈ in the range from position t_(B) and position t₈ and from C₂₉, it gradually and continuously decreases from position t₈ and becomes substantially zero between t₈ and t_(T).

In the example shown in FIG. 20, the distribution concentration C of the atoms (C,O,N) is such that concentration C₃₀ gradually and continuously decreases from position t_(B) and becomes substantially zero between t_(B) and t_(T).

In the example shown in FIG. 21, the distribution concentration C of the atoms (C,O,N) is such that concentration C remains constant at a value of C₃₁ in the range from position t_(B) to position t₉, and concentration C₃₁ linearly decreases to concentration C₃₂ in the range from position t₉ to position t_(T).

In the example shown in FIG. 22, the distribution concentration C of the atoms (C,O,N) is such that concentration C remains constant at a value of C₃₃ in the range from position t_(B) and position t₁₀ and it linearly decreases from C₃₄ to C₃₅ in the range from position t₁₀ to position t_(T).

In the example shown in FIG. 23, the distribution concentration C of the atoms (C,O,N) is such that concentration C₃₆ remains constant in the range from position t_(B) and position t_(T).

In the case where the atoms (C,O,N) are contained in the charge injection inhibition layer such that the distribution concentration C of the atoms (C,O,N) in the layer is higher in the layer region near the substrate, the thicknesswise distribution of the atoms (C,O,N) is made in such way that the maximum concentration C_(max) of the atoms (C,O,N) is controlled to be preferably greater than 5×10² atomic ppm, more preferably, greater than 8×10² atomic ppm, and, most preferably, greater than 1×10³ atomic ppm.

As for the amount of the atoms (C,O,N) to be contained in the charge injection inhibition layer, it is properly determined according to desired requirements. However, it is preferably 1×10⁻³ to 50 atomic %, more preferably, 2×10⁻³ atomic % to 40 atomic %, and, most preferably, 3×10⁻³ to 30 atomic %.

In the case where at least one kind selected from hydrogen atoms (H) and halogen atoms (X) is incorporated into the charge injection inhibition layer, dangling bonds are effectively compensated to thereby make the layer to be in high quality.

The halogen atom (X) includes, specifically, fluorine, chlorine, bromine and iodine. And among these halogen atoms, fluorine and chlorine are particularly preferred.

The amount of the hydrogen atoms (H), the amount of the halogen atoms (X) or the sum of the amounts for the hydrogen atoms and the halogen atoms (H+X) to be contained in the charge injection inhibition layer is preferably 1 to 50 atomic %, more preferably 5 to 40 atomic %, and most preferably 10 to 30 atomic %.

For the thickness of the charge injection inhibition layer, it is preferably 1×10⁻² to 10 μm, more preferably, 5×10⁻² to 8 μm, and, most preferably, 1×10⁻¹ to 5 μm in the viewpoints of bringing about desired electrophotographic characteristics and economical effects.

Charge Carrier Generation Layer (CGL) 105 (or 505)

The CGL 105 (or 505) in the light receiving member for use in electrophotography of this invention is composed substantially of a Non-Si(H,X) material containing neither the foregoing conductivity controlling element nor the atoms (C,O,N), and it exhibits desired photoconductive characteristics and charge carrier generation characteristics.

In the case where hydrogen atoms (H) or/and halogen atoms (X) is contained, dangling bonds are effectively compensated whereby not only the photoconductive characteristics but also the layer quality being promoted.

The halogen atom (X) includes, specifically, fluorine, chlorine, bromine and iodine. And among these halogen atoms, fluorine and chlorine are particularly preferred.

The amount of the hydrogen atoms (H), the amount of the halogen atoms (X) or the sum of the amounts for the hydrogen atoms and the halogen atoms (H+X) to be contained in the CGL is preferably 1 to 40 atomic %, more preferably 5 to 30 atomic %, and most preferably 10 to 20 atomic %.

For the thickness of the CGL, it is properly determined in order for the CGL to have desired electrophotographic characteristics and to effectively function to generate a charge carrier in accordance with an absorption coefficient of light from the light source to be used in a electrophotographic image-making system and also in the economical viewpoint.

However, it is preferably 1×10⁻² to 30 μm, more preferably 1×10⁻¹ to 20 μm, and most preferably, 1 to 10 μm.

Charge Carrier Transport Layer (CTL) 106 (or 506)

The CTL 106 (or 506) in the light receiving member for use in electrophotography of this invention is composed of a Non-SiMC(O,N)(H,X) material, and it effectively exhibits charge carrier transport characteristics and desired electrophotographic characteristics

The CTL may contain, in addition to carbon atoms, oxygen atoms or/and nitrogen atoms [hereinafter referred to as the atoms [C(O,N)] in a state that they are distributed uniformely in the entire layer region or unevenly in the thicknesswise direction in the entire layer region.

The conductivity controlling element (M) to be contained in the CTL is a member selected from the group consisting of boron, aluminum, gallium, indium and thallium belonging group III that provide a p-type conductivity or a member selected from the group consisting of phosphorus, arsenic, antimony and bismuth belonging to group V that provide an n-type conductivity.

The CTL contains such selected conductivity controlling element (M) in an uneven state in the thicknesswise direction in the entire layer region. Specifically, such selected conductivity controlling element (M) is so contained in the CTL that its distribution concentration in the thicknesswise direction becomes uneven in at least a partial layer region.

It is possible for the atoms [C(O,N)] to be contained in the CTL in the same way as the conductivity controlling element (M).

Explanation will be made to the typical embodiments for distributing the foregoing selected conductivity controlling element (M) [hereinafter referred to as "the element M"] in the thicknesswise direction in the CTL with reference to FIG. 24 through FIG. 39.

In FIG. 24 through FIG. 39, the abscissa represents the distribution concentration C of the element M and the ordinate represents the thickness of the CTL; and t_(B) represents the extreme interface position of the CTL which is adjacent to the CGL and t_(T) representative the other extreme position of the CTL which is opposite to said interface position. The CTL is formed from the t_(B) side toward the t_(T) side.

FIG. 24 shows the first typical example of the thicknesswise distribution of the element M in the CTL. In this example, the element M is distributed such that the concentration C remains constant at a value C₅₇ in the range from position t_(B) to t₁₆, and it gradually and continuously decreases from concentration C₅₈ in the range from position t₁₆ to position t_(T), where the concentration C is made to be concentration C₅₉.

In the example shown in FIG. 25, the distribution concentration C of the element M contained in the CTL is such that the concentration C gradually and continuously decreases from concentration C₆₀ at position t_(B) to concentration C₆₁ at position t_(T).

In the example shown in FIG. 26, the distribution concentration C of the element M contained in the CTL is such that the concentration C remains constant at a value C₆₂ in the range from position t_(B) to t₁₇, and from concentration C₆₃, it gradually and continuously decreases from position t₁₇ and becomes substantially zero between t₁₇ and t_(T).

In the example shown in FIG. 27, the distribution concentration C of the element M contained in the CTL is such that concentration C₆₄ at position t_(B) gradually and continuously decreases from position t_(B) and becomes substantially zero between position t_(B) and position t_(T).

In the example shown in FIG. 28, the distribution concentration C of the element M is such that the concentration C remains constant at a value C₆₇ in the range from position t_(B) to position t₁₈ and it linearly decreases from C₆₅ in the range from position t₁₈ to position t_(T), where the concentration of the element M is made to be concentration C₆₆.

In the example shown in FIG. 29, the distribution concentration C of the element M is such that the concentration C linearly decreases from concentration C₆₇ to become substantially zero in the range from position t_(B) to position t_(T).

In the example shown in FIG. 30, the distribution concentration C of the element M contained in the CTL is such that the concentration C gradually and continuously decreases concentration C₆₈ in the range from position t_(B) to position t_(T) and it becomes concentration C₆₉ at position t_(T).

In the example shown in FIG. 31, the distribution concentration C of the element M contained in the CTL is such that the concentration C remains constant at a value C₇₀ in the range from position t_(B) to position t₁₉ and it linearly decreases from concentration C₇₁ to concentration C₇₂ in the range from position t₁₉ to position t_(T).

In the example shown in FIG. 32, the distribution concentration C of the element M contained in the CTL is such that the concentration C gradually and continuously increases from concentration C₇₅ to concentration C₇₄ in the range from position t_(B) to position t₂₀, and it remains constant at a value C₇₃ in the range from position t₂₀ to position t_(T).

In the example shown in FIG. 33, the distribution concentration C of the element M contained in the CTL is such that the concentration C gradually and continuously increases from concentration C₇₇ to concentration C₇₆ in the range from position t_(B) to position t_(T).

In the example shown in FIG. 34, the distribution concentration C of the element M contained in the CTL is such that the concentration C gradually and continuously increases from substantially zero value to concentration C₇₉ in the range from position t_(B) to position t₂₁, and it remains constant at a value C₇₈ from position t₂₁ to position t_(T).

In the example shown in FIG. 35, the distribution concentration C of the element M contained in the CTL is such that the concentration C gradually and continuously increases from substantially zero value to concentration C₈₀ in the range from position t_(B) to position t_(T).

In the example shown in FIG. 36, the distribution concentration C of the element M contained in the CTL is such that the concentration C linearly increases from concentration C₈₂ to concentration C₈₁ in the range from position t_(B) to t₂₂, and it remains constant at a value C₈₁ from position t_(B) to t₂₂, and it remains constant at a value C₈₁ from position t₂₂ to t_(T).

In the example shown in FIG. 37, the distribution concentration C of the element M contained in the CTL is such that the concentration C linearly increases from substantially zero value to concentration C₈₃ in the range from position t_(B) to position t_(T).

In the example shown in FIG. 38, the distribution concentration C of the element M contained in the CTL is such that the concentration C gradually and continuously increases from concentration C₈₅ to concentration C₈₄ in the range from position t_(B) to position t_(T).

In the example shown in FIG. 39, the distribution concentration C of the element M contained in the CTL is such that the concentration C linearly increases from concentration C₈₈ to concentration C₈₇ in the range from position t_(B) to position t₂₃, and it remains constant at a value C₈₆ in the range from position t₂₃ to position t_(T).

Now, in the following, explanation will be made to the typical embodiments for distributing the atoms [C(O,N)] in the thicknesswise direction in the CTL with reference to FIG. 40 through FIG. 49.

In FIG. 40 through FIG. 49, the abscissa represents the distribution concentration C of the atoms [C(O,N)] and the ordinate represents the thickness of the CTL; and t_(B) represents the extreme interface position of the CTL which is adjacent to the CGL and t_(T) represents the other extreme position of the CTL which is opposite to said interface position. The CTL is formed from the t_(B) side toward the t_(T) side.

FIG. 40 shows the first typical example of the thicknesswise distribution of the atoms [C(O,N)] in the CTL. In this example, the atoms [C(O,N)] is distributed such that the concentration C remains constant at a value C₈₉ in the range from position t_(B) to position t₂₄, and it gradually and continuously decreases from concentration C₉₀ in the range from position t₂₄ to position t_(T), where it becomes concentration C₉₁.

In the example shown in FIG. 41, the distribution concentration C of the atoms [C(O,N)] contained in the CTL is such that the concentration C gradually and continuously decreases from concentration C₉₂ in the range from position t_(B) to position t_(T), where it becomes concentration C₉₃.

In the example shown in FIG. 42, the distribution concentration C of the atoms [C(O,N)] contained in the CTL is such that the concentration C remains constant at a value C₉₄ in the range from position t_(B) to position t₂₅, and it gradually and continuously decreases from concentration C₉₅ in the range from position t₂₅ to position t_(T), where it becomes substantially zero value.

In the example shown in FIG. 43, the distribution concentration C of the atoms [C(O,N)] contained in the CTL is such that the concentration C gradually and continuously decreases from concentration C₉₆ in the range from position t_(B) to position t_(T), where it becomes substantially zero value.

In the example shown in FIG. 44, the distribution concentration C of the atoms [C(O,N)] contained in the CTL is such that the concentration C remains constant at a value C₉₇ in the range from position t_(B) to position t₂₆, and it linearly decreases to concentration C₉₈ in the range from position t₂₆ to position t_(T), where it becomes concentration C₉₈.

In the example shown in FIG. 45, the distribution concentration C of the atoms [C(O,N)] contained in the CTL is such that the concentration C linearly decreases from concentration C₉₉ in the range from position t_(B) to position t_(T), where it becomes substantially zero value.

In the example shown in FIG. 46, the distribution concentration C of the atoms [C(O,N)] contained in the CTL is such that the concentration C gradually and continuously decreases from concentration C₁₀₀ in the range from position t_(B) to t_(T), where it becomes concentration C₁₀₁.

In the example shown in FIG. 47, the distribution concentration C of the atoms [C(O,N)] contained in the CTL is such that the concentration C remains constant at value C₁₀₂ in the range from position t_(B) to position t₂₇ and it linearly decreases from concentration C₁₀₃ in the range from position t₂₇ to position t_(T) to become concentration C₁₀₄ at position t_(T).

In the example shown in FIG. 48, the distribution concentration C of the atoms [C(O,N)] contained in the CTL is such that the concentration C remains constant at a value C₁₀₅.

Most of the above-mentioned examples are related to the case where the distribution concentration C of the atoms [C(O,N)] contained in the CTL is made large in the t_(B) side. But, it is possible to reverse the situation of such distribution concentration C, which means that the distribution concentration C of the atoms [C(O,N)] contained in the CTL is made large in the t_(T) side, for example, in the way as shown in FIG. 49 which is reverse to the case of FIG. 40. That is, in the example shown in FIG. 49, the distribution concentration C of the atoms C(O,N) contained in the CTL is such that the concentration C remains constant at a value C₁₀₈ then gradually and continuously increases to become concentration C₁₀₇ in the range from position t_(B) to position t₂₈, and it remains constant at a value C₁₀₆ in the range from position t₂₈ to position t_(T).

In the light receiving member for use in electrophotography of this invention, the incorporation of the foregoing selected conductivity controlling element (M) into the CTL serves not only for controlling the conduction type and the conductivity but also for improving the charge injection efficiency between the CGL and the CTL.

The amount of the foregoing selected conductivity controlling element (M) to be contained in the CTL is sufficient to be in a relatively small amount.

Specifically, it is preferably 1×10⁻³ to 1×10³ atomic ppm, more preferably 5×10⁻³ to 1×10² atomic ppm, and most preferably, 1×10⁻² to 50 atomic ppm.

In addition, the incorporation of carbon atoms and if necessary, oxygen atoms or/and nitrogen atoms, that is, the atoms [C(O,N)] into the CTL serves not only for improving the dark resistance and controlling the spectral sensitivity but also for improving the adhesion of the CTL with the CGL.

The amount of carbon atoms or the sum of amounts for the carbon atoms and at least one kind selected from oxygen atoms and nitrogen atoms to be contained in the CTL is preferably 1×10⁻² to 5×10 atomic %, more preferably 5×10⁻² to 4×10 atomic %, and most preferably, 1×10⁻¹ to 3×10 atomic %.

As above described, the CTL in the light receiving member for use in electrophotography may contain hydrogen atoms (H) or/and halogen atoms (X).

The incorporation of hydrogen atoms (H) or/and halogen atoms (X) into the CTL serves for compensating dangling bonds of silicon atoms in the layer to thereby improve the layer quality.

The halogen atom (X) to be contained in the CTL includes F (fluorine), Cl (chlorine), Br (bromine) and I (iodine), and F and Cl being particularly preferred.

The amount of hydrogen atoms (H), the amount of the halogen atoms (X) or the sum of the amounts for the hydrogen atom and the halogen atoms (H+X) to be contained in the CTL is preferably 1 to 70 atomic %, more preferably 5 to 50 atomic %, and most preferably, 10 to 30 atomic %. As for the thickness of the CTL, it is preferably 5 to 50 μm, more preferably 10 to 40 μm, and most preferably, 20 to 30 μm in the viewpoint of obtaining desired electrophotographic characteristics and also in an economical viewpoint.

Surface Layer 107 (or 507)

The surface layer 107 (or 507) in the light receiving member for use in electrophotography of this invention is composed of a Non-Si(C,O,N)(H,X) material which does not contain any conductivity controlling element as such element M contained in the CTL.

As for at least one kind selected from carbon atoms, oxygen atoms and nitrogen atoms [hereinafter referred to as "the atoms (C,O,N)"] to be contained in the surface layer, the atoms (C,O,N) may be contained either in a state that they are distributed uniformly in the entire layer region or in a state that they are contained uniformly in the thicknesswise direction but are distributed unevenly.

However, in any case, it is necessary for the distribution of the atoms (C,O,N) to be uniform in the direction to the surface of the substrate in order to unify the characteristics required for the layer.

Explanation will be made to the typical embodiments for distributing the atoms (O,C,N) in the thicknesswise direction in the surface layer with reference to FIG. 50 through FIG. 59.

In FIG. 50 through FIG. 59, the abscissa represents the distribution concentration C of the atoms (C,O,N) and the ordinate represents the thickness of the surface layer; and t_(B) represents the extreme interface position of the surface layer which is adjacent to the CTL and t_(T) represents the other extreme position of the surface layer in the free surface side. The surface layer is formed from the t_(B) side toward the t_(T) side.

FIG. 50 shows the first typical example of the thicknesswise distribution of the atoms (C,O,N) in the surface layer. In this example, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C gradually and continuously increases from concentration C₁₁₁ to concentration C₁₁₀ in the range from position t_(B) to position t₂₉, and it remains constant at a value C₁₀₉ in the range from position t₂₀ to position t_(T).

In the example shown in FIG. 51, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C gradually and continuously increases from concentration C₁₁₃ to concentration C₁₁₂ in the range from position t_(B) to position t_(T).

In the example shown in FIG. 52, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C gradually and continuously increases from substantially zero value to concentration C₁₁₅ in the range from position t_(B) to position t₃₀, and it remains constant at a value C₁₁₄ from position t₃₀ to position t_(T).

In the example shown in FIG. 53, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C gradually and continuously increases from substantially zero value to concentration C₁₁₆ in the range from position t_(B) to position t_(T).

In the example shown in FIG. 54, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C linearly increases from concentration C₁₁₈ to concentration C₁₁₇ in the range from position t_(B) to t₃₁, and it remains constant at a value C₁₁₇ from position t₃₁ to t_(T).

In the example shown in FIG. 55, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C linearly increases from substantially zero value to concentration C₁₁₉ in the range from position t_(B) to position t_(T).

In the example shown in FIG. 56, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C gradually and continuously increases from concentration C₁₂₁ to concentration C₁₂₀ in the range from position t_(B) to position t_(T).

In the example shown in FIG. 57, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C linearly increases from concentration C₁₂₄ to concentration C₁₂₃ in the range from position t_(B) to position t₃₂, and it remains constant at a value C₁₂₂ in the range from position t₃₂ to position t_(T).

In the example shown in FIG. 58, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C remains constant at a value C₁₂₅ in the range from position t_(B) to position t_(T).

In the example shown in FIG. 59, the distribution concentration C of the atoms (C,O,N) contained in the surface layer is such that the concentration C remains constant at a value C₁₂₈ in the range from position t_(B) to position t₃₃, then again remains constant at a value C₁₂₇ in the range from position t₃₃ to position t₃₄ and finally remains constant at a value C₁₂₆ in the range from position t₃₄ to position t_(T).

The incorporation of the atoms (C,O,N) into the surface layer serves not only for improving the dark resistance but also for making the layer to have a desired hardness.

The amount of the atoms (C,O,N) to be contained in the surface layer is preferably 1×10⁻³ to 90 atomic %, more preferably 1×10⁻¹ to 90 atomic %, and most preferably, 10 to 80 atomic %.

As above described, the surface layer in the light receiving member for use in electrophotography may contain hydrogen atoms (H) or/and halogen atoms (X).

The incorporation of hydrogen atoms (H) or/and halogen atoms (X) into the surface layer serves for compensating dangling bonds of silicon atoms in the layer to thereby improve the layer quality.

The halogen atom (X) to be contained in the surface layer includes F (fluorine), Cl (chlorine), Br (bromine) and I (iodine), and F and Cl being particularly preferred.

The amount of hydrogen atoms (H), the amount of the halogen atoms (X) or the sum of the amounts for the hydrogen atoms and the halogen atoms (H+X) to be contained in the CTL is preferably 1 to 70 atomic %, more preferably 5 to 50 atomic %, and most preferably, 10 to 30 atomic %.

As for the thickness of the surface layer, it is preferably 0.003 to 30 μm, more preferably 0.01 to 20 μm, and most preferably, 0.1 to 10 μm in the viewpoint of obtaining desired electrophotographic characteristics and also in an economical viewpoint.

Formation of The Light Receiving Layer 102 (or 502)

Each layer to constitute the light receiving layer 102 (or 502) of the light receiving member for use in electrophotography according to this invention can be properly formed by vacuum deposition method utilizing the discharge phenomena such as glow discharging method (alternating-current discharging CVD such as low-frequency CVD, high-frequency CVD and microwave CVD or direct-current CVD), reactive sputtering method, ion plating method, light CVD method and thermal induced CVD method wherein relevant raw material gases are selectively used.

Other than these methods, recently proposed hydrogen radical chemical vapor deposition method (see, Japanese Journal of Applied Physics vol. 25, No. 3, March, 1986, pp. L188 to L190) [hereinafter referred to as "HR-CVD method"] or fluorine oxidation chemical vapor deposition method utilizing the oxidation reaction of SiH₄ with F₂ [hereinafter referred to as "FO-CVD method"] can be also employed.

These methods are properly used selectively depending on the factors such as the manufacturing conditions, the installation cost required, production scale and properties required for a light receiving layer to be prepared.

The glow discharging method, reactive sputtering method, ion plating method, HR-CVD method and FO-CVD method are suitable since the control for the condition upon preparing the light receiving members having desired properties are relatively easy, and hydrogen atoms, halogen atoms and other atoms can be introduced easily together with silicon atoms.

And these methods may be selectively used together in one identical system.

Basically, when a layer composed of a Non-Si(H,X) material to be the CGL is formed, for example, by the glow discharging method, a gaseous raw material capable of supplying silicon atoms (Si) are introduced together with a gaseous raw material for introducing hydrogen atoms (H) and/or halogen atoms (X) into a deposition chamber the inside pressure of which can be reduced, glow discharge is generated in the deposition chamber, and a layer composed of Non-Si(H,X) is formed on the surface of a substrate placed in the deposition chamber.

In the case of forming said layer using the reactive sputtering method, using an Si target in an inert gas atmosphere of Ar or He or in a mixed gas atmosphere containing such inert gas as the main constituent, and if necessary, introducing a hydrogen atom (H) supplying raw material gas and/or a halogen atom (X) supplying raw material gas into a sputtering deposition chamber, the Si target is sputtered in a plasma atmosphere to thereby form said layer on a substrate placed in the sputtering deposition chamber.

To form said layer by the ion-plating process, the vapor of silicon is allowed to pass through a desired gas plasma atmosphere. The silicon vapor is produced by heating polycrystal silicon or single crystal silicon held in a boat. The heating is accomplished by resistance heating or electron beam method (E.B. method).

In order to form a layer composed of Non-Si(H,X) by the HR-CVD methed, a Si supplying raw material gas is introduced under predetermined conditions into an activation chamber provided separately from but next to a deposition chamber to thereby generate species (A) using a glow discharge energy or thermal energy, and at the same time, hydrogen atoms (H) supplying raw material gas and/or halogen atom (X) supplying raw material gas are introduced under predetermined conditions into another activation chamber provided separately from but next to the deposition chamber to thereby generate species (B) using the abovementioned activation energy, and the resultant two species (A) and (B) are separately introduced into the deposition chamber to cause chemical reaction among them resulting in forming said layer on a substrate placed in the deposition chamber.

And, in order to form a layer composed of Non-Si(H,X) by the FO-CVD method, Si supplying raw material gas and halogen (X) gas are separately introduced under respective predetermined conditions into a deposition chamber to thereby cause chemical reaction between the two materials resulting in forming said layer on a substrate placed in the deposition chamber.

The gaseous raw material for supplying Si can include gaseous or gasifiable silicon hydrides (silanes) such as SiH₄, Si₂ H₆, Si₃ H₈, Si₄ H₁₀, etc., SiH₄ and Si₂ H₆ being particularly preferred in view of the easy layer forming work and the good efficiency for the supply of Si.

Further various halogen compounds can be mentioned as the gaseous raw material for supplying halogen atom (X), and gaseous or gasifiable halogen compounds, for example, gaseous halogen, halides, inter-halogen compounds and halogen-substituted silane derivatives are preferred. Specifically, they can include halogen gas such as of fluorine, chlorine, bromine, and iodine; inter-halogen compounds such as BrF, ClF, ClF₃, BrF₂, BrF₃, IF₇, ICl, IBr, etc.; and silicon halides such as SiF₄, Si₂ F₆, SiCl₄, and SiBr₄. The use of the gaseous or gasifiable silicon halide as described above is particularly advantageous since a layer composed of a halogen atom-containing Non-Si:H material can be formed with no additional use of the gaseous starting silicon hydride material for supplying Si.

In the case of forming a layer composed of a Non-Si material containing halogen atoms, for example, by the glow discharging method, typically, a mixture of a gaseous silicon halide substance as the raw material for supplying Si and a gas such as Ar, H₂ and He is introduced into the deposition chamber having a substrate in a predetermined mixing ratio and at a predetermined gas flow rate, and the thus introduced gases are exposed to the action of glow discharge to thereby cause a gas plasma resulting in forming said layer on the substrate.

And, for incorporating hydrogen atoms in said layer, an appropriate gaseous raw material for supplying hydrogen atoms can be additionally used.

It is possible for the foregoing raw material gases to be mixed in a predetermined mixing ratio prior to introducing into the deposition chamber.

Now, the gaseous raw material usable for supplying hydrogen atoms can include those gaseous or gasifiable materials, for example, hydrogen gas (H₂), halides such as HF, HCl, HBr, and HI, silicon hydrides such as SiH₄, Si₂ H₆, Si₃ H₈, and Si₄ H₁₀, or halogen-substituted silicon hydrides such as SiH₂ F₂, SiH₂ I₂, SiH₂ Cl₂, SiHCl₃, SiH₂ Br₂, and SiHBr₃. The use of these gaseous starting material is advantageous since the content of the hydrogen atoms (H), which are extremely effective in view of the control for the electrical or photoelectronic properties, can be controlled with ease. Then, the use of the hydrogen halide or the halogen-substituted silicon hydride as described above is particularly advantageous since the hydrogen atoms (H) are also introduced together with the introduction of the halogen atoms.

The amount of the hydrogen atoms (H) and/or the amount of the halogen atoms (X) to be contained in said layer can be adjusted properly be controlling related conditions, for example, the temperature of a substrate, the amount of a gaseous raw material copable of supplying the hydrogen atoms or the halogen atoms into the deposition chamber and the electric discharging power.

It is possible to form a desired layer composed of a Non-Si material containing halogen atoms to be the CGL by the reactive sputtering method, the ion plating method, the HR-CVD method or the FO-CVD method using a suitable halogen atom supplying raw material gas selected from the foregoing halogen atom supplying raw materials.

Likewise, it is possible to incorporate hydrogen atoms into said layer using a suitable hydrogen atom supplying raw material gas selected from the foregoing hydrogen atom supplying raw materials.

For example, in either case where the reactive sputtering method or the ion-plating method is employed, the layer may be incorporated with halogen atoms by introducing one of the above-mentioned gaseous halides or halogen-containing silicon compounds into the deposition chamber in which a plasma atmosphere of the gas is produced.

In the case where the layer is incorporated with hydrogen atoms in accordance with the sputtering process, a feed gas to liberate hydrogen is introduced into the deposition chamber in which a plasma atmosphere of the gas is produced. The feed gas to liberate halogen atoms includes the above-mentioned halogen-containing silicon compounds.

In the case of the reactive sputtering method, the layer composed of Non-Si(H,X) is formed on the substrate by using an Si target and by introducing a halogen-atom introducing gas and H₂ gas, if necessary, together with an inert gas such as He or Ar into the deposition chamber to thereby form a plasma atmosphere and then sputtering the Si target.

In order to form a layer composed of a Non-Si(H,X) further incorporated with a conductivity controlling element (M) or (Mo) selected from the group III atoms or from the group V atoms to result in the CTL composed of Non-SiMC(O,N)(H,X) or the charge injection inhibition layer using one of the foregoing methods, a raw material gas capable of supplying such element (M) or(Mo) is used together with the raw material for forming a Non-Si(H,X) layer upon forming the layer while controlling the amount to be fed.

Referring to the raw materials for introducing the group III atoms, they can include, for example, boron hydrides such as B₂ H₆, B₄ H₁₀, B₅ H₉, B₅ H₁₁, B₆ H₁₀, B₆ H₁₂, and B₆ H₁₄, and boron halides such as BF₃, BCl₃, and BBr₃. In addition, AlCl₃, CaCl₃, Ga(CH₃)₂, InCl₃, TlCl₃, and the like can also be mentioned.

Referring to the raw material for introducing the group V atoms, they can include, for example, phosphorus hydrides such as PH₃, and P₂ H₆ and phosphorus halides such as PH₄ I, PF₃, PF₅, PCl₃, PCl₅, PBr₃, PBr₅, and PI₃. In addition, AsH₃, AsF₅, AsCl₃, AsBr₃, AsF₃, SbH₃, SbF₃, SbF₅, SbCl₃, SbCl₅, BiH₃, BiCl₃, and BiBr₃ can also be mentioned to as the effective raw material for introducing the group V atoms.

For the formation of a layer composed of Non-(Ge,Sn)(Si)(H,X) to be the IR absorption layer of the light receiving member for use in electrophotography, for example, by the glow discharging method, basically, gaseous raw material capable of supplying germanium atoms (Ge) and/or gaseous raw material capable of supplying tin atoms (Sn), and if necessary, gaseous raw material capable of supplying silicon atoms (Si), and gaseous raw material for introducing hydrogen atoms or/and halogen atoms are introduced into a deposition chamber the inside pressure of which can be reduced, glow discharge is generated in the deposition chamber, and a layer composed of Non-(Ge,Sn)(Si)(H,X) is formed on the surface of a substrate placed in the deposition chamber. In the case of forming a layer composed of Non-(Ge,Sn)(Si)(H,X) containing the germanium atoms (Ge) or/and the tin atoms (Sn) at uneven distribution concentration in the layer thicknesswise direction, such layer can be properly formed by controlling the distribution concentration of the Ge or/and the Sn along with a predetermined variation coefficient curve.

In order to form the above Non-(Ge,Sn)(Si)(H,X) layer by the reactive sputtering method, using one or more targets selected from a Si-target, Ge-target and Sn-target or using a target composed of Si and Ge or Sn, such target is engaged in sputtering in an atmosphere of inert gas such as He or Ar, and if necessary, gaseous raw material capable of supplying germanium atoms diluted with an inert gas such as He or Ar and/or gaseous raw material for introducing hydrogen atoms (H) and/or halogen atoms (H) are introduced into the sputtering deposition chamber thereby forming a plasma atmosphere with the gas. In the case of forming the layer containing the germanium atoms or/and the tin atoms at uneven distribution concentration, the target is subjected to sputtering while controlling the gas flow rate of gaseous raw material capable of supplying germanium atoms or/and tin atoms along with a predetermined variation coefficient curve.

To form the above Non-(Ge,Sn)(Si)(H,X) layer by the ion plating method, using one or more kinds selected from the group consisting of polycrystal-Ge and single-crystal-Ge, the group consisting of polycrystal-Sn and single-crystal-Sn, and the group consisting of polycrystal-Si and single-crystal-Si as a vapor source on a boat, the vapor source is evaporated by heating, which is accomplished by resistance heating method or electron beam method (E.B. method).

In order to form the above Non-(Ge,Sn)(Si)(H,X) layer by the HR-CVD method, germanium atom supplying gaseous raw material and/or tin atom supplying gaseous raw material, and if necessary, silicon atom supplying gaseous raw material, or a mixture of one or more of these gaseous raw materials are introduced under predetermined conditions into an activation chamber to thereby generate species (A) using a glow discharge energy or thermal energy, at the same time, hydrogen atom supplying gaseous raw material and/or halogen atom supplying gaseous raw material are introduced under predetermined conditions into another activation chamber to thereby generate species (B) using the above-mentioned activation energy, and the resultant two species (A) and (B) are separately introduced into a deposition chamber to cause chemical reaction among them resulting in forming said layer on a substrate placed in the deposition chamber. In the case of forming a layer composed of Non-(Ge,Sn)(Si)(H,X) containing the germanium atoms (Ge) or/and the tin atoms (Sn) at uneven distribution concentration in the layer thicknesswise direction, such layer can be properly formed by controlling the distribution concentration of the Ge or/and the Sn along with a predetermined variation coefficient curve.

And, to form the above Non-(Ge,Sn)(Si)(H,X) layer by the FO-CVD method, germanium supplying gaseous raw material and/or tin atom supplying gaseous raw material, and if necessary silicon atom supplying gaseous raw material are separately or together introduced under predetermined conditions into a deposition chamber, and at the same time, halogen gas is introduced under predetermined conditions into the deposition chamber separately from the above gaseous raw materials to cause chemical reaction among the gaseous materials resulting in forming said layer on a substrate placed in the deposition chamber.

In the case of forming a layer composed of Non-(Ge,Sn)(Si)(H,X) containing the germanium atoms (Ge) or/and the tin atoms (Sn) at uneven distribution concentration in the layer thicknesswise direction, such layer can be properly formed by controlling the distribution concentration of the Ge or/and the Sn along with a predetermined variation coefficient curve.

The feed gas to liberate Ge includes gaseous or gasifiable germanium hydrides such as GeH₄, Ge₂ H₆, Ge₃ H₈, Ge₄ H₁₀, Ge₅ H₁₂, Ge₆ H₁₄, Ge₇ H₁₆, Ge₈ H₁₈, and Ge₉ H₂₀, with GeH₄, Ge₂ H₆, and Ge₃ H₈, being preferable on account of their ease of handling and the effective liberation of germanium atoms.

Examples of the feed gas to release tin atoms (Sn) include tin hydride (SnH₄) and tin halides such as SnF₂, SnF₄, SnCl₂, SnCl₄, SnBr₂, SnBr₄, SnI₂, and SnI₄ which are in the gaseous form or gasifiable. Tin halides are preferable because they form on the substrate a layer containing halogen atoms. Among tin halides, SnCl₄ is particularly preferable because of its ease of handling and its efficient tin supply.

In the case where solid SnCl₄ is used as a raw material to supply tin atoms (Sn), it should preferably be gasified by blowing (bubbling) an inert gas (e.g., Ar and He) into it while heating. The gas thus generated is introduced, at a desired pressure, into the deposition chamber.

As the silicon atom supplying raw material, the halogen atom supplying raw material and the hydrogen atom supplying raw material, any of those above mentioned in the case of the CGL can be used.

As for the halogen atom supplying raw material, other than those above mentioned in the case of the CGL, it is also possible to use any of the following gaseous or gasifiable substances; hydrogen halides such as HF, HCl, HBr, and HI; halogen-substituted silanes such as SiH₂ F₂, SiH₂ I₂, SiH₂ Cl₂, SiHCl₃, SiH₂ Br₂, and SiHBr₃ ; germanium hydride halide such as GeHF₃, GeH₂ F₂, GeH₃ F, GeHCl₃, GeH₂ Cl₂, GeH₃ Cl, GeHBr₃, GeH₂ Br₂, GeH₃ Br, GeHI₃, GeH₂ I₂, and GeH₃ I; and germanium halides such as GeF₄, GeCl₄, GeBr₄, GeI₄, GeF₂, GeCl₂, GeBr₂, and GeI₂ ; halogen-substituted tin hydrides such as SnHF₃, SnH₂ F₂, SnH₃ F, SnHCl₃, SnH₂ Cl₂, SnH₃ Cl, SnHBr₃, SnH₂ Br₂, SnH₃ Br, SnHI₃, SnH₂ I₂ and SnH₃ I; and tin halides such as SnF₄, SnCl₄, SnBr₄, SnI₄, SnF₂, SnCl₂, SnBr₂ and SnI₂.

Among these halogen atom supplying substances, the use of the hydrogen halide or the halogen-substituted halide is particularly advantageous since the hydrogen atoms (H), which are extremely effective in view of the control for the electrical or photoelectronic properties, are also introduced together with the introduction of the halogen atoms.

The structural introduction of hydrogen atoms into the IR absorption layer in a preferred embodiment can be properly carried out by causing glow discharge in a gaseous atmosphere where the foregoing germanium hydride and/or the foregoing tin hydride, and if necessary, the foregoing silicon hydride, and hydrogen gas coexist in the deposition chamber.

The amount of the hydrogen atoms (H) and/or the amount of the halogen atoms (X) to be contained in said layer can be adjusted properly by controlling related conditions, for example, the temperature of a substrate, the amount of a gaseous raw material copable of supplying the hydrogen atoms or the halogen atoms into the deposition chamber and the electric discharging power. In order to structurally introduce the conductivity controlling element (Mr) selected from the foregoing group III or group V atoms into the IR absorption layer, it is possible to use any of the gaseous or gasifiable raw materials capable of supplying the group III atoms or the group V atoms illustrated in the case of the charge injection inhibition layer. Such raw material gas of supplying the element (Mr) is introduced together with the raw material contributing to formation of the IR absorption layer upon forming the layer while controlling the amount to be fed.

In order to introduce carbon atoms, oxygen atoms or nitrogen atoms into a layer to be formed in the case of forming the CTL, the charge injection inhibition layer, the IR absorption layer and the surface layer in the light receiving member for use in electrophotography according to this invention, one or more of a raw material capable of supplying carbon atoms, a raw material capable of supplying nitrogen atoms is introduced together with the raw material contributing to formation of such layer into the deposition chamber while controlling the amount to be fed.

That is, in order to form a layer containing carbon atoms using the glow discharging method, the HR-CVD method or the FO-CVD method, the gaseous raw material for introducing carbon atoms is added to the raw material selected as required from the raw materials for forming such layer. As the raw material for introducing carbon atoms, most of gaseous or gasifiable materials containing carbon atoms as the constituent atoms can be used.

For instance, it is possible to use a mixture of gaseous raw material containing silicon atoms (Si) as the constituent atoms, gaseous raw material containing carbon atoms (C) as the constituent atoms and, optionally, gaseous raw material containing hydrogen atoms (H) and/or halogen atoms (X) as the constituent atoms in a desired mixing ratio, a mixture of gaseous raw material containing silicon atoms (Si) as the constituent atoms and gaseous raw material containing carbon atoms (C) and hydrogen atoms (H) as the constituent atoms also in a desired mixing ratio, or a mixture of gaseous raw material containing silicon atoms (Si) and hydrogen atoms (H) as the constituent atoms and gaseous raw material containing carbon atoms (C) as the constituent atoms.

Those gaseous raw materials that are effectively usable herein can include gaseous or gasifiable substances containing carbon atoms (C) and hydrogen atoms (H) as the constituent atoms, such as those containing carbon atoms (C) and hydrogen atoms (H) as the constituent atoms, for example, saturated hydrocarbons of 1 to 4 carbon atoms, ethylenic hydrocarbons of 2 to 4 carbon atoms and acetylenic hydrocarbons of 2 to 3 carbon atoms.

Specifically, the saturated hydrocarbons can include methane (CH₄), ethane (C₂ H₆), propane (C₃ H₈), n-butane (n-C₄ H₁₀) and pentane (C₅ H₁₂), the ethylenic hydrocarbons can include ethylene (C₂ H₄), propylene (C₃ H₆), butene-1 (C₄ H₈), butene-2 (C₄ H₈), isobutylene (C₄ H₈) and pentene (C₅ H₁₀) and the acetylenic hydrocarbons can include acetylene (C₂ H₂), methylacetylene (C₃ H₄) and butine (C₄ H₆).

The gaseous starting material containing silicon atoms (Si), carbon atoms (C) and hydrogen atoms (H) as the constituent atoms can include silicided alkyls, for example, Si(CH₃)₄ and Si(C₂ H₅)₄. In addition, carbon halide compounds such as CF₄, CCl₄ and CH₃ CF₄ can also be mentioned in that they can also introduce halogen atoms (X) in addition to the introduction of carbon atoms.

In the case of forming such layer containing carbon atoms (C) by the reactive sputtering method, it is carried out by using a single crystal or polycrystalline Si wafer, a C (graphite) wafer or a wafer containing a mixture of Si and C as a target and sputtering them in a desired gas atmosphere.

In the case of using, for example, an Si wafer as a target, a gaseous raw material for introducing carbon atoms (C) is introduced while being optionally diluted with a silution gas such as Ar and He into a sputtering deposition chamber thereby forming gas plasmas with these gases and sputtering the Si wafer.

Alternatively, in the case of using Si and C as individual targets or as a single target comprising Si and C in admixture, gaseous raw material for introducing hydrogen atoms as the sputtering gas is optionally diluted with a dilution gas, introduced into a sputtering deposition chamber thereby forming gas plasmas and sputtering is carried out. As the gaseous raw material for introducing each of the atoms used in the sputtering process, those gaseous starting materials used in other methods as described above may be used as they are.

In order to form a layer containing oxygen atoms using the glow discharging method, the HR-CVD method or the FO-CVD method, the gaseous raw material for introducing the oxygen atoms is added to the raw material selected as required from the raw materials for forming such layer.

As the raw material for introducing oxygen atoms, most of those gaseous or gasifiable materials which contain at least oxygen atoms as the constituent atoms.

For instance, it is possible to use a mixture of a gaseous raw material containing silicon atoms (Si) as the constituent atoms, a gaseous starting material containing oxygen atoms (O) as the constituent atoms and, as required, a gaseous raw material containing hydrogen atoms (H) and/or halogen atoms (X) as the constituent atoms in a desired mixing ratio, a mixture of gaseous raw material containing silicon atoms (Si) as the constituent atoms and a gaseous raw material containing oxygen atoms (O) and hydrogen atoms (H) as the constituent atoms in a desired mixing ratio, or a mixture of gaseous raw material containing silicon atoms (Si) as the constituent atoms and a gaseous raw material containing silicon atoms (Si) oxygen atoms (O) and hydrogen atoms (H) as the constituent atoms.

Further, it is also possible to use a mixture of a gaseous raw material containing silicon atoms (Si) and hydrogen atoms (H) as the constituent atoms and a gaseous starting raw containing oxygen atoms (O) as the constituent atoms.

Specifically, there can be mentioned, for example, oxygen (O₂), ozone (O₃), nitrogen monoxide (NO), nitrogen dioxide (NO₂), dinitrogen oxide (N₂ O), dinitrogen trioxide (N₂ O₃), dinitrogen tetraoxide (N₂ O₄), dinitrogen pentoxide (N₂ O₅), nitrogen trioxide (NO₃), lower siloxanes comprising silicon atoms (Si), oxygen atoms (O) and hydrogen atoms (H) as the constituent atoms, for example, disiloxane (H₃ SiOSiH₃) and trisiloxane (H₃ SiOSiH₂ OSiH₃), etc.

In the case of forming such layer containing oxygen atoms by way of the reactive sputtering method, it may be carried out by sputtering a single crystal or polycrystalline Si wafer or SiO₂ wafer, or a wafer containing Si and SiO₂ in admixture is used as a target and sputtered them in various gas atmospheres.

For instance, in the case of using the Si wafer as the target, a gaseous starting material for introducing oxygen atoms and, optionally, hydrogen atoms and/or halogen atoms is diluted as required with a dilution gas, introduced into a sputtering deposition chamber, gas plasmas with these gases are formed and the Si wafer is sputtered.

Alternatively, sputtering may be carried out in the atmosphere of a dilution gas or in a gas atmosphere containing at least hydrogen atoms (H) and/or halogen atoms (X) as constituent atoms as a sputtering gas by using individually Si and SiO₂ targets or a single Si and SiO₂ mixed target. As the gaseous raw material for introducing the oxygen atoms, the gaseous raw material for introducing the oxygen atoms shown in other methods as described above can be used as the effective gas also in the sputtering.

In order to form a layer containing nitrogen atoms using the glow discharging method, the HR-CVD method or the FO-CVD method, the raw material for introducing nitrogen atoms is added to the raw material selected as required from the raw materials for forming such layer. As the raw material for introducing nitrogen atoms, most of gaseous or gasifiable materials which contain at least nitrogen atoms as the constituent atoms can be used.

For instance, it is possible to use a mixture of a gaseous raw material containing silicon atoms (Si) as the constituent atoms, a gaseous raw material containing nitrogen atoms (N) as the constituent atoms and, optionally, a gaseous raw material containing hydrogen atoms (H) and/or halogen atoms (X) as the constituent atoms in a desired mixing ratio, or a mixture of a gaseous raw material containing silicon atoms (Si) as the constituent atoms and a gaseous raw material containing nitrogen atoms (N) and hydrogen atoms (H) as the constituent atoms also in a desired mixing ratio.

Alternatively, it is also possible to use a mixture of a gaseous raw material containing nitrogen atoms (N) as the constituent atoms and a gaseous raw material containing silicon atoms (Si) and hydrogen atoms (H) as the constituent atoms.

The raw material that can be used effectively as the gaseous raw material for introducing the nitrogen atoms (N) used upon forming the layer containing nitrogen atoms can include gaseous or gasifiable nitrogen, nitrides and nitrogen compounds such as azide compounds containing at least nitrogen atoms (N) as the constituent atoms or both nitrogen atoms (N) and hydrogen atoms (H) as the constituent atoms, for example, nitrogen (N₂), ammonia (NH₃), hydrazine (H₂ NNH₂), hydrogen azide (HN₃) and ammonium azide (NH₃ N₃). In addition, nitrogen halide compounds such as nitrogen trifluoride (F₃ N) and nitrogen tetrafluoride (F₄ N₂) can also be mentioned in that they can also introduce halogen atoms (X) in addition to the introduction of nitrogen atoms (N).

The layer containing nitrogen atoms may be formed by the sputtering method by using a single crystal or polycrystalline Si wafer of Si₃ N₄ wafer or a wafer containing Si and Si₃ N₄ in admixture as a target and sputtering them in various gas atmospheres.

In the case of using an Si wafer as a target, for instance, a gaseous starting material for introducing nitrogen atoms and, as required, hydrogen atoms and/or halogen atoms is diluted optionally with a dilution gas, and introduced into a sputtering deposition chamber to form gas plasmas with these gases and the Si wafer is sputtered.

Alternatively, Si and Si₃ H₄ may be used as individual targets or as a single target comprising Si and Si₃ N₄ in admixture and then sputtered in the atmosphere of a dilution gas or in a gaseous atmosphere containing at least hydrogen atoms (H) and/or halogen atoms (X) as the constituent atoms as for the sputtering gas. As the gaseous raw material for introducing nitrogen atoms, those gaseous raw materials for introducing the nitrogen atoms shown in other methods as described above can be used as the effective gas also in the case of the sputtering.

In order to form the layer having a desired thicknesswise distribution state (depth profile) for the distribution concentration C of the atoms (C,O,N) in the case of the glow discharging method, the HR-CVD method or the FO-CVD method, the raw material gas for introducing the atoms (O,C,N) is introduced into the deposition chamber while properly varying its flow rate in accordance with a predetermined variation coefficient curve upon forming the layer. In an example in this case, the gas flow rate may be varied, specifically, by gradually changing the opening degree of a predetermined needle valve disposed to the midway of the gas flow system, for example, manually or any of other means usually employed such as in externally driving motor. In this case, the variation of the flow rate may not necessarily be linear but a desired content curve may be obtained, for example, by controlling the flow rate along with a previously designed variation coefficient curve by using a microcomputer or the like.

The above-mentioned procedures can be also employed in the case of forming such layer by the reactive sputtering method. In an alternative in the case of using the reactive sputtering method, it can be carried out by using such target containing the atoms (O,C,N) in a state of being desirably varied in the thicknesswise direction.

The conditions upon forming the CGL, the CTL, the charge injection inhibition layer, the IR absorption layer and the surface layer to constitute the light receiving layer of the light receiving member for use in electrophotography, for example, the temperature of the support, the gas pressure in the deposition chamber, and the electric discharging power are important factors for obtaining desired respective layers having desired properties and they are properly selected while considering the functions of each layer to be made. Further, since these layer forming conditions may be varied depending on the kind and the amount of each of the atoms contained in respective layers, the conditions have to be determined also taking the kind or the amount of the atoms to be contained into consideration.

In a detailed example of forming a layer composed of an amorphous material, the temperature of the substrate is preferably from 50° to 400° C. and more preferably, from 100° to 300° C.; the gas pressure in the deposition chamber is preferably from 1×10⁻⁴ to 10 Torr, more preferably 1×10⁻³ Torr, and most preferably, 1×10⁻² to 1 Torr.

However, the actual conditions for forming each constituent layer such as temperature of the substrate, discharging power and the gas pressure in the deposition chamber cannot usually be determined with ease independent of each other. Accordingly, the conditions optimal to the layer formation are desirably determined based on relative and organic relationships for forming the amorphous material layer having desired properties.

In order to form a layer composed of a polycrystalline material, various methods can be used.

In one of such method using the plasma CVD method, such layer may be formed by adjusting the temperature of the substrate to 400° to 600° C.

In another method using the plasma CVD method, an amorphous-like layer is formed on the substrate being maintained at about 250° C. and the resultant layer is anealed to thereby prepare such layer composed of a polycrystalline material, wherein the anealing treatment is carried out by heating the substrate at a temperature between 400° C. and 600° C. for 5 to 30 minutes or by irradiating laser beam to the layer for 5 to 30 minutes.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The invention will be described more specifically while referring to examples, but the invention is no way limited only to these examples.

The light receiving member for use in electrophotography can be properly prepared using any of the fabrication apparatuses shown in FIGS. 60 through 63.

FIG. 60 shows a representative fabrication apparatus by means of the glow discharging process.

In the fabrication apparatus shown in FIG. 60, gas reservoirs 1011, 1012, 1013, 1014, 1015, 1016 and 1017 illustrated in the figure are charged with gaseous raw materials for forming the respective layers in the light receiving member for use in electrophotography according to this invention, that is, for instance, SiH₄ gas (99.999% purity) in the reservoir 1011 H₂ gas (99.999% purity) in the reservoir 1012, B₂ H₆ gas (99.999% purity) diluted with H₂ (referred to as "B₂ H₆ /H₂ ") in the reservoir 1013, NO gas (99.5% purity) in the reservoir 1014, GeH₄ gas (99.99% purity) in the reservoir 1015, NH₃ gas (99.999% purity) in the reservoir 1016, and CH₄ gas (99.999% purity) in the reservoir 1017.

Explanation will be made to preparing the light receiving member, for use in electrophotography according to this invention having the layer constitution for the light receiving layer on an Al cylindrical substrate as shown in FIG. 1(H).

There are used SiH4 gas, B₂ H₆ /H₂ gas, NO gas and GeH₄ gas for forming the IR absorption layer 103; SiH₄ gas, H₂ gas, B₂ H₆ /H₂ gas and NO gas for forming the charge injection inhibition layer 104; SiH₄ gas and H₂ gas for forming the CGL 105; SiH₄ gas, NO gas, B₂ H₆ /H₂ gas and CH₄ gas for forming the CTL 106; and SiH₄ gas and CH₄ gas for forming the surface layer 107.

Prior to the entrance of these gases into a reaction chamber 1001, it is confirmed that valves 1051 to 1057 for the gas reservoirs 1011 to 1017 and a leak valve 1003 are closed and that inlet valves 1031 to 1037, exit valves 1041 to 1047 and sub-valve 1070 are opened. Then, a main valve 1002 is at first opened to evacuate the inside of the reaction chamber 1001 and gas piping.

Then, upon observing that the reading on the vacuum gauge 1004 became about 5×10⁻⁶ Torr, the sub-valve 1070 and the exit valves 1041 through 1047 are closed.

At first, SiH₄ gas from the reservoir 1011, H₂ gas from the reservoir 1012, B₂ H₆ /H₂ gas from the reservoir 1013, NO gas from the reservoir 1014, NH₃ gas from the reservoir 1015 and CH₄ gas from the reservoir 1016 are caused to flow into mass flow controllers 1021 through 1026 respectively by opening the inlet valves 1031 through 1036, controlling the pressure of exit pressure gauges 1061 through 1066 to 2 kg/cm₂.

And, the cylindrical substrate 1007 being placed in the reaction chamber is heated to and maintained at a temperature of 50° to 350° C. by actuating a heater 1008.

After the preparatory works being thus completed, the formation of each of the IR absorption layer, the charge injection inhibition layer, the CGL, the CTL and the surface layer is commenced.

In order to form the IR absorption layer, the exit valves 1041, 1043, 1044 and 1045, and the sub-valve 1070 are gradually opened to enter SiH₄ gas, B₂ H₆ /H₂ gas, NO gas and GeH₄ gas into the reaction chamber 1001.

In this case, the exit valves 1041, 1043, 1044 and 1045 are adjusted so as to attain a desired valve for the ratio among the SiH₄ gas flow rate, the B₂ H₆ /H₂ gas flow rate, the NO gas flow rate and the GeH₄ gas flow rate, and the opening of the main valve 1002 is adjusted while observing the reading on the vacuum gauge 1004 so as to obtain a desired valve for the pressure inside the reaction chamber 1001. The, a power source 1010 is set to a predetermined electrical power to cause RF glow discharging in the reaction chamber 1001 while controlling the flow rates of the NO gas and/or the B₂ H₆ /H₂ gas in accordance with a previously designed variation coefficient curve, to thereby from the IR absorption layer on the cylindrical substrate. When the IR absorption layer has reached a desired thickness, the exit valves 1041, 1043, 1044 and 1045 are completely closed to stop the formation of the IR absorption layer.

The successive formation of the charge injection inhibition layer on the previously formed IR absorption layer is carried out in the following way.

That is, the exit valves 1041, 1042, 1043 and 1044, and the sub-valve 1070 are gradually opened to enter SiH₄ gas, H₂ gas, B₂ H₆ /H₂ gas and NO gas into the reaction chamber 1001.

In this case, the exit valves 1041, 1042, 1043 and 1044 are adjusted so as to attain a desired value for the ratio among the SiH₄ gas flow rate, the H₂ gas flow rate, the B₂ H₆ /H₂ gas flow rate and the NO gas flow rate, and the opening of the main valve 1002 is adjusted while observing the reading on the vacuum gauge 1004 so as to obtain a desired value for the pressure inside the reaction chamber 1001. Then, the power source 1010 is set to a predetermined electrical power to cause RF glow discharging in the reaction chamber 1001 while controlling the flow rates of the NO gas and/or the B₂ H₆ /H₂ gas in accordance with a previously designed variation coefficient curve, to thereby from the charge injection inhibition layer on the IR absorption layer. When the charge injection inhibition layer has reached a desired thickness, the exit valves 1041, 1042, 1043 and 1044 are completely closed to stop the formation of the charge injection inhibition layer.

In order to form the CGL on the charge injection inhibition layer, the exit valves 1041 and 1042, and the subvalve 1070 are opened to enter SiH₄ gas and H₂ gas in the reaction chamber 1001.

In this case, the exit valves 1041 and 1042 are adjusted so as to attain a desired value for the ratio among the SiH₄ gas flow rate and the H₂ gas flow rate, and the opening of the main valve 1002 is adjusted while observing the reading on the vacuum gauge 1004 so as to obtain a desired value for the pressure inside the reaction chamber 1001. Then, the power source 1010 is set to a predetermined electrical power to cause RF glow discharging in the reaction chamber 1001, to thereby form the CGL on the charge injection inhibition layer. When the CGL has reached a desired thickness, the exit valves 1041 and 1042 are completely closed to stop the formation of the CGL.

In order to form the CTL on the CGL, the exit valves 1041, 1043, 1044 and 1047, and the sub-valve 1070 are gradually opened to enter SiH₄ gas, B₂ H₆ /H₂ gas, NO gas and CH₄ gas into the reaction chamber 1001.

In this case, the exit valves 1041, 1043, 1044 and 1047 are adjusted so as to attain a desired value for the ratio among the SiH₄ gas flow rate, the B₂ H₆ /H₂ gas flow rate, the NO gas flow rate and the CH₄ gas flow rate, and the opening of the main valve 1002 is adjusted while observing the reading on the vacuum gauge 1004 so as to obtain a desired value for the pressure inside the reaction chamber 1001. Then, the power source 1010 is set to a predetermined electrical power to cause RF glow discharging in the reaction chamber 1001 while controlling the flow rates of the CH₄ gas and/or the NO gas, and/or the B₂ H₆ /H₂ gas in accordance with a previously designed variation coefficient curve, to thereby form the CTL on the CGL. When the CTL has reached a desired thickness, the exit valves 1041, 1043, 1044 and 1047 are completely closed to stop the formation of the CTL.

In order to form the surface layer on the CTL, the exit valves 1041 and 1047, and the sub-valve 1070 are gradually opened to enter SiH₄ gas and CH₄ gas into the reaction chamber 1001.

In this case, the exit valves 1041 and 1047 are adjusted so as to attain a desired value for the ratio among the SiH₄ gas flow rate and the CH₄ gas flow rate, and the opening of the main valve 1002 is adjusted while observing the reading on the vacuum gauge 1004 so as to obtain a desired value for the pressure inside the reaction chamber 1001. Then, the power source 1010 is set to a predetermined electrical power to cause RF glow discharging in the reaction chamber 1001 to thereby form the surface layer on the CTL. When the surface layer has reached a desired thickness, the exit valves 1041 and 1047 are completely closed to stop the formation of the surface layer.

All of the exit valves other than those required for upon forming the respective layers are of course closed. Further, upon forming the respective layers, the inside of the system is once evacuated to a high vacuum degree as required by closing the exit valves 1041 through 1047 while entirely opening the sub-valve 1070 and entirely opening the main valve 1002.

Further, during the layer forming operation, the Al cylinder as substrate 1007 is rotated at a predetermined speed by the action of the motor 1009.

FIG. 61 shows another representative fabrication apparatus by means of the microwave (μW) glow discharging process.

Explanation will be made to preparing the light receiving member for use in electrophotography according to this invention having the layer constitution for the light receiving layer on an Al cylindrical substrate as shown in FIG. 1(H).

In the fabrication apparatus shown in FIG. 61, gas reservoirs 2011, 2012, 2013, 2014, 2016 and 2017 illustrated in the figure are charged with gaseous raw materials for forming the respective layers in the light receiving member for use in electrophotography according to this invention,

that is, for instance, SiH₄ gas (99.999% purity) in the reservoir 2011, H₂ gas (99.999% purity)in the reservoir 2012, B₂ H₆ gas (99.999% purity) diluted with H₂ (referred to as "B₂ H₆ /H₂ ") in the reservoir 2013, NO gas (99.5% purity) in the reservoir 2014, GeH₄ gas (99.999% purity) in the reservoir 2015, NH3 gas (99.99% purity) in the reservoir 2016, and CH₄ gas (99.999% purity) in the reservoir 2017.

There are used SiH₄ gas, B₂ H₆ /H₂ gas, NO gas and GeH₄ gas for forming the IR absorption layer 103; SiH₄ gas, H₂ gas, B₂ H₆ /H₂ gas and NO gas for forming the charge injection inhibition layer 104; SiH₄ gas and H₂ gas for forming the CGL 105; SiH₄ gas, NH₃ gas, B₂ H₆ /H₂ gas and CH₄ gas for forming the CTL 106; and SiH₄ gas and CH₄ gas for forming the surface layer 107.

Prior to the entrance of these gases into a reaction chamber 2001, it is confirmed that valves 2051 to 2057 for the gas reservoirs 2011 to 2017 and a leak valve 2003 are closed and that inlet valves 2031 to 2037, exit valves 2041 to 2047, and sub-valve 2070 are opened. Then, a main valve 2002 is at first opened to evacuate the inside of the reaction chamber 2001 and gas piping.

Then, upon observing that the reading on the vacuum gauge 2004 became about 5×10⁻⁶ Torr, the sub-valve 2070 and the exit valves 2041 through 2046 are closed.

At first, SiH₄ gas from the reservoir 2011, H₂ gas from the reservoir 2012, B₂ H₆ /H₂ gas from the reservoir 2013, NO gas from the reservoir 2014, GeH₄ gas from the reservoir 2015, NH₃ gas from the reservoir 2016 and CH₄ gas from the reservoir 2017 are caused to flow into mass flow controllers 2012 through 2027 respectively by opening the inlet valves 2031 through 2037 controlling the pressure of exit pressure gauges 2061 through 2067 to 2 kg/cm².

And, the cylindrical substrate 2006 being placed in the reaction chamber 2001 is heated to and maintained at a temperature of 50° to 350° C. by actuating a heater 2005.

After the preparatory works being thus completed, the formation of each of the IR absorption layer, the charge injection inhibition layer, the CGL, the CTL and the surface layer is commenced.

In order to form the IR absorption layer, the exit valves 2041, 2043, 2044 and 2045, and the sub-valve 2070 are gradually opened to enter SiH₄ gas, B₂ H₆ /H₂ gas, NO gas and GeH₄ gas into the reaction chamber 2001.

In this case, the exit valves 2041, 2043, 2044 and 2045 are adjusted so as to attain a desired value for the ratio among the SiH₄ gas flow rate, the B₂ H₆ /H₂ gas flow rate, the NO gas flow rate and the GeH₄ gas flow rate, and the opening of the main valve 2002 is adjusted while observing the reading on the vacuum gauge 2004 so as to obtain a desired value for the pressure inside the reaction chamber 2001.

Then, a microwave power source 2008 being connected through a waveguide 2009 and a dielectric window 2010 to the reaction chamber 2001 through its upper wall and another microwave power source being also connected in the same way to the reaction chamber through its bottom wall (not shown) are together set to a predetermined electric power to cause microwave (μW) glow discharging in the reaction chamber 2001 while controlling the flow rates of the NO gas and/or the B₂ H₆ /H₂ gas in accordance with a predetermined variation coefficient curve, to thereby form the IR absorption layer on the cylindrical substrate. When the IR absorption layer has reached a desired thickness, the exit valves 2041, 2043, 2044 and 2045 are completely closed to stop the formation of the IR absorption layer.

The successive formation of the charge injection inhibition layer on the previously formed IR absorption layer is carried out in the following way.

That is, the exit valves 2041, 2042, 2043 and 2044, and the sub-valve 2070 are gradually opened to enter SiH₄ gas, H₂ gas, B₂ H₆ /H₂ gas and NO gas into the reaction chamber 2001.

In this case, the exit valves 2041, 2042, 2043 and 2044 are adjusted so as to attain a desired value for the ratio among the SiH₄ gas flow rate, the H₂ gas flow rate, the B₂ H₆ /H₂ gas flow rate and the NO gas flow rate, and the opening of the main valve 2002 is adjusted while observing the reading on the vacuum gauge 2004 so as to obtain a desired value for the pressure inside the reaction chamber 2001. Then, the above-mentioned two microwave power sources are together set to a predetermined electric power to cause microwave (μW) glow discharging in the reaction chamber 2001 while controlling the flow rates of the B₂ H₆ /H₂ gas and/or the NO gas in accordance with a predetermined variation coefficient curve, to thereby form the charge injection inhibition layer on the IR absorption layer. When the charge injection inhibition layer has reached a desired thickness, the exit valves 2041, 2042, 2043 and 2044 are completely closed to stop the formation of the charge injection inhibition layer.

In order to form the CGL on the charge injection inhibition layer, the exit valves 2041 and 2042, and the sub-valve 2070 are opened to enter SiH₄ gas and H₂ gas in the reaction chamber 2001.

In this case, the exit valves 2041 and 2042 are adjusted so as to attain a desired value for the ratio among the SiH₄ gas flow rate and the H₂ gas flow rate, and the opening of the main valve 2002 is adjusted while observing the reading on the vacuum gauge 2004 so as to obtain a desired value for the pressure inside the reaction chamber 2001. Then, the above-mentioned two microwave source are together set to a predetermined electrical power to cause microwave (μW) glow discharging in the reaction chamber 2001, to thereby form the CGL on the charge injection inhibition layer. When the CGL has reached a desired thickness, the exit valves 1041 and 1042 are completely closed to stop the formation of the CGL.

In order to form the CTL on the CGL, the exit valves 2041, 2043, 2046 and 1047, and the sub-valve 2070 are gradually opened to enter SiH₄ gas, B₂ H₆ /H₂ gas, NH₃ gas and CH₄ gas into the reaction chamber 2001.

In this case, the exit valves 2041, 2043, 2046 and 2047 are adjusted so as to attain a desired value for the ratio among the SiH₄ gas flow rate, the B₂ H₆ /H₂ gas flow rate, the NH₃ gas flow rate and the CH₄ gas flow rate, and the opening of the main valve 2002 is adjusted while observing the reading on the vacuum gauge 2004 so as to obtain a desired value for the pressure inside the reaction chamber 2001. Then, the above-mentioned two microwave source are together set to a predetermined electrical power to cause microwave (μW) glow discharging in the reaction chamber 2001 while controlling the flow rates of the B₂ H₆ /H₂ gas and/or the CH₄ gas in accordance with a predetermined variation coefficient curve, to thereby form the CTL on the CGL. When the CGL has reached a desired thickness, the exit valves 1041 and 1042 are completely closed to stop the formation of the CGL.

In order to form the surface layer on the CTL, the exit valves 1041 and 1047, and the sub-valve 1070 are gradually opened to enter SiH₄ gas and CH₄ gas into the reaction chamber 1001.

In this case, the exit valves 1041 and 1047 are adjusted so as to attain a desired value for the ratio among the SiH₄ gas flow rate and the CH₄ gas flow rate, and the opening of the main valve 1002 is adjusted while observing the reading on the vacuum gauge 1004 so as to obtain a desired value for the pressure inside the reaction chamber 1001. Then, the above-mentioned two microwave source are together set to a predetermined electrical power to cause microwave (μW) glow discharging in the reaction chamber 2001, to thereby form the surface layer on the CTL. When the surface layer has reached a desired thickness, the exit valves 2041 and 2047 are completely closed to stop the formation of the surface layer.

All of the exit valves other than those required for upon forming the respective layers are of course closed. Further, upon forming the respective layers, the inside of the system is once evacuated to a high vacuum degree as required by closing the exit valves 2041 through 2046 while entirely opening the sub-valve 2070 and entirely opening the main valve 2002.

Further, during the layer forming operation, the Al cylinder as substrate 2006 is rotated at a predetermined speed by the action of the motor 2007.

In FIG. 62, there is shown another representative fabrication apparatus by means of the HR-CVD process for preparing the light receiving member for use in electrophotography according to this invention.

Explanation will be made to preparation of the light receiving member for use in electrophotography according to this invention using the apparatus shown in FIG. 62.

In FIG. 62, there are shown deposition chamber 3001, activation chamber (A) 3002, microwave plasma generation means 3003 and 3018, a raw material gas feed pipe for active species (A) 3004, active species (A) conduit 3005, motor 3006, cylinder heater 3007, gas liberation pipes 3008 and 3009, cylindrical substrate 3010, and main exhaust valve 3011. Further, there are shown gas reservoirs 3012 through 3016, activation chamber (B) 3017, raw material supplying pipe 3019, and active species (B) conduit 3020.

Explanation will be made to the case of forming the light receiving member for use in electrophotography according to this invention having the light receiving layer on an Al cylindrical substrate as shown in FIG. 1(H) using the apparatus shown in FIG. 62.

As the raw material gases, there are used SiH₄ gas, GeH₄ gas, B₂ H₆ /H₂ gas, NO gas and H₂ gas for forming the IR absorption layer; SiH₄ gas, B₂ H₆ /H₂ gas, NO gas and H₂ gas for forming the charge injection inhibition layer; SiH₄ gas and H₂ gas for forming the CGL; SiH₄ gas, SiF₄ gas, CH₄ gas, H₂ gas and B₂ H₆ /H₂ gas for forming the CTL; and SiH₄ gas and CH₄ gas for forming the surface layer.

Firstly, an Al cylindrical substrate 3010 is fixed onto a substrate holder provided with the heater 3003 being suspended in the deposition chamber 3001 in a state that it can be rotated by the motor 3006.

Then, the air in the deposition chamber 3001 is evacuated to bring the inside to a vacuum of 5×10⁻⁶ Torr.

Now, in order to form the IR absorption layer, H₂ gas from the reservoir 3012 is introduced through the gas feed pipe 3004 into the activation chamber (A) 3002 and the H₂ gas is activated by the action of the microwave plasma generation means 3003 to generated active hydrogen, which is successively introduced through the active species (A) conduit 3005 and the gas liberation pipe 3008 into the deposition chamber 3001. At the same time, SiH₄ gas from the reservoir 3013, B₂ H₆ /H₂ gas from the reservoir 3014, NO gas from the reservoir 3015, CH₄ gas from the reservoir 3016, GeH₄ gas and SiF₄ gas from the reservoirs (not shown) are introduced through the gas supplying pipe 3019 into the activation chamber (B) 3017 and these gases are activated by the action of the microwave plasma generation means 3018 to generate active species, which are successively introduced through the active species (B) conduit 3020 and the gas liberation pipe 3009 into the deposition chamber 3001. In each of the above cases, the flow rates of said raw material gases, the inner pressure, and the microwave power are all set to predetermined values respectively.

And, the Al cylindrical substrate 3010 is maintained at a predetermined temperature and the inside of the deposition chamber 3001 is properly evacuated by regulating the main valve 3011 to a predetermined vacuum.

In this way, the IR absorption layer is formed on the Al cylindrical substrate.

Using H₂ gas from the reservoir 3012, SiH₄ gas from the reservoir 3013, B₂ H₆ /H₂ gas from the reservoir 3014 and NO gas from the reservoir 3015, the above procedures are repeated to thereby form the charge injection inhibition layer on the IR absorption layer.

Likewise, using H₂ gas from the reservoir 3012 and SiH₄ gas from the reservoir 3013, the above procedures in the case of forming the IR absorption layer are repeated to thereby form the CGL on the charge injection inhibition layer.

Then, using H₂ gas from the reservoir 3012, SiH₄ gas from the reservoir 3013, B₂ H₆ /H₂ gas from the reservoir 3014, CH₄ gas from the reservoir 3016 and SiF₄ gas from the reservoir (not shown), the above procedures in the case of forming the IR absorption layer are repeated to thereby form the CTL on the CGL.

Finally, using H₂ gas from the reservoir 3012 and SiH₄ gas from the reservoir 3013, the procedures in the case of forming the CGL are repeated to thereby form the surface layer on the CTL.

And in any case where it is necessary to distribute the conductivity controlling element and/or the atoms (O,C,N) at uneven distribution concentration in the thicknesswise direction, the flow rate of the corresponding gas supplying such atoms is controlled properly in accordance with a predetermined variation coefficient curve.

In FIG. 63, there is shown another representative fabrication apparatus by means of the FO-CVD process for preparing the light receiving member for use in electrophotography according to this invention.

Explanation will be made to preparation of the light receiving member for use in electrophotography according to this invention having the light receiving layer on an Al cylindrical substrate as shown in FIG. 1(H) using the apparatus shown in FIG. 63.

In the apparatus shown in FIG. 63, gas reservoirs 4011, 1012, 4013, 4014, 4015, 4016 and 4017 illustrated in the figure are charged with gaseous raw materials for forming the respective layers in the light receiving member for use in electrophotography according to this invention, that is, for instance, SiH₄ gas (99.999% purity) in the reservoir 4011, H₂ gas (99.999% purity) in the reservoir 4012, B₂ H₆ gas (99.999% purity) diluted with H₂ (referred to as "B₂ H₆ /H₂ gas") in the reservoir 4013, NO gas (99.5% purity) in the reservoir 4014, GeH₄ gas (99.999% purity) in the reservoir 4015, CH₄ gas (99.999% purity) in the reservoir 4016 and F₂ gas (99.99% purity) diluted with H₂ in the reservoir 4017.

As the raw material gases, there are used SiH₄ gas, GeH₄ gas, B₂ H₆ /H₂ gas, NO gas and F₂ gas for forming the IR absorption layer; SiH₄ gas, B₂ H₆ /H₂ gas, NO gas, H₂ gas and F₂ gas for forming the charge injection inhibition layer; SiH₄ gas, H₂ gas and F₂ gas for forming the CGL; SiH₄ gas, F₂ gas, CH₄ gas, and B₂ H₆ /H₂ gas for forming the CTL; and SiH₄ gas, CH₄ gas and F₂ gas for forming the surface layer.

In the apparatus shown in FIG. 63, the respective raw material gases from the reservoirs 4011 through 4015 are introduced respectively through mass flow controllers, 4053 to 4057, then raw material gas supplying pipe 4020 into the deposition chamber 4001.

On the other hand, the F₂ gas from the reservoir 4017 is introduced through mass flow controller 4052' and raw material gas supplying pipe 4021 into the deposition chamber 4001.

The inside of the deposition chamber 4001 is properly evacuated through main valve 4002 being mechanically connected to an exhaust apparatus (not shown).

Numeral 4060 stands for an Al cylindrical substrate 4060 placed on a substrate holder in which an electric heater 4061 being installed and which is suspended in the deposition chamber in a state that it can be rotated by motor 4062.

The electric heater 4061 serves to heat the Al cylindrical substrate 4060 or to aneal the film formed thereon.

Prior to the entrance of the raw material gases into the deposition chamber 4001, the inner pressure of the deposition chamber 4001 is adjusted to a vacuum of about 5×10⁻⁶ Torr, and the raw material gases are introduced thereinto.

And, the temperature of the Al cylindrical substrate is adjusted to a temperature of 50° to 300° C.

In order to form the IR absorption layer, SiH₄ gas, B₂ H₆ /H₂ gas, NO gas and GeH₄ gas, and F₂ gas are entered respectively into the deposition chamber by opening the valves 4046, 4048, 4049, 4050 and 4052 and also gradually opening the exit valves 4031, 4033, 4034, 4035 and 4037, and the sub-valve 4060. In this case, the exit valves 4031, 4033, 4034, 4035 and 4037, and the sub-valve 4046 are adjusted so as to attain a desired valve for the ratio among the SiH₄ gas flow rate, the B₂ H₆ /H₂ gas flow rate, the NO gas flow rate, the GeH₄ gas flow rate and the F₂ gas flow rate, and the opening of the main valve 4002 is adjusted while observing the reading on a vacuum gauge (not shown) so as to obtain a desired value for the inner pressure of the deposition chamber 4001.

In this way, there is formed the IR absorption layer.

The above procedures are repeated to form the successive charge injection inhibition layer, CGL, CTL and surface layer using the corresponding raw material gases as above mentioned.

And in any case where it is necessary to distribute the conductivity controlling element and/or the atoms (O,C,N) at uneven distribution concentration in the thicknesswise direction, the flow rate of the corresponding gas supplying such atoms is controlled properly in accordance with a predetermined variation coefficient curve.

In any of the above-mentioned cases using one of the apparatuses shown in FIGS. 60 through 63, it is possible to use an appropriate dilution gas such as He, Ar, etc. in order to dilute the raw material gas to control the chemical reaction among the raw materials or to make discharging stable at the time of forming each layer. And, such dilution gas can be used alone or in a mixture with the raw material gas.

EXAMPLE 1

There were prepared multiple light receiving members for use in electrophotography on Al cylinders having a mirror plane surface under the conditions shown in Tables 1 through 4 using the RF glow discharging fabrication apparatus shown in FIG. 60.

For the resultant light receiving members (hereinafter, this kind light receiving member being referred to as "drum"), they were set to a conventional electrophotographic copying machine having digital exposure functions and using a semiconductor laser beam of 780 nm wavelength to examine the electrophotographic characteristics such as initial charge-retentivity, photosensitivity, residual potential, appearance of a ghost, etc., and also reduction in the charge-retentivity, surface shaving and increase of defective images after two million times repeated shots.

In addition, there was examined dielectric strength by impressing a DC voltage.

Further in addition, there was examined surface disfigurement resistance by pressing the round end point of a needle onto the surface while supplying a predetermined load.

The results obtained of the above various evaluations are shown in Table 5.

As Table 5 illustrates, it can be recognized that every drum is satisfactory for every evaluation item, and excels particularly in the initial charge-retentivity and the durability.

EXAMPLE 2

There were prepared multiple drums under the conditions shown in Tables 1, 2, 6 and 7 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 8.

As Table 8 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 3

There were prepared multiple drums under the conditions shown in Tables 1, 2, 9 and 10 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 11.

As Table 11 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 4

There were prepared multiple drums under the conditions shown in Tables 1, 2, 12 and 13 using the RF glow discharging fabrication apparatus shown in FIG. 60

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 14.

As Table 14 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 5

There were prepared multiple drums under the conditions shown in Tables 1, 2, 15 and 16 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 17.

As Table 17 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 6

There were prepared multiple drums under the conditions shown in Tables 1, 2, 18 and 19 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 20.

As Table 20 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 17

There were prepared multiple drums under the conditions shown in Tables 1, 2, 21 and 22 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 23.

As Table 23 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 8

There were prepared multiple drums under the conditions shown in Tables 1, 2, 24 and 25 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 26.

As Table 26 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 9

There were prepared multiple drums under the conditions shown in Tables 1, 2, 27 and 28 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 29.

As Table 29 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 10

There were prepared multiple drums under the conditions shown in Tables 1, 2, 30 and 31 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 32.

As Table 32 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 11

There were prepared multiple drums under the conditions shown in Tables 1, 2, 33 and 34 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 35.

As Table 35 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 12

There were prepared multiple drums under the conditions shown in Tables 1, 2, 36 and 37 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 38.

As Table 38 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 13

There were prepared multiple drums under the conditions shown in Tables 1, 2, 39 and 40 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 41.

As Table 41 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 14

There were prepared multiple drums under the conditions shown in Tables 1, 2, 42 and 43 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 44.

As Table 44 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 15

There were prepared multiple drums under the conditions shown in Tables 1, 2, 45 and 46 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 47.

As Table 47 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 16

There were prepared multiple drums under the conditions shown in Tables 1, 2, 48 and 49 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 50.

As Table 50 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 17

There were prepared multiple drums under the conditions shown in Tables 1, 2, 51 and 52 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 53.

As Table 53 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 18

There were prepared multiple drums under the conditions shown in Tables 1, 2, 54 and 55 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 56.

As Table 56 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 19

There were prepared multiple drums under the conditions shown in Tables 1, 2, 57 and 58 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 59.

As Table 59 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 20

There were prepared multiple drums under the conditions shown in Tables 1, 2, 60 and 61 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 62.

As Table 62 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 21

There were prepared multiple drums under the conditions shown in Tables 1, 2, 63 and 64 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 65.

As Table 65 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 22

There were prepared multiple drums under the conditions shown in Tables 1, 2, 66 and 67 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 68.

As Table 68 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 23

There were prepared multiple drums under the conditions shown in Tables 1, 2, 69 and 70 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 71.

As Table 71 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 24

There were prepared multiple drums under the conditions shown in Tables 1, 2, 72 and 73 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 74.

As Table 74 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 25

There were prepared multiple drums under the conditions shown in Tables 1, 2, 75 and 76 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 77.

As Table 77 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 26

There were prepared multiple drums under the conditions shown in Tables 1, 2, 78 and 79 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 80.

As Table 80 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 27

There were prepared multiple drums under the conditions shown in Tables 1, 2, 81 and 82 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 83.

As Table 83 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 28

There were prepared multiple drums under the conditions shown in Tables 1, 2, 84 and 85 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 86.

As Table 86 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 29

There were prepared multiple drums under the conditions shown in Tables 1, 2, 87 and 88 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 89.

As Table 89 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 30

There were prepared multiple drums under the conditions shown in Tables 1, 2, 90 and 91 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 92.

As Table 92 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 31

There were prepared multiple drums under the conditions shown in Tables 1, 2, 93 and 94 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 95.

As Table 95 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 32

There were prepared multiple drums under the conditions shown in Tables 1, 2, 96 and 97 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 98.

As Table 98 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

Example 33

There were prepared multiple drums under the conditions shown in Tables 1, 2, 99 and 100 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 101.

As Table 101 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 34

There were prepared multiple drums under the conditions shown in Tables 1, 2, 102 and 103 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 104.

As Table 104 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 35

There were prepared multiple drums under the conditions shown in Tables 1, 2, 105 and 106 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 107.

As Table 107 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 36

There were prepared multiple drums under the conditions shown in Tables 1, 2, 108 and 109 using the RF glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 110.

As Table 110 illustrates, it can be recognized that every drum is satisfactory for every evaluation item.

EXAMPLE 37

There were prepared multiple drums on Al cylinders having a mirror plane surface under the conditions shown in Table 111, 112, 113 and 114 using the microwave CVD fabrication apparatus shown in FIG. 61.

Evaluations were made on the resultant drums in the same way as in Example 1. There were obtained the results as shown in Table 115.

As Table 115 illustrates, it can be recognized that every drum is satisfactory for every evaluation item, and excels particularly in the initial charge-retentivity and the durability.

EXAMPLE 38

There were prepared multiple drums on Al cylinders having a mirror plane surface under the conditions shown in Tables 116, 117, 118 and 119 using the HR-CVD fabrication apparatus shown in FIG. 62.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 120.

As Table 120 illustrates, it can be recognized that every drum is satisfactory for every evaluation item, and excels particularly in the initial charge-retentivity and the durability

EXAMPLE 39

There were prepared multiple drums on Al cylinders having a mirror plane surface under the conditions shown in Tables 121, 122, 123 and 124 using the FO-CVD fabrication apparatus shown in FIG. 62.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 125.

As Table 125 illustrates, it can be recognized that every drum is satisfactory for every evaluation item, and excels particularly in the initial charge-retentivity and the durability.

EXAMPLE 40

A plurality of Al cylinders having a mirror grinded surface were treated by means of a surface cutting method using a cutting tool to thereby provide surface treated Al cylinders having the cross-sectional patters as shown in Table 127.

Using the glow discharging fabrication apparatus shown in FIG. 60, a light receiving layer was formed on each of the above Al cylinders under the conditions shown in Table 126 to thereby obtain multiple drums.

Every drum was set to a conventional electrophotographic copying machine having digital exposure functions and using a semiconductor laser beam of 780 nm wavelength to examine various evaluation items in the same way as in Example 1. There were obtained the results as shown in Table 128.

EXAMPLE 41

A plurality of Al cylinders having a mirror grinded surface were further treated by means of the foregoing surface treating method using bearing balls to thereby provide surface treated Al cylinders having the cross-sectional configurations as shown in FIG. 69 and the crosssectional patterns as shown in Table 130.

Using the Rf glow discharging fabrication apparatus shown in FIG. 60, a light receiving layer was formed on each of the above Al cylinders under the conditions shown in Table 129 to thereby obtain multiple drums.

Every drum was set to a conventional electrophotographic copying machine having digital exposure functions and using a semiconductor laser beam of 780 nm wavelength to examine various evaluation items in the same way as in Example 1. There were obtained the results as shown in Table 131

EXAMPLE 42

There were prepared multiple drums on Al cylinders having a mirror plane surface under the conditions shown in Tables 132, 133, 134 and 135 using the Rf glow discharging fabrication apparatus shown in FIG. 60.

Evaluations were made on the resultant drums in the same way as in Example 1.

There were obtained the results as shown in Table 136.

As Table 136 illustrates, it can be recognized that every drum is satisfactory for every evaluation item, and excels particularly in the initial charge-retentivity and the durability.

EXAMPLES 43 to 140

Under the conditions shown in in Table 137, there were prepared a plurality of drum samples (Sample Nos. 101A to 2218G).

The resultant samples were evaluated in the same way as in Example 1.

There were obtained the evaluation results as shown in Table 138 through Table 243.

In each example, there was employed the constituent layer forming conditions expressed by the corresponding No. in the column "Corresponding Table No." in Table 137, and the prepared layer is shown by the mark "0" in the column "Prepared Layer" in that Table.

In each example, as for the corresponding combination Table relating to the CTL/CGL in Sample No., when the last two numerals of the figure for the Sample No. are common, it means that the same CTL/CGL combination was chosen.

                  TABLE 1                                                          ______________________________________                                         Film forming Conditions of CGL                                                        Gas used &                                                                               Substrate RF    Internal                                                                              Layer                                  Name of                                                                               its flow rate                                                                            temperature                                                                              power pressure                                                                              thickness                              layer  (SCCM)    (°C.)                                                                             (W)   (Torr) (μm)                                ______________________________________                                         CGL 1  SiH.sub.4                                                                             200    250     300   0.40   1                                           H.sub.2                                                                               200                                                              CGL 2  SiH.sub.4                                                                             150    250     300   0.40   2                                           SiF.sub.4                                                                             50                                                                      H.sub.2                                                                               200                                                              CGL 3  SiH.sub.4                                                                             200    250     300   0.40   5                                           He     200                                                              CGL 4  SiH.sub.4                                                                             200    250     350   0.40   2                                           Ar     200                                                              ______________________________________                                    

                  TABLE 2                                                          ______________________________________                                         Film Forming Conditions of CTL                                                 Name  Gas used & Substrate RF    Internal                                                                              Layer                                  of    its flow rate                                                                             temperature                                                                              power pressure                                                                              thickness                              layer (SCCM)     (°C.)                                                                             (W)   (Torr) (μm)                                ______________________________________                                         CTL 1 SiH.sub.4 100                                                                             250       300   0.40   24                                           SiF.sub.4 50                                                                   CH.sub.4 450                                                                   B.sub.2 H.sub.6 [FIG. 64                                                       (1)]                                                                     CTL 2 SiH.sub.4 250                                                                             250       300   0.42   24                                           C.sub.2 H.sub.2 400                                                            PH.sub.3 [FIG. 64                                                              (2)]                                                                     CTL 3 SiH.sub.4 300                                                                             250       200   0.35   20                                           C.sub.2 H.sub.2 350                                                            B.sub.2 H.sub.6 [FIG. 64                                                       (3)]                                                                     CTL 4 SiH.sub.4 80                                                                              250       350   0.45   20                                           C.sub.2 H.sub.4 600                                                            PH.sub.3 [FIG. 64                                                              (4)]                                                                     CTL 5 SiH.sub.4 120                                                                             250       350   0.45   24                                           N.sub.2 500                                                                    CH.sub.4 [FIG. 64                                                              (5)]                                                                           B.sub.2 H.sub.6 [FIG. 64                                                       (5)]                                                                     CTL 6 SiH.sub.4 150                                                                             250       300   0.40   12                                           NH.sub.3 300                                                                   CH.sub.4 300                                                                   PH.sub.3 [FIG. 64                                                              (6)]                                                                     CTL 7 SiH.sub.4 350                                                                             250       250   0.38   28                                           C.sub.2 H.sub.4 25                                                             Ar 200                                                                         PH.sub.3 [FIG. 64                                                              (7)]                                                                     CTL 8 SiH.sub.4 500                                                                             250       300   0.40   28                                           NO 60                                                                          B.sub.2 H.sub.6 [FIG. 64                                                       (8)]                                                                           NH.sub.3 [FIG. 64                                                              (8)]                                                                           CH.sub.4 [FIG. 64                                                              (8)]                                                                     ______________________________________                                    

                  TABLE 3                                                          ______________________________________                                         CTL No                                                                                 CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         Drum No                                                                        CGL 1   101    102    103  104  105  106  107  108                             CGL 2   109    110    111  112  113  114  115  116                             CGL 3   117                                                                    CGL 4   118                                                                    ______________________________________                                    

                                      TABLE 4                                      __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4       100                                                      absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                           50                                                       layer (surface side 0.3 μm)                                                                       50 → 0                                                  (constantly decrease)  250    150 0.35 1                                       B.sub.2 H.sub.6 (against SiH.sub.4)                                                            1000                                                                               ppm                                                        NO              10                                                             H.sub.2         100                                                      Charge                                                                               SiH.sub.4       100                                                      injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                            800 ppm                                                                               250    150 0.35 3                                 inhibition                                                                           H.sub.2         100                                                      layer NO              10                                                       CGL/CTL                                                                              Combination as shown in Table 3                                          Surface                                                                              SiH.sub.4       50     250    150 0.4  0.5                               layer CH.sub.4        600                                                      __________________________________________________________________________

                  TABLE 5                                                          ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         101     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       102     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       103     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       104     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       105     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       106     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       107     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       108     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       109     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       110     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       111     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       112     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       113     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       114     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       115     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       116     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       117     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       118     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                 ○ : good                                                               X: practically not applicable                                            

                  TABLE 6                                                          ______________________________________                                         CTL No                                                                                 CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         Drum No                                                                        CGL 1   201    202    203  204  205  206  207  208                             CGL 2   209    210    211  212  213  214  215  216                             CGL 3   217                                                                    CGL 4   218                                                                    ______________________________________                                    

                                      TABLE 7                                      __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4       100                                                      absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                           50                                                       layer (surface side 0.3 μm)                                                                       50 → 0                                                  (constantly decrease)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                            1000                                                                               ppm                                                                               250    150 0.35 1                                       NO (substrate side 0.7 μm)                                                                  10                                                             (surface side 0.3 μm)                                                                       10 → 0                                                  (constantly decrease)                                                    Charge                                                                               SiH.sub.4       100                                                      injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                            800 ppm                                                  inhibition                                                                           H.sub.2         100                                                      layer NO (substrate side 2 μm)                                                                    10     250    150 0.35 3                                       surface side 1 μm)                                                                          10 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 6                                          Surface                                                                              SiH.sub.4       20     250    150 0.4  0.5                               layer CH.sub.4        500                                                      __________________________________________________________________________

                  TABLE 8                                                          ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         201     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       202     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       203     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       204     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       205     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       206     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       207     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       208     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       209     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       210     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       211     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       212     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       213     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       214     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       215     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       216     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       217     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       218     ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                 ○ : good                                                               X: practically not applicable                                            

                  TABLE 9                                                          ______________________________________                                         CTL No                                                                                 CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         Drum No                                                                        CGL 1   301    302    303  304  305  306  307  308                             CGL 2   309    310    311  312  313  314  315  316                             CGL 3   317                                                                    CGL 4   318                                                                    ______________________________________                                    

                                      TABLE 10                                     __________________________________________________________________________                                     Substrate                                                                             RF  Internal                                                                            Layer                          Name of                         temperature                                                                           power                                                                              pressure                                                                            thickness                      layer Gas used & its flow rate (SCCM)                                                                          (°C.)                                                                          (W) (Torr)                                                                              (μm)                        __________________________________________________________________________     IR    SiH.sub.4       100                                                      absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                           50                                                       layer (surface side 0.3 μm)                                                                       50 → 0                                                  (constantly decrease)     250    150 0.35 1                                    B.sub.2 H.sub.6 (against SiH.sub.4)                                                            1000   ppm                                                     NO              10                                                             H.sub.2         100                                                      Charge                                                                               SiH.sub.4       100                                                      injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                            800    ppm                                                                               250    150 0.35 3                              inhibition                                                                           H.sub.2         100                                                      layer NO              10                                                       CGL/CTL                                                                              Combination as shown in Table 9                                          Surface                                                                              SiH.sub.4 (substrate side)                                                                     350 → 10                                          layer                 (surface side)                                                 CH.sub.4 (substrate side)                                                                      10 → 600                                                                          250    150 0.4  1                                                    (surface side)                                                 (constantly diversify)                                                   __________________________________________________________________________

                  TABLE 11                                                         ______________________________________                                                 initial                                                                        charge-     photo-  residual                                           Drum No.                                                                               retentivity sensitivity                                                                            potential                                                                             ghost                                                                               durability                             ______________________________________                                         301     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       302     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       303     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       304     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       305     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       306     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       307     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       308     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       309     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       310     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       311     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       312     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       313     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       314     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       315     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       316     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       317     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       318     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                 ○ : good                                                               X: practically not applicable                                            

                  TABLE 12                                                         ______________________________________                                         CTL No                                                                                 CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         Drum No                                                                        CGL 1   401    402    403  404  405  406  407  408                             CGL 2   409    410    411  412  413  414  415  416                             CGL 3   417                                                                    CGL 4   418                                                                    ______________________________________                                    

                                      TABLE 13                                     __________________________________________________________________________                                   Substrate                                                                             RF  Internal                                                                            Layer                            Name of                       temperature                                                                           power                                                                              pressure                                                                            thickness                        layer Gas used & its flow rate (SCCM)                                                                        (°C.)                                                                          (W) (Torr)                                                                              (μm)                          __________________________________________________________________________     IR    SiH.sub.4        100                                                     absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                            50                                                      layer (surface side 0.3 μm)                                                                        50 → 0                                                 (constantly decrease)   250    150 0.35 1                                      B.sub.2 H.sub.6 (against SiH.sub.4)                                                             800 ppm                                                       NO               10                                                      Charge                                                                               SiH.sub.4        100                                                     injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                             800 ppm                                                 inhibition                                                                           H.sub.2          100                                                     layer NO (substrate side 2 μm)                                                                     10     250    150 0.35 3                                      (surface side 1 μm)                                                                          10 → 0                                                 (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 12                                         Surface                                                                              SiH.sub.4        20     250    150 0.4  1                                layer CH.sub.4         500                                                     __________________________________________________________________________

                  TABLE 14                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         401     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       402     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       403     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       404     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       405     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       406     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       407     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       408     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       409     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       410     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       411     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       412     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       413     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       414     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       415     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       416     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       417     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       418     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                 ○ : good                                                               X: practically not applicable                                            

                  TABLE 15                                                         ______________________________________                                         CTL No                                                                                 CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         Drum No                                                                        CGL 1   501    502    503  504  505  506  507  508                             CGL 2   509    510    511  512  513  514  515  516                             CGL 3   517                                                                    CGL 4   518                                                                    ______________________________________                                    

                                      TABLE 16                                     __________________________________________________________________________                                Substrate                                                                             RF  Internal                                                                            Layer                               Name of                    temperature                                                                           power                                                                              pressure                                                                            thickness                           layer Gas used & its flow rate (SCCM)                                                                     (°C.)                                                                          (W) (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4       100  250    150 0.35 1                                   absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                           50                                                       layer (surface side 0.3 μm)                                                                       50 → 0                                                  (constantly decrease)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                           1000 ppm                                                        NO              10                                                             H.sub.2         100                                                      Charge                                                                               SiH.sub.4       100  250    150 0.35 3                                   injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                           1000 ppm                                                  inhibition                                                                           H.sub.2         100                                                      layer NO              10                                                       CGL/CTL                                                                              Combination as shown in Table 15                                         Surface                                                                              SiH.sub.4 (substrate side)                                                                     350 → 10                                                                     250    150 0.4  1                                   layer (surface side)                                                                 CH.sub.4 (substrate side)                                                                      10 → 600                                                (surface side)                                                                 (constantly diversity                                                    __________________________________________________________________________

                  TABLE 17                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         501     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       502     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       503     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       504     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       505     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       506     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       507     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       508     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       509     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       510     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       511     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       512     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       513     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       514     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       515     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       516     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       517     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       518     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 18                                                         ______________________________________                                          CTL No                                                                        Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         CGL 1  601    602     603  604  605  606   607  608                            CGL 2  609    610     611  612  613  614   615  616                            CGL 3  617                                                                     CGL 4  618                                                                     ______________________________________                                    

                                      TABLE 19                                     __________________________________________________________________________                                Substrate                                                                             RF  Internal                                                                            Layer                               Name of                    temperature                                                                           power                                                                              pressure                                                                            thickness                           layer Gas used & its flow rate (SCCM)                                                                     (°C.)                                                                          (W) (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4       100  250    150 0.35 1                                   absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                           50                                                       layer (surface side 0.3 μm)                                                                       50 → 0                                                  (constantly decrease)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                           1200 ppm                                                        NO (substrate side 0.7 μm)                                                                  50                                                             (surface side 0.3 μm)                                                                        5 → 10                                                 (constantly decrease)                                                    Charge                                                                               SiH.sub.4       100  250    150 0.35 3                                   injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                           1200 ppm                                                  inhibition                                                                           H.sub.2         100                                                      layer NO (substrate side 2 μm)                                                                    10                                                             (surface side 1 μm)                                                                         10 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 18                                         Surface                                                                              SiH.sub.4 (substrate side)                                                                     350 → 10                                                                     250    150 0.4  1                                   layer (surface side)                                                                 CH.sub.4 (substrate side)                                                                     10 → 600                                                 (surface side)                                                                 (constantly diversify                                                    __________________________________________________________________________

                  TABLE 20                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         601     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       602     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       603     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       604     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       605     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       606     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       607     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       608     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       609     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       610     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       611     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       612     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       613     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       614     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       615     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       616     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       617     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       618     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 21                                                         ______________________________________                                          CTL No                                                                        Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 2      3       4    5    6    7     8                                   ______________________________________                                         CGL 1  701    702     703  704  705  706   707  708                            CGL 2  709    710     711  712  713  714   715  716                            CGL 3  717                                                                     CGL 4  718                                                                     ______________________________________                                    

                                      TABLE 22                                     __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub.4       100 250    150 0.35 1                                    absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                           50                                                       layer (surface side 0.3 μm)                                                                      50 → 0                                                   (constantly decrease)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                           1000 ppm                                                        NO (substrate side 0.7 μm)                                                                  10                                                             (surface side 0.3 μm)                                                                       10 → 0                                                  (constantly decrease)                                                    Charge                                                                               SiH.sub.4       100 250    150 0.35 3                                    injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                            800 ppm                                                  inhibition                                                                           H.sub.2         100                                                      layer NO              10                                                       CGL/CTL                                                                              Combination as shown in Table 21                                         Surface                                                                              SiH.sub.4       50  250    150 0.4  1                                    layer CH.sub.4        500                                                      __________________________________________________________________________

                  TABLE 23                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         701     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       702     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       703     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       704     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       705     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       706     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       707     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       708     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       709     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       710     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       711     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       712     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       713     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       714     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       715     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       716     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       717     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       718     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 24                                                         ______________________________________                                          CTL No                                                                        Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         CGL 1  801    802     803  804  805  806   807  808                            CGL 2  809    810     811  812  813  814   815  816                            CGL 3  817                                                                     CGL 4  818                                                                     ______________________________________                                    

                                      TABLE 25                                     __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub.4       100 250    150 0.35 1                                    absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                           50                                                       layer (surface side 0.3 μm)                                                                       50 → 0                                                  (constantly decrease)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                            800 ppm                                                        NO (substrate side 0.7 μm)                                                                  10                                                             (surface side 0.3 μm)                                                                       10 → 0                                                  (constantly decrease)                                                    Charge                                                                               SiH.sub.4       100 250    150 0.35 3                                    injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                            800 ppm                                                  inhibition                                                                           H.sub.2         100                                                      layer NO (substrate side 2 μm)                                                                    10                                                             (surface side 1 μm)                                                                         10 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 24                                         Surface                                                                              SiH.sub.4       50  250    150 0.4  2                                    layer CH.sub.4        500                                                      __________________________________________________________________________

                  TABLE 26                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         801     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       802     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       803     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       804     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       805     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       806     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       808     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       808     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       809     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       810     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       811     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       812     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       813     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       814     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       815     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       816     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       817     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       818     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 27                                                         ______________________________________                                          CTL No                                                                        Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         CGL 1  901    902     903  904  905  906   907  908                            CGL 2  909    910     911  912  913  914   915  916                            CGL 3  917                                                                     CGL 4  918                                                                     ______________________________________                                    

                                      TABLE 28                                     __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub.4       100 250    150 0.35 1                                    absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                           50                                                       layer (surface side 0.3 μm)                                                                       50 → 0                                                  (Constantly decrease)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                           800 ppm                                                         NO              10                                                       Charge                                                                               SiH.sub.4      100  250    150 0.35 3                                    injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                           800 ppm                                                   inhibition                                                                           H.sub.2        100                                                       layer NO              10                                                       CGL/CTL                                                                              Combination as shown in Table 27                                         Surface                                                                              SiH.sub.4      200  250    150 0.4  2                                    layer SiF.sub.4       50                                                             NO              50                                                             CH.sub.4        5                                                              NH.sub.3        5                                                        __________________________________________________________________________

                  TABLE 29                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         901     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       902     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       903     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       904     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       905     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       906     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       909     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       908     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       909     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       910     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       911     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       912     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       913     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       914     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       915     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       916     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       917     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       918     ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 30                                                         ______________________________________                                          CTL No                                                                        Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         CGL 1  1001   1002    1003 1004 1005 1006  1007 1008                           CGL 2  1009   1010    1011 1012 1013 1014  1015 1016                           CGL 3  1017                                                                    CGL 4  1018                                                                    ______________________________________                                    

                                      TABLE 31                                     __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4        100  250    150 0.35 1                                  absorption                                                                           GeH.sub.4 (substrate side 0.7 μm)                                                             50                                                     layer (surface side 0.3 μm)                                                                         50 → 0                                                (constantly decrease)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                             800 ppm                                                       NO                10                                                     Charge                                                                               SiH.sub.4        100  250    150 0.35 3                                  injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                             800 ppm                                                 inhibition                                                                           H.sub.2          100                                                     layer NO(substrate side 2 μm)                                                                       10                                                           (surface side 1 μm)                                                                           10 → 0                                                (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 30                                         Surface                                                                              SiH.sub.4        200  250    150 0.4  2                                  layer SiF.sub.4         50                                                           NO                50                                                           CH.sub.4          5                                                            NH.sub.3          5                                                      __________________________________________________________________________

                  TABLE 32                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1001    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1002    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1003    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1004    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1005    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1006    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1007    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1008    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1009    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1010    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1011    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1012    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1013    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1014    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1015    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1016    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1017    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1018    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                x: practically not appplicable                                           

                  TABLE 33                                                         ______________________________________                                         CTL No                                                                         CTL       CTL    CTL     CTL  CTL   CTL  CTL  CTL                              Drum No                                                                        CGL No 1      2      3     4    5     6    7    8                              ______________________________________                                         CGL 1  1101   1102   1103  1104 1105  1106 1107 1108                           CGL 2  1109   1110   1111  1112 1113  1114 1115 1116                           CGL 3  1117                                                                    CGL 4  1118                                                                    ______________________________________                                    

                                      TABLE 34                                     __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4        100  250    150 0.35 1                                  absorption                                                                           GeH.sub.4         50                                                     layer CH.sub.4 (substrate side 0.7 μm)                                                              10                                                           (surface side 0.3 μm)                                                       (constantly decrease)                                                          NO (substrate side 0.7 μm)                                                                    5                                                            (surface side 0.3 μm)                                                                         5 → 0                                                 (constantly decrease)                                                          N.sub.2 (substrate side 0.7 μm)                                                               30                                                           (surface side 0.3 μm)                                                                         30 → 0                                                (constantly decrease)                                                    Charge                                                                               SiH.sub.4        100                                                     injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                             800 ppm                                                                             250    150 0.35 3                                  inhibition                                                                           H.sub.2          100                                                     layer NO                10                                                     CGL/CTL                                                                              Combination as shown in Table 33                                         Surface                                                                              SiH.sub.4         50  250    150 0.4  5                                  layer CH.sub.4         600                                                     __________________________________________________________________________

                  TABLE 35                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1101    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1102    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1103    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1104    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1105    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1106    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1107    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1108    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1109    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1110    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1111    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1112    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1113    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1114    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1115    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1116    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1117    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1118    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                x: practically not applicable                                            

                  TABLE 36                                                         ______________________________________                                         CTL No                                                                         CTL       CTL    CTL     CTL  CTL   CTL  CTL  CTL                              Drum No                                                                        CGL No 1      2      3     4    5     6    7    8                              ______________________________________                                         CGL 1  1201   1202   1203  1204 1205  1206 1207 1208                           CGL 2  1209   1210   1211  1212 1213  1214 1215 1216                           CGL 3  1217                                                                    CGL 4  1218                                                                    ______________________________________                                    

                                      TABLE 37                                     __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4        100  250    150 0.35 1                                  absorption                                                                           GeH.sub.4         50                                                     layer CH.sub.4 (substrate side 0.7 μm)                                                              10                                                           (surface side 0.3 μm)                                                                         10 → 0                                                (constantly decrease)                                                          NO                10                                                           N.sub.2 (substrate side 0.7 μm)                                                               30                                                           (surface side 0.3 μm)                                                                         30 → 0                                                (constantly decrease)                                                    Charge                                                                               SiH.sub.4        100  250    150 0.35 3                                  injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                             800 ppm                                                 inhibition                                                                           H.sub.2          100                                                     layer NO(substrate side 2 μm)                                                                       10                                                           (surface side 1 μm)                                                                           10 → 0                                                (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 36                                         Surface                                                                              SiH.sub.4         50  250    150 0.4  5                                  layer CH.sub.4         600                                                     __________________________________________________________________________

                  TABLE 38                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1201    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1202    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1203    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1204    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1205    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1206    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1207    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1208    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1209    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1210    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1211    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1212    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1213    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1214    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1215    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1216    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1217    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       1218    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                x: practically not applicable                                            

                  TABLE 39                                                         ______________________________________                                         CTL No                                                                         CTL       CTL    CTL     CTL  CTL   CTL  CTL  CTL                              Drum No                                                                        CGL No 1      2      3     4    5     6    7    8                              ______________________________________                                         CGL 1  1301   1302   1303  1304 1305  1306 1307 1308                           CGL 2  1309   1310   1311  1312 1313  1314 1315 1316                           CGL 3  1317                                                                    CGL 4  1318                                                                    ______________________________________                                    

                                      TABLE 40                                     __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4        100  250    150 0.35 1                                  absorption                                                                           GeH.sub.4         50                                                     layer CH.sub.4 (substrate side 0.7 μm)                                                              10                                                           (surface side 0.3 μm)                                                                         10 → 0                                                (constantly decrease)                                                          NO (substrate side 0.7 μm)                                                                    30                                                           N.sub.2 (surface side 0.3 μm)                                                                 30 → 0                                                (constantly decrease)                                                    Charge                                                                               SiH.sub.4        100  250    150 0.35 3                                  injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                             800 ppm                                                 inhibition                                                                           H.sub.2          100                                                     layer NO                10                                                     CGL/CTL                                                                              Combination as shown in Table 39                                         Surface                                                                              SiH.sub.4         20  250    150 0.4  1                                  layer CH.sub.4         500                                                     __________________________________________________________________________

                  TABLE 41                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1301    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1302    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1303    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1304    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1305    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1306    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1307    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1308    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1309    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1310    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1311    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1312    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1313    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1314    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1315    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1316    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1317    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1318    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                x: practically not applicable                                            

                  TABLE 42                                                         ______________________________________                                         CTL No                                                                         CTL       CTL    CTL     CTL  CTL   CTL  CTL  CTL                              Drum No                                                                        CGL No 1      2      3     4    5     6    7    8                              ______________________________________                                         CGL 1  1401   1402   1403  1404 1405  1406 1407 1408                           CGL 2  1409   1410   1411  1412 1413  1414 1415 1416                           CGL 3  1417                                                                    CGL 4  1418                                                                    ______________________________________                                    

                                      TABLE 43                                     __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4        100  250    150 0.35 1                                  absorption                                                                           GeH.sub.4         50                                                     layer CH.sub.4 (substrate side 0.7 μm)                                                              10                                                           (surface side 0.3 μm)                                                                         10 → 0                                                (constantly decrease)                                                          NO                10                                                           N.sub.2 (substrate side 0.7 μm)                                                               30                                                           (surface side 0.3 μm)                                                                         30 → 0                                                (constantly decrease)                                                    Charge                                                                               SiH.sub.4        100  250    150 0.35 3                                  injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                             800 ppm                                                 inhibition                                                                           H.sub.2          100                                                     layer NO (substrate side 2 μm)                                                                      10                                                           (surface side 1 μm)                                                                           10 → 0                                                (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 42                                         Surface                                                                              SiH.sub.4         20  250    150 0.4  1                                  layer CH.sub.4         500                                                     __________________________________________________________________________

                  TABLE 44                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1401    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1402    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1403    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1404    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1405    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1406    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1407    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1408    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1409    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1410    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1411    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1412    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1413    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1414    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1415    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1416    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1417    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1418    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                x: practically not applicable                                            

                  TABLE 45                                                         ______________________________________                                         CTL No                                                                         CTL       CTL    CTL     CTL  CTL   CTL  CTL  CTL                              Drum No                                                                        CGL No 1      2      3     4    5     6    7    8                              ______________________________________                                         CGL 1  1501   1502   1503  1504 1505  1506 1507 1508                           CGL 2  1509   1510   1511  1512 1513  1514 1515 1516                           CGL 3  1517                                                                    CGL 4  1518                                                                    ______________________________________                                    

                                      TABLE 46                                     __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      100                                                       absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                                             250    150 0.35 1                                       NO  (substrate side 0.7 μm)                                                                5                                                                   (surface sie 0.3 μm)                                                                   5 → 0                                                        (constantly decrease)                                                      N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      100                                                       injection                                                                            B.sub.2 H.sub.6                                                                    (against SiH.sub.4)                                                                       800  ppm                                                                               250    150 0.35 3                                 inhibition                                                                           H.sub.2        100                                                       layer NO             10                                                        CGL/CTL                                                                              Combination as shown in Table 45                                         Surface                                                                              SiH.sub.4                                                                          (substrate side)                                                                          350 → 10                                           layer     (surface side)                                                             CH.sub.4                                                                           (substrate side)                                                                          10 → 600                                                                        250    150 0.4  1                                           (surface side)                                                                 (constantly diversify)                                               __________________________________________________________________________

                  TABLE 47                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1501    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1502    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1503    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1504    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1505    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1506    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1507    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1508    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1509    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1510    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1511    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1512    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1513    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1514    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1515    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1516    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1517    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1518    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 48                                                         ______________________________________                                         CTL No                                                                         CGL   CTL    CTL     CTL  CTL   CTL  CTL  CTL   CTL                            No    1      2       3    4     5    6    7     8                              ______________________________________                                         Drum No                                                                        CGL 1 1601   1602    1603 1604  1605 1606 1607  1608                           CGL 2 1609   1610    1611 1612  1613 1614 1615  1616                           CGL 3 1617                                                                     CGL 4 1618                                                                     ______________________________________                                    

                                      TABLE 49                                     __________________________________________________________________________                                 Substrate                                                                              RF  Internal                                                                            Layer                             Name of                     temperature                                                                            power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                           (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      110                                                       absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                                             250    150 0.35 1                                       NO             10                                                              H.sub.2        50                                                              N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      110                                                       injection                                                                            B.sub.2 H.sub.6                                                                    (against SiH.sub.4)                                                  inhibition                                                                               (substrate side 2 μm)                                                                  800  ppm                                                  layer     (surface side 1 μm)                                                                    800 → 0                                                                      ppm                                                            (constantly decrease)                                                                             250    150 0.35 3                                       H.sub.2        100                                                             NO  (substrate side 2 μm)                                                                  10                                                                  (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 48                                         Surface                                                                              SiH.sub.4                                                                          (substrate side)                                                                          350 → 10                                           layer     (surface side)                                                             CH.sub.4                                                                           (substrate side)                                                                          10 → 600                                                                        250    150 0.4  1                                           (surface side)                                                                 (constantly diversify)                                               __________________________________________________________________________

                  TABLE 50                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1601    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1602    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1603    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1604    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1605    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1606    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1607    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1608    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1609    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1610    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1611    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1612    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1613    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1614    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1615    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1616    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1617    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1618    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 51                                                         ______________________________________                                         CTL No                                                                         CGL   CTL    CTL     CTL  CTL   CTL  CTL  CTL   CTL                            No    1      2       3    4     5    6    7     8                              ______________________________________                                         Drum No                                                                        CGL 1 1701   1702    1703 1704  1705 1706 1707  1708                           CGL 2 1709   1710    1711 1712  1713 1714 1715  1716                           CGL 3 1717                                                                     CGL 4 1718                                                                     ______________________________________                                    

                                      TABLE 52                                     __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4      100                                                       absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                                            250    150 0.35 1                                        NO  (substrate side 0.7 μm)                                                                5                                                                   (surface side 0.3 μm)                                                                  5 → 0                                                        (constantly decrease)                                                      N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      100                                                       injection                                                                            B.sub.2 H.sub.6                                                                    (against SiH.sub.4)                                                                       800 ppm                                                                               250    150 0.35 3                                  inhibition                                                                           H.sub.2        100                                                       layer NO             10                                                        CGL/CTL                                                                              Combination as shown in Table 51                                         Surface                                                                              SiH.sub.4      50     250    150 0.4  2                                  layer NH.sub. 3      500                                                       __________________________________________________________________________

                  TABLE 53                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1701    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1702    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1703    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1704    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1705    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1706    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1707    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1708    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1709    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1710    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1711    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1712    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1713    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1714    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1715    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1716    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1717    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1718    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 54                                                         ______________________________________                                         CTL No                                                                         CGL   CTL    CTL     CTL  CTL   CTL  CTL  CTL   CTL                            No    1      2       3    4     5    6    7     8                              ______________________________________                                         Drum No                                                                        CGL 1 1801   1802    1803 1804  1805 1806 1807  1808                           CGL 2 1809   1810    1811 1812  1813 1814 1815  1816                           CGL 3 1817                                                                     CGL 4 1818                                                                     ______________________________________                                    

                                      TABLE 55                                     __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      100                                                       absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                                             250    150 0.35 1                                       NO             10                                                              N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      100                                                       injection                                                                            B.sub.2 H.sub.6                                                                    (against SiH.sub.4)                                                  inhibition                                                                               (substrate side 2 μm)                                                                  800  ppm                                                  layer     (surface side 1 μm)                                                                    800 → 0                                                                      ppm                                                            (constantly decrease)                                                                             250    150 0.35 3                                       H.sub.2        100                                                             NO  (substrate side 2 μm)                                                                  10                                                                  (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 54                                         Surface                                                                              SiH.sub.4      50      250    150 0.4  2                                 layer NH.sub.3       500                                                       __________________________________________________________________________

                  TABLE 56                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1801    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1802    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1803    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1804    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1805    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1806    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1807    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1808    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1809    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1810    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1811    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1812    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1813    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1814    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1815    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1816    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1817    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1818    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 57                                                         ______________________________________                                         CTL No                                                                         CGL   CTL    CTL     CTL  CTL   CTL  CTL  CTL   CTL                            No    1      2       3    4     5    6    7     8                              ______________________________________                                         Drum No                                                                        CGL 1 1901   1902    1903 1904  1905 1906 1907  1908                           CGL 2 1909   1910    1911 1912  1913 1914 1915  1916                           CGL 3 1917                                                                     CGL 4 1918                                                                     ______________________________________                                    

                                      TABLE 58                                     __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4      100                                                       absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                                            250    150 0.35 1                                        NO             10                                                              N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      100                                                       injection                                                                            B.sub.2 H.sub.6                                                                    (against SiH.sub.4)                                                                       800 ppm                                                                               250    150 0.35 3                                  inhibition                                                                           H.sub.2        100                                                       layer NO             10                                                        CGL/CTL                                                                              Combination as shown in Table 57                                         Surface                                                                              SiH.sub.4      200                                                       layer SiF.sub.4      50                                                              NO             50     250    150 0.4  2                                        CH.sub.4       5                                                               NH.sub. 3      5                                                         __________________________________________________________________________

                  TABLE 59                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1901    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1902    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1903    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1904    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1905    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1906    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1907    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1908    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1909    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1910    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1911    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1912    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1913    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1914    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1915    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1916    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1917    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1918    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 60                                                         ______________________________________                                         CTL No                                                                         CGL   CTL    CTL     CTL  CTL   CTL  CTL  CTL   CTL                            No    1      2       3    4     5    6    7     8                              ______________________________________                                         Drum No                                                                        CGL 1 2001   2002    2003 2004  2005 2006 2007  2008                           CGL 2 2009   2010    2011 2012  2013 2014 2015  2016                           CGL 3 2017                                                                     CGL 4 2018                                                                     ______________________________________                                    

                                      TABLE 61                                     __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub.4      100  250    150 0.35 1                                    absorption                                                                           GeH.sub.4       50                                                       layer CH.sub.4 (substrate side 0.7 μm)                                                            10                                                             (surface side 0.3 μm)                                                                       10 → 0                                                  (constantly decrease)                                                          NO              10                                                             N.sub.2 (substrate side 0.7 μm)                                                             30                                                             (surface side 0.3 μm)                                                                       30 → 0                                                  (constantly descrease)                                                   Charge                                                                               SiH.sub.4      100  250    150 0.35 3                                    injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                           800 ppm                                                   inhibition                                                                           H.sub.2        100                                                       layer NO (substrate side 2 μm)                                                                    10                                                             (surface side 1 μm)                                                                         10 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 60                                         Surface                                                                              SiH.sub.4      200  250    150 0.4  2                                    layer SiF.sub.4       50                                                             NO              50                                                             CH.sub.4        5                                                              NH.sub.3        5                                                        __________________________________________________________________________

                  TABLE 62                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2001    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2002    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2003    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2004    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2005    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2006    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2007    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2008    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2009    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2010    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2011    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2012    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2013    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2014    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2015    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2016    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2017    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2018    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                 ○ : good                                                               X: practically not applicable                                            

                  TABLE 63                                                         ______________________________________                                         CTL No                                                                                CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         Drum No.                                                                       CGL 1  2101   2102    2103 2104 2105 2106  2107 2108                           CGL 2  2109   2110    2111 2112 2113 2114  2115 2116                           CGL 3  2117                                                                    CGL 4  2118                                                                    ______________________________________                                    

                                      TABLE 64                                     __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub.4      100  250    150 0.35 1                                    absorption                                                                           GeH.sub.4       50                                                       layer CH.sub.4 (substrate side 0.7 μm)                                                            10                                                             (surface side 0.3 μm)                                                                       10 → 0                                                  (constantly decrease)                                                          NO (substrate side 0.7 μm)                                                                  5                                                              (surface side 0.3 μm)                                                                       5 → 0                                                   (constantly decrease)                                                          N.sub.2 (substrate side 0.7 μm)                                                             30                                                             (surface side 0.3 μm)                                                                       30 → 0                                                  (constantly decrease)                                                    Charge                                                                               SiH.sub.4      100  250    150 0.35 3                                    injection                                                                            H.sub.2        100                                                       inhibition                                                                           NO (substrate side 2 μm)                                                                    10                                                       layer (surface side 1 μm)                                                                         10 → 0                                                  (constantly decrease)                                                          CH.sub.4 (substrate side 2 μm)                                                             100                                                             (surface side 1 μm)                                                                        100 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 63                                         Surface                                                                              SiH.sub.4       50  250    150 0.4  5                                    layer CH.sub.4       600                                                       __________________________________________________________________________

                  TABLE 65                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2101    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2102    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2103    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2104    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2105    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2106    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2107    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2108    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2109    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2110    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2111    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2112    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2113    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2114    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2115    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2116    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2117    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       2118    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                 ○ : good                                                               X: practically not applicable                                            

                  TABLE 66                                                         ______________________________________                                         CTL No                                                                                CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         Drum No.                                                                       CGL 1  2201   2202    2203 2204 2205 2206  2207 2208                           CGL 2  2209   2210    2211 2212 2213 2214  2215 2216                           CGL 3  2217                                                                    CGL 4  2218                                                                    ______________________________________                                    

                                      TABLE 67                                     __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4      100    250     150                                                                               0.35 1                                  absorption                                                                           SnH.sub.4       50                                                       layer PH.sub.3 (against Si.sub.4)                                                                   800 ppm                                                         NO              5                                                              N.sub.2         30                                                             H.sub.2        100                                                             GeH.sub.4       10                                                       Charge                                                                               SiH.sub.4      150    250    150 0.35 3                                  injection                                                                            SiF.sub.4       50                                                       inhibition                                                                           GeH.sub.4       10                                                       layer PH.sub.3 (against SiH.sub.4)                                                   (substrate side 2 μm)                                                                      800 ppm                                                         (surface side 1 μm)                                                                        800 → 0 ppm                                              (constantly descrease)                                                         NO (substrate side 2 μm)                                                                    5                                                              (surface side 1 μm)                                                                         5 → 0                                                   (constantly decrease)                                                          CH.sub.4 (substrate side 2 μm)                                                              20                                                             (surface side 1 μm)                                                                         20 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 66                                         Surface                                                                              SiH.sub.4       10    250    200 0.4  2                                  layer N.sub.2        500                                                             CH.sub.4        20                                                       __________________________________________________________________________

                  TABLE 68                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durablity                              ______________________________________                                         2201    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2202    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2203    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2204    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2205    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2206    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2207    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2208    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2209    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2210    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2211    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2212    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2213    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2214    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2215    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2216    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2217    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2218    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                 ○ : good                                                               X: practically not applicable                                            

                  TABLE 69                                                         ______________________________________                                         CTL No                                                                                CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         Drum No.                                                                       CGL 1  2301   2302    2303 2304 2305 2306  2307 2308                           CGL 2  2309   2310    2311 2312 2313 2314  2315 2316                           CGL 3  2317                                                                    CGL 4  2318                                                                    ______________________________________                                    

                                      TABLE 70                                     __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   Temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub.4      100  250    160 0.35 1                                    absorption                                                                           SnH.sub.4       50                                                       layer PH.sub.3 (against SiH.sub.4)                                                                  800 ppm                                                         NO              10                                                             N.sub.2         30                                                             H.sub.2        100                                                             GeH.sub.4       10                                                       Charge                                                                               SiH.sub.4      150  250    150 0.35 3                                    injection                                                                            SiF.sub.4       50                                                       inhibition                                                                           GeH.sub.4       10                                                       layer PH.sub.3 (against SiH.sub.4)                                                   (substrate side 2 μm)                                                                      800 ppm                                                         (surface side 1 μm)                                                                        800 → 0                                                  (constantly decreased)                                                                        ppm                                                             NO (substrate side 2 μm)                                                                    10                                                             (surface side 1 μm)                                                                         10 → 0                                                  (constantly decrease)                                                          CH.sub.4 (substrate side 2 μm)                                                              20                                                             (surface side 1 μm)                                                                         20 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 69                                         Surface                                                                              SiH.sub.4       20  250    150 0.4  1                                    layer CH.sub.4       500                                                       __________________________________________________________________________

                  TABLE 71                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2301    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2302    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2303    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2304    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2305    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2306    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2307    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2308    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2309    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2310    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2311    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2312    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2313    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2314    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2315    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2316    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2317    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2318    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                 ○ : good                                                               X: practically not applicable                                            

                  TABLE 72                                                         ______________________________________                                         CTL No                                                                                CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         Drum No                                                                        CGL 1  2401   2402    2403 2404 2405 2406  2407 2408                           CGL 2  2409   2410    2411 2412 2413 2414  2415 2416                           CGL 3  2417                                                                    CGL 4  2418                                                                    ______________________________________                                    

                                      TABLE 73                                     __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (° C.)                                                                         (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub. 4     100  250    150 0.35 1                                    absorption                                                                           SnH.sub.4       50                                                       layer PH.sub.3 (against SiH.sub.4)                                                                  800 ppm                                                         NO             10                                                              N.sub.2         30                                                             H.sub.2        100                                                       Charge                                                                               SiH.sub.4      150  250    150 0.35 3                                    injection                                                                            SiF.sub.4       50                                                       inhibition                                                                           GeH.sub.4       10                                                       layer PH.sub.3 (against SiH.sub.4)                                                   (substrate side 2 μm)                                                                      800 ppm                                                         (surface side 1 μm)                                                                        800 → 0                                                  (constantly decrease)                                                                         ppm                                                             NO (substrate side 2 μm)                                                                    10                                                             (surface side 1 μm)                                                                         10 → 0                                                  (constantly drecease)                                                          CH.sub.4 (substrate side 2 μm)                                                              20                                                             (surface side 1 μm)                                                                         20 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 72                                         Surface                                                                              SiH.sub.4 (substrate side)                                                                    350 → 10                                                                     250    150 0.4  1                                    layer (surface side)                                                                 CH.sub.4 (substrate side)                                                                     10 → 600                                                 (surface side)                                                                 (constantly diversify)                                                   __________________________________________________________________________

                  TABLE 74                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2401    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2402    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2403    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2404    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2405    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2406    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2407    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2408    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2409    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2410    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2411    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2412    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2413    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2414    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2415    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2416    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2417    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       2418    ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                 ○ : good                                                               X: practically not applicable                                            

                  TABLE 75                                                         ______________________________________                                         CTL No                                                                                CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         Drum No                                                                        CGL 1  2501   2502    2503 2504 2505 2506  2507 2508                           CGL 2  2509   2510    2511 2512 2513 2514  2515 2516                           CGL 3  2517                                                                    CGL 4  2518                                                                    ______________________________________                                    

                                      TABLE 76                                     __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      100     250    150 0.35 1                                 absorption                                                                           SnH.sub.4      50                                                        layer PH.sub.3                                                                           (against SiH.sub.4)                                                                       800                                                                               ppm                                                          NO  10                                                                         H.sub.2        100                                                       Charge                                                                               SiH.sub.4      150                                                                               250  150    0.35                                                                               3                                      injection                                                                            SiF.sub.4      50                                                        inhibition                                                                           GeH.sub.4      10                                                        layer PH.sub.3                                                                           (against SiH.sub.4)                                                            (substrate side 2 μm)                                                                  800                                                                               ppm                                                              (surface side 1 μm)                                                                    800                                                                               →0 ppm                                                    (constantly decrease)                                                      NO  (substrate side 2 μm)                                                                  10                                                                  (surface side 1 μm)                                                                    10 →0                                                        (constantly decrease)                                                      CH.sub.4                                                                           (substrate side 2 μm)                                                                  20                                                                  (surface side 1 μm)                                                                    20 → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 75                                         Surface                                                                              SiH.sub.4      50      250    100 0.4  2                                 layer NH.sub.3       500                                                       __________________________________________________________________________

                  TABLE 77                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2501    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2502    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2503    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2504    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2505    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2506    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2507    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2508    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2509    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2510    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2511    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2512    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2513    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2514    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2515    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2516    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2517    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2518    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 78                                                         ______________________________________                                         CTL No                                                                                 CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         Drum No                                                                        CGL 1   2601   2602   2603 2604 2605 2606 2607 2608                            CGL 2   2609   2610   2611 2612 2613 2614 2615 2616                            CGL 3   2617                                                                   CGL 4   2618                                                                   ______________________________________                                    

                                      TABLE 79                                     __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      100     250    160 0.35 1                                 absorption                                                                           SnH.sub.4      50                                                        layer PH.sub.3                                                                           (against SiH.sub.4)                                                                       800                                                                               ppm                                                          NO             10                                                              N.sub.2        30                                                              H.sub.2        100                                                             GeH.sub.4      10                                                        Charge                                                                               SiH.sub.4      150     250    150 0.35 3                                 injection                                                                            SiF.sub.4      50                                                        inhibition                                                                           GeH.sub.4      10                                                        layer PH.sub.3                                                                           (against SiH.sub.4)                                                            (substrate side 2 μm)                                                                  800                                                                               ppm                                                              (surface side 1 μm)                                                                    800                                                                               → 0 ppm                                                   (constantly decrease)                                                      NO  (substrate side 2 μm)                                                                  10                                                                  (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                      CH.sub.4                                                                           (substrate side 2 μm)                                                                  20                                                                  (surface side 1 μm)                                                                    20 → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 78                                         Surface                                                                              SiH.sub.4      200     250    150 0.4  2                                 layer SiF.sub.4      50                                                              NO             50                                                              CH.sub.4       5                                                               NH.sub.4       5                                                         __________________________________________________________________________

                  TABLE 80                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2601    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2602    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2603    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2604    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2605    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2606    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2607    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2608    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2609    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2610    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2611    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2612    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2613    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2614    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2615    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2616    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2617    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2618    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 81                                                         ______________________________________                                         CTL No                                                                                 CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               Drum No                                                                        ______________________________________                                         CGL 1   2701   2702   2703 2704 2705 2706 2707 2708                            CGL 2   2709   2710   2711 2712 2713 2714 2715 2716                            CGL 3   2717                                                                   CGL 4   2718                                                                   ______________________________________                                    

                                      TABLE 82                                     __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      100     250    150 0.35 1                                 absorption                                                                           GeH.sub.4                                                                          10                                                                   layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                25                                                                  (surface side 0.3 μm)                                                                  25 → 20                                                      (constantly decrease)                                                      NO             10                                                        Charge                                                                               SiH.sub.4      150     250    150 0.35 3                                 injection                                                                            SiF.sub.4      50                                                        inhibition                                                                           GeH.sub.4      10                                                        layer PH.sub.3                                                                           (against SiH.sub.4)                                                            (substrate side 2 μm)                                                                  800                                                                               ppm                                                              (surface side 1 μm)                                                                    800                                                                               → 0 ppm                                                   (constantly decrease)                                                      NO  (substrate side 2 μm)                                                                  10                                                                  (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                      CH.sub.4                                                                           (substrate side 2 μm)                                                                  20                                                                  (surface side 1 μm)                                                                    20 → 0                                                       (constantly decrease)                                                CG/CTL                                                                               Combination as shown in Table 81                                          Surface                                                                             SiH.sub.4      10      250    200 0.4  2                                 layer N.sub.2        500                                                                               m                                                            CH.sub.4 20                                                              __________________________________________________________________________

                  TABLE 83                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2701    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2702    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2703    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2704    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2705    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2706    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2707    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2708    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2709    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2710    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2711    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2712    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2713    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2714    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2715    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2716    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2717    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2718    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚:  ○                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 84                                                         ______________________________________                                         CTL No                                                                                 CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               Drum No                                                                        ______________________________________                                         CGL 1   2801   2802   2803 2804 2805 2806 2807 2808                            CGL 2   2809   2810   2811 2812 2813 2814 2815 2816                            CGL 3   2817                                                                   CGL 4   2818                                                                   ______________________________________                                    

                                      TABLE 85                                     __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      100     250    150 0.35 1                                 absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                      NO             10                                                              N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      150                                                                               250  150    0.35                                                                               3                                      injection                                                                            SiF.sub.4      50                                                        inhibition                                                                           GeH.sub.4      10                                                        layer PH.sub.3                                                                           (against SiH.sub.4)                                                            (substrate side 2 μm)                                                                  800                                                                               ppm                                                              (surface side 1 μm)                                                                    800                                                                               → 0 ppm                                                   (constantly decrease)                                                      NO  (substrate side 2 μm)                                                                  10                                                                  (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                      CH.sub.4                                                                           (substrate side 2 μm)                                                                  20                                                                  (surface side 1 μ m)                                                                   20 → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 84                                         Surface                                                                              SiH.sub.4      20      250    150 0.4  1                                 layer CH.sub.4       500                                                       __________________________________________________________________________

                  TABLE 86                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2801    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2802    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2803    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2804    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2805    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2806    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2807    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2808    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2809    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2810    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2811    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2812    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2813    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2814    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2815    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2816    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2817    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2818    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 87                                                         ______________________________________                                         CTL No                                                                                 CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               Drum No                                                                        ______________________________________                                         CGL 1   2901   2902   2903 2904 2905 2906 2907 2908                            CGL 2   2909   2910   2911 2912 2913 2914 2915 2916                            CGL 3   2917                                                                   CGL 4   2918                                                                   ______________________________________                                    

                                      TABLE 88                                     __________________________________________________________________________                                   Substrate                                                                            RF  Internal                                                                            Layer                             Name of                       temperature                                                                          power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                        (°C.)                                                                         (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      100     250    150 0.35 1                                 absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                      NO  (substrate side 0.7 μm)                                                                5                                                                   (surface side 0.3 μm)                                                                  5  → 0                                                       (constantly decrease)                                                      N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      150     250    150 0.35 3                                 injection                                                                            SiF.sub.4      50                                                        inhibition                                                                           GeH.sub.4      10                                                        layer PH.sub.3                                                                           (against SiH.sub.4)                                                            (substrate side 2 μm)                                                                  800                                                                               ppm                                                              (surface side 1 μm)                                                                    800                                                                               →  0 ppm                                                  (constantly decrease)                                                      NO  (substrate side 2 μm)                                                                  10                                                                  (surface side 1 μm)                                                                    10 →  0                                                      (constantly decrease)                                                      CH.sub.4                                                                           (substrate side 2 μm)                                                                  20                                                                  (surface side 1 μm)                                                                    20 → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 87                                         Surface                                                                              SiH.sub.4                                                                          (substrate side)                                                                          350                                                                               → 10                                                                         250    150 0.4  1                                 layer     (surface side)                                                             CH.sub.4                                                                           (substrate side)                                                                          10 → 600                                                     (surface side)                                                                 (constantly diversify)                                               __________________________________________________________________________

                  TABLE 89                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2901    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2902    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2903    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2904    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2905    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2906    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2907    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2908    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2909    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2910    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2911    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2912    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2913    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2914    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2915    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2916    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2917    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       2918    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 90                                                         ______________________________________                                         CTL No                                                                         Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         CGL 1  3001   3002    3003 3004 3005 3006  3007 3008                           CGL 2  3009   3010    3011 3012 3013 3014  3015 3016                           CGL 3  3017                                                                    CGL 4  3018                                                                    ______________________________________                                    

                                      TABLE 91                                     __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      100     250    150 0.35 1                                 absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                      NO  (substrate side 0.7 μm)                                                                5                                                                   (surface side 0.3 μm)                                                                  5  → 0                                                       (constantly decrease)                                                      N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      150     250    150 0.35 3                                 injection                                                                            SiF.sub.4      50                                                        inhibition                                                                           GeH.sub.4      10                                                        layer PH.sub.3                                                                           (against SiH.sub.4)                                                            (substrate side 2 μm)                                                                  800                                                                               ppm                                                              (surface side 1 μm)                                                                    800                                                                               → 0 ppm                                                   (constantly decrease)                                                      NO  (substrate side 2 μm)                                                                  10                                                                  (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                      CH.sub.4                                                                           (substrate side 2 μm)                                                                  20                                                                  (surface side 1 μm)                                                                    20 → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 90                                         Surface                                                                              SiH.sub.4      50      250    100 0.4  2                                 layer NH.sub.3       500                                                       __________________________________________________________________________

                  TABLE 92                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         3001    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3002    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3003    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3004    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3005    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3006    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3007    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3008    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3009    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3010    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3011    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3012    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3013    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3014    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3015    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3016    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3017    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       3018    ⊚                                                                         ⊚                                                                         ⊚                                                                      ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 93                                                         ______________________________________                                         CTL No                                                                         Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         CGL 1  3101   3102    3103 3104 3105 3106  3107 3108                           CGL 2  3109   3110    3111 3112 3113 3114  3115 3116                           CGL 3  3117                                                                    CGL 4  3118                                                                    ______________________________________                                    

                                      TABLE 94                                     __________________________________________________________________________                                  Substrate                                                                             RF  Internal                                                                            Layer                             Name of                      temperature                                                                           power                                                                              pressure                                                                            thickness                         layer Gas used & its flow rate (SCCM)                                                                       (°C.)                                                                          (W) (Torr)                                                                              (μm)                           __________________________________________________________________________     IR    SiH.sub.4      100     250    150 0.35 1                                 absorption                                                                           GeH.sub.4      10                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                      NO             10                                                              N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      150     250    150 0.35 3                                 injection                                                                            SiF.sub.4      50                                                        inhibition                                                                           GeH.sub.4      10                                                        layer PH.sub.3                                                                           (against SiH.sub.4)                                                            (substrate side 2 μm)                                                                  800                                                                               ppm                                                              (surface side 1 μm)                                                                    800                                                                               → 0 ppm                                                   (constantly decrease)                                                      NO  (substrate side 2 μm)                                                                  10                                                                  (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                      CH.sub.4                                                                           (substrate side 2 μm)                                                                  20                                                                  (surface side 1 μm)                                                                    20 → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 93                                         Surface                                                                              SiH.sub.4      200     250    100 0.4  2                                 layer SiF.sub.4      50                                                              NO             50                                                              CH.sub.4       5                                                               NH.sub.3       5                                                         __________________________________________________________________________

                  TABLE 95                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         3101    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3102    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3103    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3104    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3105    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3106    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3107    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3108    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3109    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3110    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3111    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3112    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3113    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3114    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3115    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3116    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3117    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3118    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excelent                                                      ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 96                                                         ______________________________________                                         CTL No                                                                         Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         CGL 1  3201   3202    3203 3204 3205 3206  3207 3208                           CGL 2  3209   3210    3211 3212 3213 3214  3215 3216                           CGL 3  3217                                                                    CGL 4  3218                                                                    ______________________________________                                    

                                      TABLE 97                                     __________________________________________________________________________                                Substrate                                                                             RF  Internal                                                                            Layer                               Name of                    temperature                                                                           power                                                                              pressure                                                                            thickness                           layer Gas used & its flow rate (SCCM)                                                                     (°C.)                                                                          (W) (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4      100   250    150 0.35 1                                   absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4       5                                                               NO  (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                      N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      100   250    300 0.35 3                                   injection                                                                            H.sub.2        100                                                       inhibition                                                                           NO  (substrate side 2 μm)                                                                  10                                                        layer     (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                      CH.sub.4       120                                                       CGL/CTL                                                                              Combination as shown in Table 96                                         Surface                                                                              SiH.sub.4      10    250    200 0.4  2                                   layer N.sub.2        500                                                             CH.sub.4       20                                                        __________________________________________________________________________

                  TABLE 98                                                         ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         3201    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3202    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3203    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3204    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3205    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3206    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3207    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3208    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3209    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3210    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3211    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3212    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3213    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3214    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3215    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3216    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3217    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       3218    ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 99                                                         ______________________________________                                         CTL No                                                                         Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         CGL 1  3301   3302    3303 3304 3305 3306  3307 3308                           CGL 2  3309   3310    3311 3312 3313 3314  3315 3316                           CGL 3  3317                                                                    CGL 4  3318                                                                    ______________________________________                                    

                                      TABLE 100                                    __________________________________________________________________________                                Substrate                                                                             RF  Internal                                                                            Layer                               Name of                    temperature                                                                           power                                                                              pressure                                                                            thickness                           layer Gas used & its flow rate (SCCM)                                                                     (°C.)                                                                          (W) (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4      100   250    150 0.35 1                                   absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                      NO             10                                                              N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      100   250    300 0.35 3                                   injection                                                                            H.sub.2        100                                                       inhibition                                                                           NO  (substrate side 2 μm)                                                                  10                                                        layer     (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                      CH.sub.4                                                                           (substrate side 2 μm)                                                                  100                                                                 (surface side 1 μm)                                                                    100                                                                               → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 99                                         Surface                                                                              SiH.sub.4      20    250     150                                                                               0.4  1                                   layer CH.sub.4       500                                                       __________________________________________________________________________

                  TABLE 101                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         3301    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3302    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3303    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3304    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3305    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3306    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3307    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3308    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3309    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3310    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3311    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3312    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3313    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3314    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3315    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3316    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3317    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       3318    ⊚                                                                         ⊚                                                                         ⊚                                                                      ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 102                                                        ______________________________________                                         CTL No                                                                         Drum No                                                                               CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         CGL 1  3401   3402    3403 3404 3405 3406  3407 3408                           CGL 2  3409   3410    3411 3412 3413 3414  3415 3416                           CGL 3  3417                                                                    CGL 4  3418                                                                    ______________________________________                                    

                                      TABLE 103                                    __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4      100    250    150 0.35 1                                  absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                      NO  (substrate side 0.7 μm)                                                                5                                                                   (surface side 0.3 μm)                                                                  5  → 0                                                       (constantly decrease)                                                      N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                Charge                                                                               SiH.sub.4      100    250    300 0.35 3                                  injection                                                                            H.sub.2        100                                                       inhibition                                                                           NO  (substrate side 2 μm)                                                                  10                                                        layer     (surface side 1 μm)                                                                    10 → 0                                                       (constantly decrease)                                                      CH.sub.4                                                                           (substrate side 2 μm)                                                                  100                                                                 (surface side 1 μm)                                                                    100                                                                               → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 102                                        Surface                                                                              SiH.sub.4                                                                          (substrate side)                                                                          350                                                                               → 10                                                                        250    150 0.4  1                                  layer     (surface side)                                                             CH.sub.4                                                                           (substrate side)                                                                          10 → 600                                                     (surface side)                                                                 (constantly diversify)                                               __________________________________________________________________________

                  TABLE 104                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         3401    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3402    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3403    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3404    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3405    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3406    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3407    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3408    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3409    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3410    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3411    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3412    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3413    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3414    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3415    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3416    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3417    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       3418    ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 105                                                        ______________________________________                                         CTL No                                                                         Drum No CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         CGL 1   3501   3502   3503 3504 3505 3506 3507 3508                            CGL 2   3509   3510   3511 3512 3513 3514 3515 3516                            CGL 3   3517                                                                   CGL 4   3518                                                                   ______________________________________                                    

                                      TABLE 106                                    __________________________________________________________________________                             Substrate                                                                             RF  Internal                                                                            Layer                                  Name of                 temperature                                                                           power                                                                              pressure                                                                            thickness                              layer Gas used & its flow rate (SCCM)                                                                  (°C.)                                                                          (W) (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4    100  250    150 0.35 1                                      absorption                                                                           GeH.sub.4     50                                                         layer CH.sub.4      20                                                               NO (substrate side 0.7 μm)                                                                5                                                                (surface side 0.3 μm)                                                                     5 → 0                                                     (constantly decrease)                                                          N.sub.2 (substrate side 0.7 μm)                                                           5                                                                (surface side 0.3 μm)                                                                     5 → 0                                                     (constantly decrease)                                                    Charge                                                                               SiH.sub.4    100  250    300 0.35 3                                      injection                                                                            H.sub.2      100                                                         inhibition                                                                           NO (substrate side 2 μm)                                                                  10                                                         layer (surface side 1 μm)                                                                       10 → 0                                                    (constantly decrease)                                                          CH.sub.4 (substrate side 2 μm)                                                           100                                                               (surface side 1 μm)                                                                      100 → 0                                                    (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 105                                        Surface                                                                              SiH.sub.4     50  250    100 0.4  1                                      layer NH.sub.3     500                                                         __________________________________________________________________________

                  TABLE 107                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         3501    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3502    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3503    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3504    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3505    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3506    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3507    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3508    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3509    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3510    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3511    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3512    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3513    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3514    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3515    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3516    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3517    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        3518    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ⊚                        ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 108                                                        ______________________________________                                         CTL No                                                                         Drum No CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         CGL 1   3601   3602   3603 3604 3605 3606 3607 3608                            CGL 2   3609   3610   3611 3612 3613 3614 3615 3616                            CGL 3   3617                                                                   CGL 4   3618                                                                   ______________________________________                                    

                                      TABLE 109                                    __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub.4      100  250    150 0.35 1                                    absorption                                                                           GeH.sub.4       50                                                       layer CH.sub.4 (substrate side 0.7 μm)                                                            10                                                             (surface side 0.3 μm)                                                                       10 → 0                                                  (constantly decrease)                                                          NO              10                                                             N.sub.2 (substrate side 0.7 μm)                                                             30                                                             (surface side 0.3 μm)                                                                       30 → 0                                                  (constantly decrease)                                                    Charge                                                                               SiH.sub.4      100  250    300 0.35 3                                    injection                                                                            H.sub.2        100                                                       inhibition                                                                           NO (substrate side 2 μm)                                                                    10                                                       layer (surface side 1 μm)                                                                         10 → 0                                                  (constantly decrease)                                                          CH.sub.4 (substrate side 2 μm)                                                             100                                                             (surface side 1 μm)                                                                        100 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 108                                        Surface                                                                              SiH.sub.4      200  250    150 0.4  2                                    layer SiF.sub.4       50                                                             NO              50                                                             CH.sub.4        5                                                              NH.sub.3        5                                                        __________________________________________________________________________

                  TABLE 110                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         3601    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3602    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3603    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3604    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3605    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3606    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3607    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3608    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3609    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3610    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3611    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3612    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3613    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3614    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3615    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3616    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3617    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3618    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 111                                                        ______________________________________                                         CTL No                                                                         Drum No CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         CGL 1   3701   3702   3703 3704 3705 3706 3707 3708                            CGL 2   3709   3710   3711 3712 3713 3714 3715 3716                            CGL 3   3717                                                                   CGL 4   3718                                                                   ______________________________________                                    

                                      TABLE 112                                    __________________________________________________________________________                             Substrate                                                                             Microwave                                                                            Internal                                                                            Layer                                Name of                 temperature                                                                           power pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                  (°C.)                                                                          (W)   (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub.4     100 250    110   1.5  1                                    absorption                                                                           GeH.sub.4     50                                                         layer B.sub.2 H.sub.6 (against SiH.sub.4                                                          1000 ppm                                                          NO             5                                                         Charge                                                                               SiH.sub.4     100 250    110   1.5  3                                    injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                         1600 ppm                                                    inhibition                                                                           H.sub.2       80                                                         layer NO (substrate side 2 μm)                                                                   5                                                               (surface side 1 μm)                                                                        5 → 0                                                    (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 111                                        Surface                                                                              SiH.sub.4     30  250    170   3.0  1                                    layer CH.sub.4      250                                                        __________________________________________________________________________

                  TABLE 113                                                        ______________________________________                                         Film Forming Conditions of CGL                                                                   Substrate                                                                               micro-                                                     Gas used & temper-  wave  Internal                                                                              Layer                                  Name of                                                                               its flow rate                                                                             ature    power pressure                                                                              thickness                              layer  (SCCM)     (°C.)                                                                            (W)   (mTorr)                                                                               (μm)                                ______________________________________                                         CGL 1  SiH.sub.4                                                                              150    250    300   2      1                                           H.sub.2 150                                                                    SiH.sub.4                                                                              120                                                             CGL 2  SiF.sub.4                                                                               40    250    300   2      2                                           H.sub.2 150                                                             CGL 3  SiH.sub.4                                                                              150    250    300   2      5                                           He      160                                                             CGL 4  SiH.sub.4                                                                              150    250    300   2      2                                           Ar      150                                                             ______________________________________                                    

                  TABLE 114                                                        ______________________________________                                         Film Forming Conditions of CTL                                                                    Substrate                                                                               micro-       Layer                                 Name  Gas used &   temper-  wave  Internal                                                                              thick-                                of    its flow rate                                                                               ature    power pressure                                                                              ness                                  layer (SCCM)       (°C.)                                                                            (W)   (mTorr)                                                                               (μm)                               ______________________________________                                         CTL 1 SiH.sub.4                                                                              70       250    300   3      24                                        SiF.sub.4                                                                              40                                                                     CH.sub.4                                                                              300                                                                     B.sub.2 H.sub.6                                                                       [FIG.65 (1)]                                                      CTL 2 SiH.sub.4                                                                             180       250    300   3      24                                        C.sub.2 H.sub.2                                                                       300                                                                     PH.sub.3                                                                              [FIG.65 (2)]                                                      CTL 3 SiH.sub.4                                                                             200       250    300   3      20                                        C.sub.2 H.sub.4                                                                       250                                                                     B.sub.2 H.sub.6                                                                       [FIG.65 (3)]                                                      CTL 4 SiH.sub.4                                                                              60       250    350   3      20                                        N.sub.2                                                                               450                                                                     PH.sub.3                                                                              [FIG.65 (4)]                                                      CTL 5 SiH.sub.4                                                                              80       250    350   3      24                                        C.sub.2 H.sub.4                                                                       350                                                                     CH.sub.4                                                                              [FIG.65 (5)]                                                            B.sub.2 H.sub.6                                                                       [FIG.65 (5)]                                                      CTL 6 SiH.sub.4                                                                             110       250    300   3      12                                        NH.sub.3                                                                              220                                                                     CH.sub.4                                                                              200                                                                     PH.sub.3                                                                              [FIG.65 (6)]                                                      CTL 7 SiH.sub.4                                                                             240       250    250   3      28                                        C.sub.2 H.sub.4                                                                                 16                                                            Ar     150                                                                     PH.sub.3                                                                              [FIG.65 (7)]                                                      CTL 8 SiH.sub.4                                                                             350       250    300   3      28                                        NO     40                                                                      B.sub.2 H.sub.6                                                                       [FIG.65 (8)]                                                            NH.sub.3                                                                              [FIG.65 (8)]                                                            CH.sub.4                                                                              [FIG.65 (8)]                                                      ______________________________________                                    

                  TABLE 115                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         3701    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3702    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3703    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3704    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3705    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3706    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3707    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3708    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3709    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3710    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3711    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3712    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3713    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3714    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3715    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3716    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3717    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        3718    ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 116                                                        ______________________________________                                         CTL No                                                                         Drum No CTL    CTL    CTL  CTL  CTL  CTL  CTL  CTL                             CGL No  1      2      3    4    5    6    7    8                               ______________________________________                                         CGL 1   3801   3802   3803 3804 3805 3806 3807 3808                            CGL 2   3809   3810   3811 3812 3813 3814 3815 3816                            CGL 3   3817                                                                   CGL 4   3818                                                                   ______________________________________                                    

                                      TABLE 117                                    __________________________________________________________________________                               Substrate                                                                             Internal                                                                            Layer                                    Name of                   temperature                                                                           pressure                                                                            thickness                                layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (Torr)                                                                              (μm)                                  __________________________________________________________________________     IR    SiF.sub.4       60  250    0.35 1                                        absorption                                                                           SiH.sub.4       40                                                       layer GeH.sub.4 (substrate side 0.7 μm)                                                           20                                                             (surface side 0.3 μm)                                                                      20 → 0                                                   (constantly decrease)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                           1000 ppm                                                        NO (substrate side 0.7 μm)                                                                   4                                                             (surface side 0.3 μm)                                                                        4 → 0                                                  (constantly decrease)                                                          H.sub.2         80                                                       Charge                                                                               SiF.sub.4       60  250    0.35 3                                        injection                                                                            SiH.sub.4       40                                                       inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                            800 ppm                                                  layer H.sub.2         40                                                             NO (substrate side 2 μm)                                                                     4                                                             (surface side 1 μm)                                                                        4 → 0                                                    (constantly decrease)                                                          H.sub.2         80                                                       CGL/CTL                                                                              Combination as shown in Table 116                                        Surface                                                                              SiF.sub.4       200 250    0.40 1                                        layer SiH.sub.4        8                                                             CH.sub.4        200                                                            H.sub.2         200                                                      __________________________________________________________________________

                  TABLE 118                                                        ______________________________________                                         Film Forming Conditions of CTL                                                        Gas used &   Substrate  Internal                                                                              Layer                                    Name of                                                                               its flow rate                                                                               temperature                                                                               pressure                                                                              thickness                                layer  (SCCM)       (°C.)                                                                              (Torr) (μm)                                  ______________________________________                                         CTL 1  SiH.sub.4                                                                              30       250      0.40   24                                            SiF.sub.4                                                                             100                                                                     CH.sub.4                                                                              140                                                                     H.sub.2                                                                               200                                                                     B.sub.2 H.sub.6                                                                       [FIG.66 (1)]                                                     CTL 2  SiH.sub.4                                                                             100       250      0.40   24                                            SiF.sub.4                                                                             150                                                                     C.sub.2 H.sub.2                                                                       160                                                                     H.sub.2                                                                               200                                                                     PH.sub.3                                                                              [FIG.66 (2)]                                                     CTL 3  SiH.sub.4                                                                             120       250      0.35   20                                            SiF.sub.4                                                                             150                                                                     C.sub.2 H.sub.2                                                                       140                                                                     H.sub.2                                                                               200                                                                     B.sub.2 H.sub.6                                                                       [FIG.66 (3)]                                                     CTL 4  SiH.sub.4                                                                              30       250      0.45   20                                            SiF.sub.4                                                                             150                                                                     C.sub.2 H.sub.4                                                                       240                                                                     H.sub.2                                                                               200                                                                     PH.sub.3                                                                              [FIG.66 (4)]                                                     CTL 5  SiH.sub.4                                                                              50       250      0.45   24                                            SiF.sub. 4                                                                            150                                                                     N.sub.2                                                                               200                                                                     H.sub.2                                                                               200                                                                     CH.sub.4                                                                              [FIG.66 (5)]                                                            B.sub.2 H.sub.6                                                                       [FIG.66 (5)]                                                     CTL 6  SiH.sub.4                                                                             60        250      0.40   12                                            SiF.sub.4                                                                             150                                                                     NH.sub.3                                                                              120                                                                     CH.sub.4                                                                              120                                                                     H.sub.2                                                                               200                                                                     PH.sub.3                                                                              [FIG.66 (6)]                                                     CTL 7  SiH.sub.4                                                                             140       250      0.38   28                                            SiF.sub.4                                                                             150                                                                     C.sub.2 H.sub.4                                                                        10                                                                     H.sub.2                                                                               200                                                                     PH.sub.3                                                                              [FIG.66 (7)]                                                     CTL 8  SiH.sub.4                                                                             200       250      0.40   28                                            SiF.sub.4                                                                             150                                                                     NO     25                                                                      H.sub.2                                                                               200                                                                     B.sub.2 H.sub.6                                                                       [FIG.66 (8)]                                                            NH.sub.3                                                                              [FIG.66 (8)]                                                            CH.sub.4                                                                              [FIG.66 (8)]                                                     ______________________________________                                    

                  TABLE 119                                                        ______________________________________                                         Film Forming Conditions of CGL                                                        Gas used &  Substrate  Internal                                                                              Layer                                     Name of                                                                               its flow rate                                                                              temperature                                                                               pressure                                                                              thickness                                 layer  (SCCM)      (°C.)                                                                              (Torr) (μm)                                   ______________________________________                                         CGL 1  SiH.sub.4                                                                              80      250      0.40   1                                              SiF.sub.4                                                                              100                                                                    H.sub.2 80                                                              CGL 2  SiH.sub.4                                                                              60      250      0.40   2                                              SiF.sub.4                                                                              120                                                                    H.sub.2 80                                                              CGL 3  SiH.sub.4                                                                              80      250      0.40   5                                              SiF.sub.4                                                                              100                                                                    H.sub.2 80                                                              CGL 4  SiH.sub.4                                                                              80      250      0.40   2                                              SiF.sub.4                                                                              100                                                                    H.sub.2 80                                                                     Ar      40                                                              ______________________________________                                    

                  TABLE 120                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         3801    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3802    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3803    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3804    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3805    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3806    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3807    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3808    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3809    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3810    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3811    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3812    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3813    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3814    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3815    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3816    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3817    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3818    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 121                                                        ______________________________________                                         CTL No                                                                                CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         Drum No                                                                        CGL 1  3901   3902    3903 3904 3905 3906  3907 3908                           CGL 2  3909   3910    3911 3912 3913 3914  3915 3916                           CGL 3  3917                                                                    ______________________________________                                    

                                      TABLE 122                                    __________________________________________________________________________                                 Substrate                                                                             Internal                                                                            Layer                                  Name of                     temperature                                                                           pressure                                                                            thickness                              layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4      100                                                       absorption                                                                           GeH.sub.4      50                                                        layer B.sub.2 H.sub.6                                                                    (against SiH.sub.4)                                                                       1500                                                                               ppm                                                                               250    0.40 1                                            NO             5                                                               F.sub.2        200                                                       Charge                                                                               SiH.sub.4      100                                                       injection                                                                            B.sub.2 H.sub.6                                                                    (against SiH.sub.4)                                                                       1500                                                                               ppm                                                   inhibition                                                                           H.sub.2        20     250    0.36 3                                      layer NO  (substrate side 2 μm)                                                                  5                                                                   (surface side 1 μm)                                                                    5 → 0                                                        (constantly decrease)                                                      F.sub.2        200                                                       CGL/  Combination as shown in Table 121                                        CTL                                                                            Surface                                                                              SiH.sub.4      30                                                        layer CH.sub.4       250    250   0.40  1                                            F.sub.2        350                                                       __________________________________________________________________________

                  TABLE 123                                                        ______________________________________                                         Film Forming Conditions of CGL                                                         Gas used &  Substrate  Internal                                                                              Layer                                    Name of its flow rate                                                                              temperature                                                                               pressure                                                                              thickness                                layer   (SCCM)      (°C.)                                                                              (Torr) (μm)                                  ______________________________________                                         CGL 1   SiH.sub.4                                                                              200     250      0.40   1                                              H.sub.2  20                                                                    F.sub.2 300                                                            CGL 2   SiH.sub.4                                                                              150     250      0.40   2                                              H.sub.2  20                                                                    He      200                                                                    F.sub.2 400                                                            CGL 3   SiH.sub.4                                                                              200     250      0.40   5                                              He      200                                                                    F.sub.2 200                                                            ______________________________________                                    

                  TABLE 124                                                        ______________________________________                                         Film Forming Conditions of CTL                                                        Gas used &   Substrate  Internal                                                                              Layer                                    Name of                                                                               its flow rate                                                                               temperature                                                                               pressure                                                                              thickness                                layer  (SCCM)       (°C.)                                                                              (Torr) (μm)                                  ______________________________________                                         CTL 1  SiH.sub.4                                                                             100       250      0.40   24                                            CH.sub.4                                                                              450                                                                     B.sub.2 H.sub.6                                                                       [FIG.67(1)]                                                             F.sub.2                                                                               600                                                              CTL 2  SiH.sub.4                                                                             250       250      0.42   24                                            C.sub.2 H.sub.2                                                                       400                                                                     PH.sub.3                                                                              [FIG.67(2)]                                                             F.sub.2                                                                               650                                                              CTL 3  SiH.sub.4                                                                             300       250      0.35   20                                            C.sub.2 H.sub.2                                                                       350                                                                     B.sub.2 H.sub.6                                                                       [FIG.67(3)]                                                             F.sub.2                                                                               700                                                              CTL 4  SiH.sub.4                                                                              80       250      0.45   20                                            C.sub.2 H.sub.4                                                                       500                                                                     PH.sub.3                                                                              [FIG.67(4)]                                                             F.sub.2                                                                               450                                                              CTL 5  SiH.sub.4                                                                             120       250      0.45   24                                            NH.sub.3                                                                              400                                                                     CH.sub.4                                                                              [FIG.67(5)]                                                             B.sub.2 H.sub.6                                                                       [FIG.67(5)]                                                             F.sub.2                                                                               [FIG.67(5)]                                                      CTL 6  SiH.sub.4                                                                             150       250      0.40   12                                            NH.sub.3                                                                              300                                                                     CH.sub.4                                                                              300                                                                     PH.sub.3                                                                              [FIG.67(6)]                                                             F.sub.2                                                                               550                                                              CTL 7  SiH.sub.4                                                                             350       250      0.38   28                                            C.sub.2 H.sub.4                                                                        25                                                                     Ar     200                                                                     PH.sub.3                                                                              [FIG.67(7)]                                                             F.sub.2                                                                               500                                                              CTL 8  SiH.sub.4                                                                             500       250      0.40   28                                            NO      60                                                                     B.sub.2 H.sub.6                                                                       [FIG.67(8)]                                                             NH.sub.3                                                                              [FIG.67(8)]                                                             CH.sub.4                                                                              [FIG.67(8)]                                                             F.sub.2                                                                               550                                                              ______________________________________                                    

                  TABLE 125                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         3901    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3902    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3903    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3904    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3905    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3906    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3907    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3908    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3909    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3910    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3911    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3912    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3913    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3914    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3915    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3916    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3917    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       3918    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                                      TABLE 126                                    __________________________________________________________________________                            Substrate                                                                             RF  Internal                                                                            Layer                                   Name of                temperature                                                                           power                                                                              pressure                                                                            thickness                               layer Gas used & its flow rate (SCCM)                                                                 (°C.)                                                                          (W) (Torr)                                                                              (μm)                                 __________________________________________________________________________     IR    SiH.sub.4 100                                                            absorption                                                                           GeH.sub.4 50     250    150 0.35 1                                       layer B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              NO        10                                                             Charge                                                                               SiH.sub.4 100                                                            injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                                               250    150 0.35 3                                       inhibition                                                                           H.sub.2   100                                                            layer NO        10                                                             CGL   SiH.sub.4 200                                                                  H.sub.2   200                                                            CTL   SiH.sub.4 250                                                                  C.sub.2 H.sub.2                                                                          400    250    300 0.42 24                                            PH.sub.3  1 → 0                                                                       ppm                                                        Surface                                                                              SiH.sub.4 20     250    150 0.4  1                                       layer CH.sub.4  500                                                            __________________________________________________________________________

                  TABLE 127                                                        ______________________________________                                         Drum No.  4001     4002   4003    4004 4005                                    ______________________________________                                         a [μm] 25       50     50      12   12                                      b [μm] 0.8      2.5    0.8     1.5  0.3                                     ______________________________________                                    

                                      TABLE 128                                    __________________________________________________________________________           initial                                                                        charge-                                                                              photo-                                                                               residual     defective                                                                           interference                               Drum No.                                                                             retentivity                                                                          sensitivity                                                                          potential                                                                           ghost                                                                             durability                                                                          image                                                                               fringe                                     __________________________________________________________________________     4001  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ○                                                                            ⊚                           4002  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ○                                                                            ⊚                           4003  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ○                                                                            ○                                   4004  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ○                                                                            ⊚                           4005  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ○                                                                            ○                                   __________________________________________________________________________       ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                                      TABLE 129                                    __________________________________________________________________________                            Substrate                                                                             RF  Internal                                                                            Layer                                   Name of                temperature                                                                           power                                                                              pressure                                                                            thickness                               layer Gas used & its flow rate (SCCM)                                                                 (°C.)                                                                          (W) (Torr)                                                                              (μm)                                 __________________________________________________________________________     IR    SiH.sub.4 100                                                            absorption                                                                           GeH.sub.4 50     250    150 0.35 1                                       layer B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                              NO        10                                                             Charge                                                                               SiH.sub.4 100                                                            injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800 ppm                                                                               250    150 0.35 3                                       inhibition                                                                           H.sub.2   100                                                            layer NO        10                                                             CGL   SiH.sub.4 200    250    300 0.40 1                                             H.sub.2   200                                                            CTL   SiH.sub.4 250                                                                  C.sub.2 H.sub.2                                                                          400    250    300 0.42 24                                            PH.sub.3  1 → 0                                                                       ppm                                                        Surface                                                                              SiH.sub.4 20     250    150 0.40 1                                       layer CH.sub.4  500                                                            __________________________________________________________________________

                  TABLE 130                                                        ______________________________________                                         Drum No.  4011     4012   4013    4014 4015                                    ______________________________________                                         c [μm] 30       40     50      70   100                                     d [μm] 0.7      1.0    1.2      2    5                                      ______________________________________                                    

                                      TABLE 131                                    __________________________________________________________________________           initial                                                                        charge-                                                                              photo-                                                                               residual     defective                                                                           interference                               Drum No.                                                                             retentivity                                                                          sensitivity                                                                          potential                                                                           ghost                                                                             durability                                                                          image                                                                               fringe                                     __________________________________________________________________________     4011  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ⊚                                                                    ○                                   4012  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ⊚                                                                    ⊚                           4013  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ⊚                                                                    ⊚                           4014  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ⊚                                                                    ○                                   4015  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                                                    ⊚                                                                    ○                                   __________________________________________________________________________       ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 132                                                        ______________________________________                                         CTL No                                                                                CTL    CTL     CTL  CTL  CTL  CTL   CTL  CTL                            CGL No 1      2       3    4    5    6     7    8                              ______________________________________                                         Drum No                                                                        CGL 1  4101   4102    4103 4104 4105 4106  4107 4108                           CGL 2  4109   4110    4111 4112 4113 4114  4115 4116                           CGL 3  4117                                                                    ______________________________________                                    

                                      TABLE 133                                    __________________________________________________________________________                           Substrate                                                                             RF  Internal                                                                            Layer                                    Name of               temperature                                                                           power                                                                              pressure                                                                            thickness                                layer Gas used & its flow rate (SCCM)                                                                (°C.)                                                                          (W) (Torr)                                                                              (μm)                                  __________________________________________________________________________     IR    SiH.sub.4 100                                                            absorption                                                                           GeH.sub.4 50    350    500 0.35 1                                        layer B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800                                                                               ppm                                                               NO        10                                                             Charge                                                                               SiH.sub.4 100                                                            injection                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800                                                                               ppm                                                                               350    500 0.35 3                                        inhibition                                                                           H.sub.2   500                                                            layer NO        10                                                             CGL/  Combination as shown in Table 132                                        CTL                                                                            Surface                                                                              SiH.sub.4 20    350    500 0.40 1                                        layer CH.sub.4  500                                                            __________________________________________________________________________

                  TABLE 134                                                        ______________________________________                                         Film Forming Conditions CGL                                                    Name  Gas used & Substrate RF    Internal                                                                              Layer                                  of    its flow rate                                                                             temper-   power pressure                                                                              thickness                              layer (SCCM)     ature (°C.)                                                                       (W)   (Torr) (μm)                                ______________________________________                                         CGL 1 SiH.sub.4                                                                             200    350      700   0.40   1                                          H.sub.2                                                                               1000                                                              CGL 2 SiH.sub.4                                                                             150    350      700   0.40   2                                          SiF.sub.4                                                                             50                                                                      H.sub.2                                                                               1000                                                              CGL 3 SiH.sub.4                                                                             200    350      650   0.40   5                                          He     200                                                               ______________________________________                                    

                  TABLE 135                                                        ______________________________________                                         Film Forming Conditions of CTL                                                                    Substrate             Layer                                 Name  Gas used &   temper-  RF    Internal                                                                              thick-                                of    its flow rate                                                                               ature    power pressure                                                                              ness                                  Layer (SCCM)       (°C.)                                                                            (W)   (Torr) (μm)                               ______________________________________                                         CTL 1 SiH.sub.4 100                                                                               350      700   0.40   24                                          SiF.sub.4 50                                                                   CH.sub.4 450                                                                   B.sub.2 H.sub.6 [FIG. 70(1)]                                             CTL 2 SiH.sub.4 250                                                                               350      700   0.42   24                                          C.sub.2 H.sub.2 400                                                            PH.sub.3 [FIG. 70(2)]                                                    CTL 3 SiH.sub.4 300                                                                               350      700   0.35   20                                          C.sub.2 H.sub.2 350                                                            B.sub.2 H.sub.6 [FIG. 70(3)]                                             CTL 4 SiH.sub.4 80 350      750   0.45   20                                          C.sub.2 H.sub.4 600                                                            PH.sub.3 [FIG. 70(4)]                                                    CTL 5 SiH.sub.4 120                                                                               350      750   0.45   24                                          N.sub.2 500                                                                    CH.sub.4 [FIG. 70(5)]                                                          B.sub.2 H.sub.6 [FIG. 70(5)]                                             CTL 6 SiH.sub.4 150                                                                               350      700   0.40   12                                          NH.sub.3 300                                                                   CH.sub.4 300                                                                   PH.sub.3 [FIG. 70(6)]                                                    CTL 7 SiH.sub.4 350                                                                               350      600   0.38   28                                          C.sub.2 H.sub.4 25                                                             Ar 200                                                                         PH.sub.3 [FIG. 70(7)]                                                    CTL 8 SiH.sub.4 500                                                                               350      600   0.40   28                                          NO 60                                                                          B.sub.2 H.sub.6 [FIG. 70(8)]                                                   NH.sub.3 [FIG. 70(8)]                                                          CH.sub.4 [FIG. 70(8)]                                                    ______________________________________                                    

                                      TABLE 136                                    __________________________________________________________________________           initial                                                                        charge-                                                                              photo-                                                                               residual                                                     Drum No.                                                                             retentivity                                                                          senitivity                                                                           potential                                                                           ghost                                                                             durability                                           __________________________________________________________________________     4101  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4102  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4103  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4104  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4105  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4106  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4107  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4108  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4109  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4110  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4111  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4112  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4113  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4114  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4115  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4116  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4117  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     4118  ⊚                                                                     ○                                                                             ○                                                                            ○                                                                          ⊚                                     __________________________________________________________________________       ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                                      TABLE 137                                    __________________________________________________________________________                          Layer formed                                              Example                                                                             Sample  Corresponding                                                                          IR absorption                                                                         Charge injection                                                                              Surface                                                                             Evaluation                     No.  No.     Table No.                                                                              layer  inhibition layer                                                                        CGL/CTL                                                                              layer                                                                               Table No.                      __________________________________________________________________________     43   101A˜118A                                                                        4       --     --       ○                                                                             --   138                            44   201A˜218A                                                                        112     --     --       ○                                                                             --   139                            45   301A˜318A                                                                        117     --     --       ○                                                                             --   140                            46   401A˜417A                                                                        122     --     --       ○                                                                             --   141                            47   501A˜505A                                                                        126     --     --       ○                                                                             --     142A                         48   511A˜515A                                                                        129     --     --       ○                                                                             --     143A                         49   601A˜617A                                                                        133     --     --       ○                                                                             --   144                            50   101B˜118B                                                                        4       --     ○ ○                                                                             --   145                            51   201B˜218B                                                                        7       --     ○ ○                                                                             --   146                            52   301B˜318B                                                                        64      --     ○ ○                                                                             --   147                            53   401B˜418B                                                                        67      --     ○ ○                                                                             --   148                            54   501B˜518B                                                                        112     --     ○ ○                                                                             --   149                            55   601B˜618B                                                                        117     --     ○ ○                                                                             --   150                            56   701B˜717B                                                                        122     --     ○ ○                                                                             --   151                            57   801B˜805B                                                                        126     --     ○ ○                                                                             --     152A                         58   811B˜815B                                                                        129     --     ○ ○                                                                             --     153A                         59   901B˜917B                                                                        133     --     ○ ○                                                                             --   154                            60   101C˜118C                                                                        4       ○                                                                              --       ○                                                                             --   155                            61   201C˜218C                                                                        46      ○                                                                              --       ○                                                                             --   156                            62   301C˜318C                                                                        79      ○                                                                              --       ○                                                                             --   157                            63   401C˜418C                                                                        112     ○                                                                              --       ○                                                                             --   158                            64   501C˜518C                                                                        117     ○                                                                              --       ○                                                                             --   159                            65   601C˜617C                                                                        122     ○                                                                              --       ○                                                                             --   160                            66   701C˜705C                                                                        126     ○                                                                              --       ○                                                                             --     161A                         67   711C˜715C                                                                        129     ○                                                                              --       ○                                                                             --     162A                         68   801C˜817C                                                                        133     ○                                                                              --       ○                                                                             --   163                            69   101D˜118D                                                                        4       --     ○ ○                                                                             ○                                                                            164                            70   201D˜218D                                                                        7       --     ○ ○                                                                             ○                                                                            165                            71   301D˜318D                                                                        10      --     ○ ○                                                                             ○                                                                            166                            72   401D˜418D                                                                        22      --     ○ ○                                                                             ○                                                                            167                            73   501D˜518D                                                                        58      --     ○ ○                                                                             ○                                                                            168                            74   601D˜618D                                                                        169     --     ○ ○                                                                             ○                                                                            170                            75   701D˜718D                                                                        112     --     ○ ○                                                                             ○                                                                            171                            76   801D˜818D                                                                        117     --     ○ ○                                                                             ○                                                                            172                            77   901D˜917D                                                                        122     --     ○ ○                                                                             ○                                                                            173                            78   1001D˜1005D                                                                      126     --     ○ ○                                                                             ○                                                                              174A                         79   1011D˜1015D                                                                      129     --     ○ ○                                                                             ○                                                                              175A                         80   1101D˜1117D                                                                      133     --     ○ ○                                                                             ○                                                                            176                            81   101E˜118E                                                                        4       --     ○ ○                                                                             ○                                                                            177                            82   201E˜218E                                                                        7       --     ○ ○                                                                             ○                                                                            178                            83   301E˜318E                                                                        100     --     ○ ○                                                                             ○                                                                            179                            84   401E˜418E                                                                        43      --     ○ ○                                                                             ○                                                                            180                            85   501E˜518E                                                                        16      --     ○ ○                                                                             ○                                                                            181                            86   601E˜618E                                                                        19      --     ○ ○                                                                             ○                                                                            182                            87   701E˜718E                                                                        22      --     ○ ○                                                                             ○                                                                            183                            88   801E˜818E                                                                        25      --     ○ ○                                                                             ○                                                                            184                            89   901E˜918E                                                                        28      --     ○ ○                                                                             ○                                                                            185                            90   1001E˜1018E                                                                      31      --     ○ ○                                                                             ○                                                                            186                            91   1301E˜1318E                                                                      18      --     ○ ○                                                                             ○                                                                            188                            92   1401E˜1418E                                                                      73      --     ○ ○                                                                             ○                                                                            189                            93   1501E˜1518E                                                                      76      --     ○ ○                                                                             ○                                                                            190                            94   1601E˜1618E                                                                      79      --     ○ ○                                                                             ○                                                                            191                            95   1701E˜1718E                                                                      97      --     ○ ○                                                                             ○                                                                            192                            96   1901E˜1918E                                                                      193     --     ○ ○                                                                             ○                                                                            194                            97   2001E˜2018E                                                                      106     --     ○ ○                                                                             ○                                                                            195                            98   2101E˜2118E                                                                      109     --     ○ ○                                                                             ○                                                                            196                            99   2201E˜2218E                                                                      112     --     ○ ○                                                                             ○                                                                              196A                         100  2301E˜2318E                                                                      117     --     ○ ○                                                                             ○                                                                            197                            101  2401E˜2419E                                                                      122     --     ○ ○                                                                             ○                                                                            198                            102  2501E˜2505E                                                                      126     --     ○ ○                                                                             ○                                                                              199A                         103  2511E˜2515E                                                                      129     --     ○ ○                                                                             ○                                                                              200A                         104  2601E˜2617E                                                                      133     --     ○ ○                                                                             ○                                                                            201                            105  101F˜118F                                                                        4       ○                                                                              ○ ○                                                                             --   202                            106  201F˜218F                                                                        7       ○                                                                              ○ ○                                                                             --   203                            107  301F˜318F                                                                        103     ○                                                                              ○ ○                                                                             --   204                            108  401F˜418F                                                                        37      ○                                                                              ○ ○                                                                             --   205                            109  501F˜518F                                                                        64      ○                                                                              ○ ○                                                                             --   206                            110  601F˜618F                                                                        67      ○                                                                              ○ ○                                                                             --   207                            111  701F˜718F                                                                        208     ○                                                                              ○ ○                                                                             --   209                            112  801F˜818F                                                                        112     ○                                                                              ○ ○                                                                             --   210                            113  901F˜918F                                                                        117     ○                                                                              ○ ○                                                                             --   211                            114  1001F˜1017F                                                                      122     ○                                                                              ○ ○                                                                             --   212                            115  1101F˜1105F                                                                      126     ○                                                                              ○ ○                                                                             --     213A                         116  1111F˜1115F                                                                      129     ○                                                                              ○ ○                                                                             --     214A                         117  1201F˜1218F                                                                      133     ○                                                                              ○ ○                                                                             --   215                            118  101G˜118G                                                                        4       ○                                                                              --       ○                                                                             ○                                                                            216                            119  201G˜218G                                                                        217     ○                                                                              --       ○                                                                             ○                                                                            218                            120  301G˜318G                                                                        10      ○                                                                              --       ○                                                                             ○                                                                            219                            121  401G˜418G                                                                        22      ○                                                                              --       ○                                                                             ○                                                                            220                            122  501G˜518G                                                                        16      ○                                                                              --       ○                                                                             ○                                                                            221                            123  601G˜618G                                                                        222     ○                                                                              --       ○                                                                             ○                                                                            223                            124  701G˜718G                                                                        40      ○                                                                              --       ○                                                                             ○                                                                            224                            125  801G˜818G                                                                        46      ○                                                                              --       ○                                                                             ○                                                                            225                            126  901G˜918G                                                                        52      ○                                                                              --       ○                                                                             ○                                                                            226                            127  1001G˜1018G                                                                      58      ○                                                                              --       ○                                                                             ○                                                                            227                            128  1101G˜1118G                                                                      228     ○                                                                              --       ○                                                                             ○                                                                            229                            129  1201G˜1218G                                                                      230     ○                                                                              --       ○                                                                             ○                                                                            231                            130  1301G˜1318G                                                                      70      ○                                                                              --       ○                                                                             ○                                                                            232                            131  1401G˜1418G                                                                      73      ○                                                                              --       ○                                                                             ○                                                                            233                            132  1501G˜1518G                                                                      76      ○                                                                              --       ○                                                                             ○                                                                            234                            133  1601G˜1618G                                                                      79      ○                                                                              --       ○                                                                             ○                                                                            235                            134  1701G˜1718G                                                                      236     ○                                                                              --       ○                                                                             ○                                                                            237                            135  1801G˜1818G                                                                      112     ○                                                                              --       ○                                                                             ○                                                                            238                            136  1901G˜1918G                                                                      117     ○                                                                              --       ○                                                                             ○                                                                            239                            137  2001G˜2017G                                                                      122     ○                                                                              --       ○                                                                             ○                                                                            240                            138  2101G˜2105G                                                                      126     ○                                                                              --       ○                                                                             ○                                                                              241A                         139  2111G˜2115G                                                                      129     ○                                                                              --       ○                                                                             ○                                                                              242A                         140  2201G˜2218G                                                                      133     ○                                                                              --       ○                                                                             ○                                                                            243                            __________________________________________________________________________

                  TABLE 138                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              senitivity                                                                               potential                                                                             ghost                                                                               durability                             ______________________________________                                         101A    ○  ○  ○                                                                              ○                                                                            ○                               102A    ○  ○  ○                                                                              ○                                                                            ○                               103A    ○  ○  ○                                                                              ○                                                                            ○                               104A    ○  ○  ○                                                                              ○                                                                            ○                               105A    ○  ○  ○                                                                              ○                                                                            ○                               106A    ○  ○  ○                                                                              ○                                                                            ○                               107A    ○  ○  ○                                                                              ○                                                                            ○                               108A    ○  ○  ○                                                                              ○                                                                            ○                               109A    ○  ○  ○                                                                              ○                                                                            ○                               110A    ○  ○  ○                                                                              ○                                                                            ○                               111A    ○  ○  ○                                                                              ○                                                                            ○                               112A    ○  ○  ○                                                                              ○                                                                            ○                               113A    ○  ○  ○                                                                              ○                                                                            ○                               114A    ○  ○  ○                                                                              ○                                                                            ○                               115A    ○  ○  ○                                                                              ○                                                                            ○                               116A    ○  ○  ○                                                                              ○                                                                            ○                               117A    ○  ○  ○                                                                              ○                                                                            ○                               118A    ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 139                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              senitivity                                                                               potential                                                                             ghost                                                                               durability                             ______________________________________                                         201A    ○  ○  ○                                                                              ○                                                                            ○                               202A    ○  ○  ○                                                                              ○                                                                            ○                               203A    ○  ○  ○                                                                              ○                                                                            ○                               204A    ○  ○  ○                                                                              ○                                                                            ○                               205A    ○  ○  ○                                                                              ○                                                                            ○                               206A    ○  ○  ○                                                                              ○                                                                            ○                               207A    ○  ○  ○                                                                              ○                                                                            ○                               208A    ○  ○  ○                                                                              ○                                                                            ○                               209A    ○  ○  ○                                                                              ○                                                                            ○                               210A    ○  ○  ○                                                                              ○                                                                            ○                               211A    ○  ○  ○                                                                              ○                                                                            ○                               212A    ○  ○  ○                                                                              ○                                                                            ○                               213A    ○  ○  ○                                                                              ○                                                                            ○                               214A    ○  ○  ○                                                                              ○                                                                            ○                               215A    ○  ○  ○                                                                              ○                                                                            ○                               216A    ○  ○  ○                                                                              ○                                                                            ○                               217A    ○  ○  ○                                                                              ○                                                                            ○                               218A    ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 140                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              senitivity                                                                               potential                                                                             ghost                                                                               durability                             ______________________________________                                         301A    ○  ○  ○                                                                              ○                                                                            ○                               302A    ○  ○  ○                                                                              ○                                                                            ○                               303A    ○  ○  ○                                                                              ○                                                                            ○                               304A    ○  ○  ○                                                                              ○                                                                            ○                               305A    ○  ○  ○                                                                              ○                                                                            ○                               306A    ○  ○  ○                                                                              ○                                                                            ○                               307A    ○  ○  ○                                                                              ○                                                                            ○                               308A    ○  ○  ○                                                                              ○                                                                            ○                               309A    ○  ○  ○                                                                              ○                                                                            ○                               310A    ○  ○  ○                                                                              ○                                                                            ○                               311A    ○  ○  ○                                                                              ○                                                                            ○                               312A    ○  ○  ○                                                                              ○                                                                            ○                               313A    ○  ○  ○                                                                              ○                                                                            ○                               314A    ○  ○  ○                                                                              ○                                                                            ○                               315A    ○  ○  ○                                                                              ○                                                                            ○                               316A    ○  ○  ○                                                                              ○                                                                            ○                               317A    ○  ○  ○                                                                              ○                                                                            ○                               318A    ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 141                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              senitivity                                                                               potential                                                                             ghost                                                                               durability                             ______________________________________                                         401A    ○  ○  ○                                                                              ○                                                                            ○                               402A    ○  ○  ○                                                                              ○                                                                            ○                               403A    ○  ○  ○                                                                              ○                                                                            ○                               404A    ○  ○  ○                                                                              ○                                                                            ○                               405A    ○  ○  ○                                                                              ○                                                                            ○                               406A    ○  ○  ○                                                                              ○                                                                            ○                               407A    ○  ○  ○                                                                              ○                                                                            ○                               408A    ○  ○  ○                                                                              ○                                                                            ○                               409A    ○  ○  ○                                                                              ○                                                                            ○                               410A    ○  ○  ○                                                                              ○                                                                            ○                               411A    ○  ○  ○                                                                              ○                                                                            ○                               412A    ○  ○  ○                                                                              ○                                                                            ○                               413A    ○  ○  ○                                                                              ○                                                                            ○                               414A    ○  ○  ○                                                                              ○                                                                            ○                               415A    ○  ○  ○                                                                              ○                                                                            ○                               416A    ○  ○  ○                                                                              ○                                                                            ○                               417A    ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 142                                                        ______________________________________                                         Drum No.  501A     502A   503A    504A 505A                                    ______________________________________                                         a [μm] 25       50     50      12   12                                      b [μm] 0.8      2.5    0.8     1.5  0.3                                     ______________________________________                                    

                  TABLE 142 A                                                      ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         501A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ⊚                  502A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ⊚                  503A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ○                          504A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ⊚                  505A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ○                          ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 143                                                        ______________________________________                                         Drum No.  511A     512A   513A    514A 515A                                    ______________________________________                                         a [μm] 30       40     50      70   100                                     b [μm] 0.7      1.0    1.2     2    5                                       ______________________________________                                    

                  TABLE 143 A                                                      ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         511A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ○                          512A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ⊚                  513A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ⊚                  514A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ○                          515A  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ○                          ______________________________________                                           ⊚ : Excellent                                                   ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 144                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         601     ○  ○  ○                                                                              ○                                                                            ○                               602     ○  ○  ○                                                                              ○                                                                            ○                               603     ○  ○  ○                                                                              ○                                                                            ○                               604     ○  ○  ○                                                                              ○                                                                            ○                               605     ○  ○  ○                                                                              ○                                                                            ○                               606     ○  ○  ○                                                                              ○                                                                            ○                               607     ○  ○  ○                                                                              ○                                                                            ○                               608     ○  ○  ○                                                                              ○                                                                            ○                               609     ○  ○  ○                                                                              ○                                                                            ○                               610     ○  ○  ○                                                                              ○                                                                            ○                               611     ○  ○  ○                                                                              ○                                                                            ○                               612     ○  ○  ○                                                                              ○                                                                            ○                               613     ○  ○  ○                                                                              ○                                                                            ○                               614     ○  ○  ○                                                                              ○                                                                            ○                               615     ○  ○  ○                                                                              ○                                                                            ○                               616     ○  ○  ○                                                                              ○                                                                            ○                               617     ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 145                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         101B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               102B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               103B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               104B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               105B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               106B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               107B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               108B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               109B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               110B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               111B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               112B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               113B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               114B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               115B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               116B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               117B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               118B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 146                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         201B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               202B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               203B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               204B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               205B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               206B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               207B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               208B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               209B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               210B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               211B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               212B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               213B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               214B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               215B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               216B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               217B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               218B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 147                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         301B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               302B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               303B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               304B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               305B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               306B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               307B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               308B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               309B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               310B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               311B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               312B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               313B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               314B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               315B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               316B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               317B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               318B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 148                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         401B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               402B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               403B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               404B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               405B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               406B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               407B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               408B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               409B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               410B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               411B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               412B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               413B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               414B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               415B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               416B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               417B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               418B    ⊚                                                                         ○  ○                                                                              ⊚                                                                    ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 149                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         501B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               502B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               503B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               504B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               505B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               506B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               507B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               508B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               509B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               510B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               511B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               512B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               513B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               514B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               515B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               516B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               517B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               518B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 150                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         601B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               602B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               603B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               604B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               605B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               606B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               607B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               608B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               609B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               610B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               611B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               612B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               613B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               614B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               615B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               616B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               617B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               618B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 151                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         701B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               702B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               703B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               704B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               705B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               706B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               707B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               708B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               709B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               710B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               711B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               712B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               713B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               714B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               715B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               716B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               717B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 152                                                        ______________________________________                                         Drum No.  801B      802B   803B   804B 805B                                    ______________________________________                                         a [μm] 25        50     50     12   12                                      b [μm] 0.8       2.5    0.8    1.5  0.3                                     ______________________________________                                    

                  TABLE 152 A                                                      ______________________________________                                               initial                                                                        charge  photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         801B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  802B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  803B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ○                          804B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  805B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ○                          ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 153                                                        ______________________________________                                         Drum No.  811B     812B   813B    814B 815B                                    ______________________________________                                         a [μm] 30       40     50      70   100                                     b [μm] 0.7      1.0    1.2     2    5                                       ______________________________________                                    

                  TABLE 153 A                                                      ______________________________________                                               initial                                                                        charge  photo-                   defec-                                                                               inter-                            Drum  retent- sensi   residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         811B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          812B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ⊚                  813B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ⊚                  814B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          815B  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 154                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         901B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               902B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               903B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               904B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               905B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               906B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               907B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               908B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               909B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               910B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               911B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               912B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               913B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               914B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               915B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               916B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               917B    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 155                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         101C    ○  ○  ○                                                                              ○                                                                            ○                               102C    ○  ○  ○                                                                              ○                                                                            ○                               103C    ○  ○  ○                                                                              ○                                                                            ○                               104C    ○  ○  ○                                                                              ○                                                                            ○                               105C    ○  ○  ○                                                                              ○                                                                            ○                               106C    ○  ○  ○                                                                              ○                                                                            ○                               107C    ○  ○  ○                                                                              ○                                                                            ○                               108C    ○  ○  ○                                                                              ○                                                                            ○                               109C    ○  ○  ○                                                                              ○                                                                            ○                               110C    ○  ○  ○                                                                              ○                                                                            ○                               111C    ○  ○  ○                                                                              ○                                                                            ○                               112C    ○  ○  ○                                                                              ○                                                                            ○                               113C    ○  ○  ○                                                                              ○                                                                            ○                               114C    ○  ○  ○                                                                              ○                                                                            ○                               115C    ○  ○  ○                                                                              ○                                                                            ○                               116C    ○  ○  ○                                                                              ○                                                                            ○                               117C    ○  ○  ○                                                                              ○                                                                            ○                               118C    ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 156                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         201C    ○  ○  ○                                                                              ○                                                                            ○                               202C    ○  ○  ○                                                                              ○                                                                            ○                               203C    ○  ○  ○                                                                              ○                                                                            ○                               204C    ○  ○  ○                                                                              ○                                                                            ○                               205C    ○  ○  ○                                                                              ○                                                                            ○                               206C    ○  ○  ○                                                                              ○                                                                            ○                               207C    ○  ○  ○                                                                              ○                                                                            ○                               208C    ○  ○  ○                                                                              ○                                                                            ○                               209C    ○  ○  ○                                                                              ○                                                                            ○                               210C    ○  ○  ○                                                                              ○                                                                            ○                               211C    ○  ○  ○                                                                              ○                                                                            ○                               212C    ○  ○  ○                                                                              ○                                                                            ○                               213C    ○  ○  ○                                                                              ○                                                                            ○                               214C    ○  ○  ○                                                                              ○                                                                            ○                               215C    ○  ○  ○                                                                              ○                                                                            ○                               216C    ○  ○  ○                                                                              ○                                                                            ○                               217C    ○  ○  ○                                                                              ○                                                                            ○                               218C    ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X : practically not applicable                                           

                  TABLE 157                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         301C    ○  ○  ○                                                                              ⊚                                                                    ○                               302C    ○  ○  ○                                                                              ⊚                                                                    ○                               303C    ○  ○  ○                                                                              ⊚                                                                    ○                               304C    ○  ○  ○                                                                              ⊚                                                                    ○                               305C    ○  ○  ○                                                                              ⊚                                                                    ○                               306C    ○  ○  ○                                                                              ⊚                                                                    ○                               307C    ○  ○  ○                                                                              ⊚                                                                    ○                               308C    ○  ○  ○                                                                              ⊚                                                                    ○                               309C    ○  ○  ○                                                                              ⊚                                                                    ○                               310C    ○  ○  ○                                                                              ⊚                                                                    ○                               311C    ○  ○  ○                                                                              ⊚                                                                    ○                               312C    ○  ○  ○                                                                              ⊚                                                                    ○                               313C    ○  ○  ○                                                                              ⊚                                                                    ○                               314C    ○  ○  ○                                                                              ⊚                                                                    ○                               315C    ○  ○  ○                                                                              ⊚                                                                    ○                               316C    ○  ○  ○                                                                              ⊚                                                                    ○                               317C    ○  ○  ○                                                                              ⊚                                                                    ○                               318C    ○  ○  ○                                                                              ⊚                                                                    ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 158                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         401C    ○  ○  ○                                                                              ○                                                                            ○                               402C    ○  ○  ○                                                                              ○                                                                            ○                               403C    ○  ○  ○                                                                              ○                                                                            ○                               404C    ○  ○  ○                                                                              ○                                                                            ○                               405C    ○  ○  ○                                                                              ○                                                                            ○                               406C    ○  ○  ○                                                                              ○                                                                            ○                               407C    ○  ○  ○                                                                              ○                                                                            ○                               408C    ○  ○  ○                                                                              ○                                                                            ○                               409C    ○  ○  ○                                                                              ○                                                                            ○                               410C    ○  ○  ○                                                                              ○                                                                            ○                               411C    ○  ○  ○                                                                              ○                                                                            ○                               412C    ○  ○  ○                                                                              ○                                                                            ○                               413C    ○  ○  ○                                                                              ○                                                                            ○                               414C    ○  ○  ○                                                                              ○                                                                            ○                               415C    ○  ○  ○                                                                              ○                                                                            ○                               416C    ○  ○  ○                                                                              ○                                                                            ○                               417C    ○  ○  ○                                                                              ○                                                                            ○                               418C    ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 159                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         501C    ○  ○  ○                                                                              ○                                                                            ○                               502C    ○  ○  ○                                                                              ○                                                                            ○                               503C    ○  ○  ○                                                                              ○                                                                            ○                               504C    ○  ○  ○                                                                              ○                                                                            ○                               505C    ○  ○  ○                                                                              ○                                                                            ○                               506C    ○  ○  ○                                                                              ○                                                                            ○                               507C    ○  ○  ○                                                                              ○                                                                            ○                               508C    ○  ○  ○                                                                              ○                                                                            ○                               509C    ○  ○  ○                                                                              ○                                                                            ○                               510C    ○  ○  ○                                                                              ○                                                                            ○                               511C    ○  ○  ○                                                                              ○                                                                            ○                               512C    ○  ○  ○                                                                              ○                                                                            ○                               513C    ○  ○  ○                                                                              ○                                                                            ○                               514C    ○  ○  ○                                                                              ○                                                                            ○                               515C    ○  ○  ○                                                                              ○                                                                            ○                               516C    ○  ○  ○                                                                              ○                                                                            ○                               517C    ○  ○  ○                                                                              ○                                                                            ○                               518C    ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 160                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         601C    ○  ○  ○                                                                              ○                                                                            ○                               602C    ○  ○  ○                                                                              ○                                                                            ○                               603C    ○  ○  ○                                                                              ○                                                                            ○                               604C    ○  ○  ○                                                                              ○                                                                            ○                               605C    ○  ○  ○                                                                              ○                                                                            ○                               606C    ○  ○  ○                                                                              ○                                                                            ○                               607C    ○  ○  ○                                                                              ○                                                                            ○                               608C    ○  ○  ○                                                                              ○                                                                            ○                               609C    ○  ○  ○                                                                              ○                                                                            ○                               610C    ○  ○  ○                                                                              ○                                                                            ○                               611C    ○  ○  ○                                                                              ○                                                                            ○                               612C    ○  ○  ○                                                                              ○                                                                            ○                               613C    ○  ○  ○                                                                              ○                                                                            ○                               614C    ○  ○  ○                                                                              ○                                                                            ○                               615C    ○  ○  ○                                                                              ○                                                                            ○                               616C    ○  ○  ○                                                                              ○                                                                            ○                               617C    ○  ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 161                                                        ______________________________________                                         Drum No.  701C       702C   703C   704C 705C                                   ______________________________________                                         a [μm] 25         50     50     12   12                                     b [μm] 0.8        2.5    0.8    1.5  0.3                                    ______________________________________                                    

                  TABLE 161 A                                                      ______________________________________                                               initial                                                                        charge- photo                    defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         701C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ⊚                  702C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ⊚                  703C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ○                          704C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ⊚                  705C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ○                          ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 162                                                        ______________________________________                                         Drum No.  711C       712C   713C   714C 715C                                   ______________________________________                                         a [μm] 30         40     50     70   100                                    b [μm] 0.7        1.0    1.2    2    5                                      ______________________________________                                    

                  TABLE 162 A                                                      ______________________________________                                               initial                                                                        charge- photo                    defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         711C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ○                          712C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ⊚                  713C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ⊚                  714C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ○                          715C  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ○                          ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 163                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         801C    ○ ○   ○                                                                              ○                                                                            ○                               802C    ○ ○   ○                                                                              ○                                                                            ○                               803C    ○ ○   ○                                                                              ○                                                                            ○                               804C    ○ ○   ○                                                                              ○                                                                            ○                               805C    ○ ○   ○                                                                              ○                                                                            ○                               806C    ○ ○   ○                                                                              ○                                                                            ○                               807C    ○ ○   ○                                                                              ○                                                                            ○                               808C    ○ ○   ○                                                                              ○                                                                            ○                               809C    ○ ○   ○                                                                              ○                                                                            ○                               810C    ○ ○   ○                                                                              ○                                                                            ○                               811C    ○ ○   ○                                                                              ○                                                                            ○                               812C    ○ ○   ○                                                                              ○                                                                            ○                               813C    ○ ○   ○                                                                              ○                                                                            ○                               814C    ○ ○   ○                                                                              ○                                                                            ○                               815C    ○ ○   ○                                                                              ○                                                                            ○                               816C    ○ ○   ○                                                                              ○                                                                            ○                               817C    ○ ○   ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 164                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         101D    ○  ○  Δ                                                                               ○                                                                            ⊚                       102D    ○  ○  Δ                                                                               ○                                                                            ⊚                       103D    ○  ○  Δ                                                                               ○                                                                            ⊚                       104D    ○  ○  Δ                                                                               ○                                                                            ⊚                       105D    ○  ○  Δ                                                                               ○                                                                            ⊚                       106D    ○  ○  Δ                                                                               ○                                                                            ⊚                       107D    ○  ○  Δ                                                                               ○                                                                            ⊚                       108D    ○  ○  Δ                                                                               ○                                                                            ⊚                       109D    ○  ○  Δ                                                                               ○                                                                            ⊚                       110D    ○  ○  Δ                                                                               ○                                                                            ⊚                       111D    ○  ○  Δ                                                                               ○                                                                            ⊚                       112D    ○  ○  Δ                                                                               ○                                                                            ⊚                       113D    ○  ○  Δ                                                                               ○                                                                            ⊚                       114D    ○  ○  Δ                                                                               ○                                                                            ⊚                       115D    ○  ○  Δ                                                                               ○                                                                            ⊚                       116D    ○  ○  Δ                                                                               ○                                                                            ⊚                       117D    ○  ○  Δ                                                                               ○                                                                            ⊚                       118D    ○  ○  Δ                                                                               ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 165                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         201D    ○  ○  ○                                                                              ○                                                                            ⊚                       202D    ○  ○  ○                                                                              ○                                                                            ⊚                       203D    ○  ○  ○                                                                              ○                                                                            ⊚                       204D    ○  ○  ○                                                                              ○                                                                            ⊚                       205D    ○  ○  ○                                                                              ○                                                                            ⊚                       206D    ○  ○  ○                                                                              ○                                                                            ⊚                       207D    ○  ○  ○                                                                              ○                                                                            ⊚                       208D    ○  ○  ○                                                                              ○                                                                            ⊚                       209D    ○  ○  ○                                                                              ○                                                                            ⊚                       210D    ○  ○  ○                                                                              ○                                                                            ⊚                       211D    ○  ○  ○                                                                              ○                                                                            ⊚                       212D    ○  ○  ○                                                                              ○                                                                            ⊚                       213D    ○  ○  ○                                                                              ○                                                                            ⊚                       214D    ○  ○  ○                                                                              ○                                                                            ⊚                       215D    ○  ○  ○                                                                              ○                                                                            ⊚                       216D    ○  ○  ○                                                                              ○                                                                            ⊚                       217D    ○  ○  ○                                                                              ○                                                                            ⊚                       218D    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excwllent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 166                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         301D    ○  ○  ○                                                                              ○                                                                            ⊚                       302D    ○  ○  ○                                                                              ○                                                                            ⊚                       303D    ○  ○  ○                                                                              ○                                                                            ⊚                       304D    ○  ○  ○                                                                              ○                                                                            ⊚                       305D    ○  ○  ○                                                                              ○                                                                            ⊚                       306D    ○  ○  ○                                                                              ○                                                                            ⊚                       307D    ○  ○  ○                                                                              ○                                                                            ⊚                       308D    ○  ○  ○                                                                              ○                                                                            ⊚                       309D    ○  ○  ○                                                                              ○                                                                            ⊚                       310D    ○  ○  ○                                                                              ○                                                                            ⊚                       311D    ○  ○  ○                                                                              ○                                                                            ⊚                       312D    ○  ○  ○                                                                              ○                                                                            ⊚                       313D    ○  ○  ○                                                                              ○                                                                            ⊚                       314D    ○  ○  ○                                                                              ○                                                                            ⊚                       315D    ○  ○  ○                                                                              ○                                                                            ⊚                       316D    ○  ○  ○                                                                              ○                                                                            ⊚                       317D    ○  ○  ○                                                                              ○                                                                            ⊚                       318D    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 167                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         401D    ○  ○  ○                                                                              ○                                                                            ⊚                       402D    ○  ○  ○                                                                              ○                                                                            ⊚                       403D    ○  ○  ○                                                                              ○                                                                            ⊚                       404D    ○  ○  ○                                                                              ○                                                                            ⊚                       405D    ○  ○  ○                                                                              ○                                                                            ⊚                       406D    ○  ○  ○                                                                              ○                                                                            ⊚                       407D    ○  ○  ○                                                                              ○                                                                            ⊚                       408D    ○  ○  ○                                                                              ○                                                                            ⊚                       409D    ○  ○  ○                                                                              ○                                                                            ⊚                       410D    ○  ○  ○                                                                              ○                                                                            ⊚                       411D    ○  ○  ○                                                                              ○                                                                            ⊚                       412D    ○  ○  ○                                                                              ○                                                                            ⊚                       413D    ○  ○  ○                                                                              ○                                                                            ⊚                       414D    ○  ○  ○                                                                              ○                                                                            ⊚                       415D    ○  ○  ○                                                                              ○                                                                            ⊚                       416D    ○  ○  ○                                                                              ○                                                                            ⊚                       417D    ○  ○  ○                                                                              ○                                                                            ⊚                       418D    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 168                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         501D    ○  ○  ○                                                                              ○                                                                            ⊚                       502D    ○  ○  ○                                                                              ○                                                                            ⊚                       503D    ○  ○  ○                                                                              ○                                                                            ⊚                       504D    ○  ○  ○                                                                              ○                                                                            ⊚                       505D    ○  ○  ○                                                                              ○                                                                            ⊚                       506D    ○  ○  ○                                                                              ○                                                                            ⊚                       507D    ○  ○  ○                                                                              ○                                                                            ⊚                       508D    ○  ○  ○                                                                              ○                                                                            ⊚                       509D    ○  ○  ○                                                                              ○                                                                            ⊚                       510D    ○  ○  ○                                                                              ○                                                                            ⊚                       511D    ○  ○  ○                                                                              ○                                                                            ⊚                       512D    ○  ○  ○                                                                              ○                                                                            ⊚                       513D    ○  ○  ○                                                                              ○                                                                            ⊚                       514D    ○  ○  ○                                                                              ○                                                                            ⊚                       515D    ○  ○  ○                                                                              ○                                                                            ⊚                       516D    ○  ○  ○                                                                              ○                                                                            ⊚                       517D    ○  ○  ○                                                                              ○                                                                            ⊚                       518D    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 169                                                        ______________________________________                                                                            Inter-                                                                         nal   Layer                                 Name  Gas used & its                                                                             Substrate  RF    pres- thick-                                of    flowrate    temperature                                                                               power sure  ness                                  layer (SCCM)      (°C.)                                                                              (W)   (Torr)                                                                               (μm)                               ______________________________________                                         CGL/  Combination as                                                           CTL   shown in                                                                       Table 57                                                                 Surface                                                                              SiH.sub.4                                                                              10      250      200   0.4   2                                   layer N.sub.2 500                                                                    C.sub.2 H.sub.2                                                                        20                                                               ______________________________________                                    

                  TABLE 170                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         601D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       602D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       603D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       604D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       605D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       606D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       607D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       608D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       609D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       610D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       611D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       612D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       613D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       614D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       615D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       616D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       617D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       618D    ○  ○  ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 171                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         701D    ○  ○  ○                                                                              ○                                                                            ⊚                       702D    ○  ○  ○                                                                              ○                                                                            ⊚                       703D    ○  ○  ○                                                                              ○                                                                            ⊚                       704D    ○  ○  ○                                                                              ○                                                                            ⊚                       705D    ○  ○  ○                                                                              ○                                                                            ⊚                       706D    ○  ○  ○                                                                              ○                                                                            ⊚                       707D    ○  ○  ○                                                                              ○                                                                            ⊚                       708D    ○  ○  ○                                                                              ○                                                                            ⊚                       709D    ○  ○  ○                                                                              ○                                                                            ⊚                       710D    ○  ○  ○                                                                              ○                                                                            ⊚                       711D    ○  ○  ○                                                                              ○                                                                            ⊚                       712D    ○  ○  ○                                                                              ○                                                                            ⊚                       713D    ○  ○  ○                                                                              ○                                                                            ⊚                       714D    ○  ○  ○                                                                              ○                                                                            ⊚                       715D    ○  ○  ○                                                                              ○                                                                            ⊚                       716D    ○  ○  ○                                                                              ○                                                                            ⊚                       717D    ○  ○  ○                                                                              ○                                                                            ⊚                       718D    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 172                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         801D    ○  ○  ○                                                                              ○                                                                            ⊚                       802D    ○  ○  ○                                                                              ○                                                                            ⊚                       803D    ○  ○  ○                                                                              ○                                                                            ⊚                       804D    ○  ○  ○                                                                              ○                                                                            ⊚                       805D    ○  ○  ○                                                                              ○                                                                            ⊚                       806D    ○  ○  ○                                                                              ○                                                                            ⊚                       807D    ○  ○  ○                                                                              ○                                                                            ⊚                       808D    ○  ○  ○                                                                              ○                                                                            ⊚                       809D    ○  ○  ○                                                                              ○                                                                            ⊚                       810D    ○  ○  ○                                                                              ○                                                                            ⊚                       811D    ○  ○  ○                                                                              ○                                                                            ⊚                       812D    ○  ○  ○                                                                              ○                                                                            ⊚                       813D    ○  ○  ○                                                                              ○                                                                            ⊚                       814D    ○  ○  ○                                                                              ○                                                                            ⊚                       815D    ○  ○  ○                                                                              ○                                                                            ⊚                       816D    ○  ○  ○                                                                              ○                                                                            ⊚                       817D    ○  ○  ○                                                                              ○                                                                            ⊚                       818D    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 173                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         901D    ○  ○  ○                                                                              ○                                                                            ⊚                       902D    ○  ○  ○                                                                              ○                                                                            ⊚                       903D    ○  ○  ○                                                                              ○                                                                            ⊚                       904D    ○  ○  ○                                                                              ○                                                                            ⊚                       905D    ○  ○  ○                                                                              ○                                                                            ⊚                       906D    ○  ○  ○                                                                              ○                                                                            ⊚                       907D    ○  ○  ○                                                                              ○                                                                            ⊚                       908D    ○  ○  ○                                                                              ○                                                                            ⊚                       909D    ○  ○  ○                                                                              ○                                                                            ⊚                       910D    ○  ○  ○                                                                              ○                                                                            ⊚                       911D    ○  ○  ○                                                                              ○                                                                            ⊚                       912D    ○  ○  ○                                                                              ○                                                                            ⊚                       913D    ○  ○  ○                                                                              ○                                                                            ⊚                       914D    ○  ○  ○                                                                              ○                                                                            ⊚                       915D    ○  ○  ○                                                                              ○                                                                            ⊚                       916D    ○  ○  ○                                                                              ○                                                                            ⊚                       917D    ○  ○  ○                                                                              ○                                                                            ⊚                       918D    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 174                                                        ______________________________________                                         Drum No. 1001D    1002D    1003D 1004D  1005D                                  ______________________________________                                         a [μm]                                                                               25       50       50    12     12                                     b [μm]                                                                               0.8      2.5      0.8   1.5    0.3                                    ______________________________________                                    

                  TABLE 174 A                                                      ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         1001D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  1002D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  1003D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ○                          1004D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  1005D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ○                          ______________________________________                                          ○: Excellent                                                            ⊚: good                                                         Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 175                                                        ______________________________________                                         Drum No. 1011D    1012D    1013D 1014D  1015D                                  ______________________________________                                         a [μm]                                                                               30       40       50    70     100                                    b [μm]                                                                               0.7      1.0      1.2   2      5                                      ______________________________________                                    

                  TABLE 175 A                                                      ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         1011D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          1012D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ⊚                  1013D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ⊚                  1014D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          1015D ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 176                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1101D   ○  ○  ○                                                                              ○                                                                            ⊚                       1102D   ○  ○  ○                                                                              ○                                                                            ⊚                       1103D   ○  ○  ○                                                                              ○                                                                            ⊚                       1104D   ○  ○  ○                                                                              ○                                                                            ⊚                       1105D   ○  ○  ○                                                                              ○                                                                            ⊚                       1106D   ○  ○  ○                                                                              ○                                                                            ⊚                       1107D   ○  ○  ○                                                                              ○                                                                            ⊚                       1108D   ○  ○  ○                                                                              ○                                                                            ⊚                       1109D   ○  ○  ○                                                                              ○                                                                            ⊚                       1110D   ○  ○  ○                                                                              ○                                                                            ⊚                       1111D   ○  ○  ○                                                                              ○                                                                            ⊚                       1112D   ○  ○  ○                                                                              ○                                                                            ⊚                       1113D   ○  ○  ○                                                                              ○                                                                            ⊚                       1114D   ○  ○  ○                                                                              ○                                                                            ⊚                       1115D   ○  ○  ○                                                                              ○                                                                            ⊚                       1116D   ○  ○  ○                                                                              ○                                                                            ⊚                       1117D   ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 177                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         101E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       102E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       103E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       104E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       105E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       106E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       107E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       108E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       109E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       110E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       111E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       112E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       113E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       114E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       115E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       116E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       117E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       118E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 178                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         201E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       202E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       203E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       204E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       205E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       206E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       207E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       208E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       209E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       210E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       211E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       212E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       213E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       214E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       215E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       216E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       217E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       218E    ⊚                                                                         ○  Δ                                                                               ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 179                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         301E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       302E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       303E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       304E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       305E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       306E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       307E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       308E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       309E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       310E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       311E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       312E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       313E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       314E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       315E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       316E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       317E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       318E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 180                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         401E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       402E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       403E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       404E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       405E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       406E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       407E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       408E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       409E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       410E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       411E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       412E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       413E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       414E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       415E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       416E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       417E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       418E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 181                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         501E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       502E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       503E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       504E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       505E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       506E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       507E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       508E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       509E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       510E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       511E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       512E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       513E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       514E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       515E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       516E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       517E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       518E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 182                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         601E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       602E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       603E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       604E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       605E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       606E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       607E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       608E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       609E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       610E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       611E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       612E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       613E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       614E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       615E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       616E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       617E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       618E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 183                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         701E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       702E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       703E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       704E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       705E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       706E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       707E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       708E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       709E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       710E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       711E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       712E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       713E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       714E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       715E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       716E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       717E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       718E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                    ○: good                                                                 Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 184                                                        ______________________________________                                                 initial                                                                        charge-   photo     residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         801E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       802E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       803E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       804E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       805E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       806E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       807E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       808E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       809E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       810E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       811E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       812E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       813E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       814E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       815E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       816E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       817E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       818E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 185                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         901E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       902E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       903E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       904E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       905E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       906E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       907E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       908E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       909E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       910E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       911E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       912E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       913E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       914E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       915E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       916E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       917E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       918E    ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 186                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1001E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1002E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1003E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1004E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1005E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1006E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1007E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1008E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1009E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1010E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1011E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1012E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1013E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1014E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1015E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1016E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1017E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1018E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                                      TABLE 187                                    __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     Charge                                                                               SiH.sub.4      100  250    150 0.35 3                                    injection                                                                            SiF.sub.4       50                                                       inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                             layer (substrate side 2 μm)                                                                      800 ppm                                                         (surface side 1 μm)                                                                        800 → 0                                                                 ppm                                                             (constantly decrease)                                                          NO (substrate side 2 μm)                                                                    10                                                             (surface side 1 μm)                                                                         10 → 0                                                  (constantly decrease)                                                          CH.sub.4 (substrate side 2 μm)                                                              20                                                             (surface side 1 μm)                                                                         20 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in TABLE 30                                         Surface                                                                              SiH.sub.4       20  250    150 0.4  1                                    layer CH.sub.4       500                                                       __________________________________________________________________________

                  TABLE 188                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1301E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1302E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1303E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1304E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1305E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1306E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1307E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1308E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1309E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1310E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1311E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1312E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1313E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1314E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1315E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1316E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1317E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1318E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 189                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1401E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1402E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1403E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1404E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1405E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1406E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1407E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1408E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1409E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1410E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1411E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1412E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1413E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1414E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1415E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1416E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1417E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       1418E   ⊚                                                                         ○  ⊚                                                                      ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 190                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1501E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1502E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1503E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1504E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1505E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1506E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1507E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1508E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1509E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1510E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1511E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1512E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1513E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1514E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1515E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1516E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1517E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       1518E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 191                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1601E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1602E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1603E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1604E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1605E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1606E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1607E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1608E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1609E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1610E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1611E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1612E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1613E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1614E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1615E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1616E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1617E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       1618E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 192                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1701E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1702E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1703E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1704E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1705E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1706E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1707E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1708E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1709E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1710E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1711E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1712E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1713E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1714E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1715E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1716E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1717E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       1718E   ⊚                                                                         ⊚                                                                         ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                                      TABLE 193                                    __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     Charge                                                                               SiH.sub.4      100  250    300 0.35 3                                    injection                                                                            H.sub.2        100                                                       inhibition                                                                           NO (substrate side 2 μm)                                                                    10                                                       layer (surface side 1 μm)                                                                         10 → 0                                                  (constantly decrease)                                                          CH.sub.4 (substrate side 2 μm)                                                             100                                                             (surface side 1 μm)                                                                        100 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 97                                         Surface                                                                              SiH.sub.4 (substrate side)                                                                    350 → 10                                                                     250    150 0.4  1                                    layer (surface side)                                                                 CH.sub.4 (substrate side)                                                                     350 → 10                                                 (surface side)                                                                 (constantly diversify)                                                   __________________________________________________________________________

                  TABLE 194                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1901E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1902E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1903E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1904E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1905E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1906E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1907E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1908E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1909E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1910E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1911E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1912E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1913E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1914E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1915E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1916E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1917E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       1918E   ⊚                                                                         ○  ⊚                                                                      ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 195                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2001E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2002E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2003E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2004E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2005E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2006E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2007E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2008E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2009E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2010E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2011E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2012E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2013E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2014E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2015E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2016E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2017E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       2018E   ⊚                                                                         ○  ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 196                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2101E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2102E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2103E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2104E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2105E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2106E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2107E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2108E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2109E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2110E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2111E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2112E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2113E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2114E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2115E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2116E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2117E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2118E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 196A                                                       ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2201E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2202E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2203E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2204E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2205E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2206E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2207E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2208E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2209E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2210E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2211E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2212E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2213E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2214E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2215E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2216E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2217E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2218E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 197                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2301E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2302E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2303E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2304E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2305E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2306E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2307E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2308E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2309E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2310E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2311E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2312E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2313E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2314E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2315E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2316E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2317E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       2318E   ⊚                                                                         ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 198                                                        ______________________________________                                                 initial                                                                        charge-  photo    residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         2401E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2402E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2403E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2404E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2405E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2406E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2407E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2408E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2409E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2410E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2411E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2412E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2413E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2414E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2415E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2416E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2417E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 199                                                        ______________________________________                                         Drum No.  2501       2502   2503   2504 2505                                   ______________________________________                                         a [μm] 25         50     50     12   12                                     b [μm] 0.8        2.5    0.8    1.5  0.3                                    ______________________________________                                    

                  TABLE 199 A                                                      ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         2501E ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  2502E ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  2503E ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ○                          2504E ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  2505E ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ○                          ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 200                                                        ______________________________________                                         Drum No.  2511       2512   2513   2514 2515                                   ______________________________________                                         a [μm] 30         40     50     70   100                                    b [μm] 0.7        1.0    1.2    2    5                                      ______________________________________                                    

                  TABLE 200 A                                                      ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         2511  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          2512  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ⊚                  2513  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ⊚                  2514  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          2515  ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 201                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         2601E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2602E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2603E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2604E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2605E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2606E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2607E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2608E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2609E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2610E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2611E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2612E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2613E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2614E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2615E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2616E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        2617E   ⊚                                                                        ○ ○                                                                              ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 202                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         101F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                102F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                103F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                104F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                105F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                106F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                107F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                108F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                109F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                110F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                111F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                112F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                113F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                114F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                115F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                116F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                117F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                118F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 203                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         201F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                202F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                203F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                204F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                205F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                206F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                207F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                208F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                209F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                210F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                211F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                212F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                213F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                214F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                215F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                216F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                217F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                218F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                ______________________________________                                          ⊚: Fxcellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 204                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         301F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                302F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                303F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                304F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                305F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                306F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                307F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                308F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                309F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                310F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                311F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                312F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                313F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                314F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                315F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                316F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                317F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                318F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 205                                                        ______________________________________                                                 initial                                                                        charge-  photo    residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         401F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                402F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                403F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                404F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                405F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                406F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                407F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                408F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                409F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                410F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                411F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                412F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                413F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                414F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                415F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                416F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                417F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                418F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 202                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         501F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                502F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                503F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                504F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                505F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                506F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                507F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                508F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                509F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                510F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                511F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                512F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                513F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                514F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                515F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                516F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                517F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                518F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 207                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         601F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                602F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                603F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                604F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                605F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                606F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                607F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                608F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                609F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                610F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                611F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                612F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                613F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                614F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                615F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                616F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                617F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                618F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                                      TAABLE 208                                   __________________________________________________________________________                                 Substrate                                                                             RF  Internal                                                                            Layer                              Name of                     temperature                                                                           power                                                                              pressure                                                                            thickness                          layer Gas used & its flow rate (SCCM)                                                                      (°C.)                                                                          (W) (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4      100    250    150 0.35 1                                  absorption                                                                           GeH.sub.4       10                                                       layer N.sub.2 (substrate side 0.7 μm)                                                             30                                                             (surface side 0.3 μm)                                                                       30 → 0                                                  (constantly decrease)                                                          CH.sub.4 (substrate side 0.7 μm)                                                            25                                                             (surface side 0.3 μm)                                                                       25 → 20                                                 (constantly decrease)                                                          NO              10                                                       Charge                                                                               SiH.sub.4      150    250    150 0.35 3                                  injection                                                                            SiF.sub.4       50                                                       inhibition                                                                           GeH.sub.4       10                                                       layer PH.sub.3 (against SiH.sub.4)                                                   (substrate side 2 μm)                                                                      800 ppm                                                         (surface side 1 μm)                                                                        800 → 0 ppm                                              (constantly decrease)                                                          NO (substrate side 2 μm)                                                                    10                                                             (surface side 1 μm)                                                                         10 → 0                                                  (constantly decrease)                                                          CH.sub.4 (substrate side 2 μm)                                                              20                                                             (surface side 1 μm)                                                                          20 → 0                                                 (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 66                                         __________________________________________________________________________

                  TABLE 209                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         701F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                702F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                703F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                704F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                705F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                706F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                707F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                708F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                709F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                710F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                711F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                712F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                713F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                714F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                715F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                716F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                717F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                718F    ⊚                                                                        ○ ○                                                                              ⊚                                                                     ○                                ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 210                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         801F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                802F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                803F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                804F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                805F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                806F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                807F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                808F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                809F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                810F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                811F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                812F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                813F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                814F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                815F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                816F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                817F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                818F    ⊚                                                                        ○ ○                                                                              ○                                                                             ○                                ______________________________________                                          ⊚: Excellent                                                    Δ: practically applicable                                                ○: good                                                                 X: practically not applicable                                            

                  TABLE 211                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         901F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               902F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               903F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               904F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               905F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               906F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               907F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               908F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               909F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               910F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               911F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               912F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               913F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               914F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               915F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               916F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               917F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               918F    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 212                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1001    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1002    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1003    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1004    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1005    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1006    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1007    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1008    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1009    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1010    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1011    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1012    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1013    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1014    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1015    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1016    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1017    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 213                                                        ______________________________________                                         Drum No. 1101F    1102F    1103F 1104F  1105F                                  ______________________________________                                         a [μm]                                                                               25       50       50    12     12                                     b [μm]                                                                               0.8      2.5      0.8   1.5    0.3                                    ______________________________________                                    

                  TABLE 213 A                                                      ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         1101F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ⊚                  1102F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ⊚                  1103F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ○                          1104F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ⊚                  1105F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ○                                                                             ○                          ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 214                                                        ______________________________________                                         Drum No. 1111F    1112F    1113F 1114F  1115F                                  ______________________________________                                         a [μm]                                                                               30       40       50    70     100                                    b [μm]                                                                               0.7      1.0      1.2   2      5                                      ______________________________________                                    

                  TABLE 214 A                                                      ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         1111F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ○                          1112F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ⊚                  1113F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ⊚                  1114F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ○                          1115F ⊚                                                                       ○                                                                               ○                                                                              ○                                                                            ○                                                                            ⊚                                                                     ○                          ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 215                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1201    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1202    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1203    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1204    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1205    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1206    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1207    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1208    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1209    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1210    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1211    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1212    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1213    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1214    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1215    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1216    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1217    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               1218    ⊚                                                                         ○  ○                                                                              ○                                                                            ○                               ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 216                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         101G    ○  ○  Δ                                                                               ○                                                                            ⊚                       102G    ○  ○  Δ                                                                               ○                                                                            ⊚                       103G    ○  ○  Δ                                                                               ○                                                                            ⊚                       104G    ○  ○  Δ                                                                               ○                                                                            ⊚                       105G    ○  ○  Δ                                                                               ○                                                                            ⊚                       106G    ○  ○  Δ                                                                               ○                                                                            ⊚                       107G    ○  ○  Δ                                                                               ○                                                                            ⊚                       108G    ○  ○  Δ                                                                               ○                                                                            ⊚                       109G    ○  ○  Δ                                                                               ○                                                                            ⊚                       110G    ○  ○  Δ                                                                               ○                                                                            ⊚                       111G    ○  ○  Δ                                                                               ○                                                                            ⊚                       112G    ○  ○  Δ                                                                               ○                                                                            ⊚                       113G    ○  ○  Δ                                                                               ○                                                                            ⊚                       114G    ○  ○  Δ                                                                               ○                                                                            ⊚                       115G    ○  ○  Δ                                                                               ○                                                                            ⊚                       116G    ○  ○  Δ                                                                               ○                                                                            ⊚                       117G    ○  ○  Δ                                                                               ○                                                                            ⊚                       118G    ○  ○  Δ                                                                               ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 217                                                        ______________________________________                                                                              Inter-                                                          Substrate      nal  Layer                                                      temper-  RF    pres-                                                                               thick-                               Name of Gas used & its flow                                                                          ature    power sure ness                                 layer   rate (SCCM)   (°C.)                                                                            (W)   (Torr)                                                                              (μm)                              ______________________________________                                         IR      SiH.sub.4 100 250      150   0.35 1                                    absorption                                                                             GeH.sub.4 (substrate side                                              layer   0.7 μm) 50                                                                  (surface side 0.3 μm)                                                       50→0                                                                    (constantly decrease)                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                            1000 ppm                                                                       NO 10                                                                  CGL/CTL Combination as                                                                 shown                                                                          in Table 3                                                             Surface SiH.sub.4 20  250      150   0.4  1                                    layer   CH.sub.4 500                                                           ______________________________________                                    

                  TABLE 218                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         201G    ○  ○  ○                                                                              ○                                                                            ⊚                       202G    ○  ○  ○                                                                              ○                                                                            ⊚                       203G    ○  ○  ○                                                                              ○                                                                            ⊚                       204G    ○  ○  ○                                                                              ○                                                                            ⊚                       205G    ○  ○  ○                                                                              ○                                                                            ⊚                       206G    ○  ○  ○                                                                              ○                                                                            ⊚                       207G    ○  ○  ○                                                                              ○                                                                            ⊚                       208G    ○  ○  ○                                                                              ○                                                                            ⊚                       209G    ○  ○  ○                                                                              ○                                                                            ⊚                       210G    ○  ○  ○                                                                              ○                                                                            ⊚                       211G    ○  ○  ○                                                                              ○                                                                            ⊚                       212G    ○  ○  ○                                                                              ○                                                                            ⊚                       213G    ○  ○  ○                                                                              ○                                                                            ⊚                       214G    ○  ○  ○                                                                              ○                                                                            ⊚                       215G    ○  ○  ○                                                                              ○                                                                            ⊚                       216G    ○  ○  ○                                                                              ○                                                                            ⊚                       217G    ○  ○  ○                                                                              ○                                                                            ⊚                       218G    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 219                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         301G    ○  ○  ○                                                                              ○                                                                            ⊚                       302G    ○  ○  ○                                                                              ○                                                                            ⊚                       303G    ○  ○  ○                                                                              ○                                                                            ⊚                       304G    ○  ○  ○                                                                              ○                                                                            ⊚                       305G    ○  ○  ○                                                                              ○                                                                            ⊚                       306G    ○  ○  ○                                                                              ○                                                                            ⊚                       307G    ○  ○  ○                                                                              ○                                                                            ⊚                       308G    ○  ○  ○                                                                              ○                                                                            ⊚                       309G    ○  ○  ○                                                                              ○                                                                            ⊚                       310G    ○  ○  ○                                                                              ○                                                                            ⊚                       311G    ○  ○  ○                                                                              ○                                                                            ⊚                       312G    ○  ○  ○                                                                              ○                                                                            ⊚                       313G    ○  ○  ○                                                                              ○                                                                            ⊚                       314G    ○  ○  ○                                                                              ○                                                                            ⊚                       315G    ○  ○  ○                                                                              ○                                                                            ⊚                       316G    ○  ○  ○                                                                              ○                                                                            ⊚                       317G    ○  ○  ○                                                                              ○                                                                            ⊚                       318G    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 220                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         401G    ○  ○  ○                                                                              ○                                                                            ⊚                       402G    ○  ○  ○                                                                              ○                                                                            ⊚                       403G    ○  ○  ○                                                                              ○                                                                            ⊚                       404G    ○  ○  ○                                                                              ○                                                                            ⊚                       405G    ○  ○  ○                                                                              ○                                                                            ⊚                       406G    ○  ○  ○                                                                              ○                                                                            ⊚                       407G    ○  ○  ○                                                                              ○                                                                            ⊚                       408G    ○  ○  ○                                                                              ○                                                                            ⊚                       409G    ○  ○  ○                                                                              ○                                                                            ⊚                       410G    ○  ○  ○                                                                              ○                                                                            ⊚                       411G    ○  ○  ○                                                                              ○                                                                            ⊚                       412G    ○  ○  ○                                                                              ○                                                                            ⊚                       413G    ○  ○  ○                                                                              ○                                                                            ⊚                       414G    ○  ○  ○                                                                              ○                                                                            ⊚                       415G    ○  ○  ○                                                                              ○                                                                            ⊚                       416G    ○  ○  ○                                                                              ○                                                                            ⊚                       417G    ○  ○  ○                                                                              ○                                                                            ⊚                       418G    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 221                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         501G    ○  ○  ○                                                                              ○                                                                            ⊚                       502G    ○  ○  ○                                                                              ○                                                                            ⊚                       503G    ○  ○  ○                                                                              ○                                                                            ⊚                       504G    ○  ○  ○                                                                              ○                                                                            ⊚                       505G    ○  ○  ○                                                                              ○                                                                            ⊚                       506G    ○  ○  ○                                                                              ○                                                                            ⊚                       507G    ○  ○  ○                                                                              ○                                                                            ⊚                       508G    ○  ○  ○                                                                              ○                                                                            ⊚                       509G    ○  ○  ○                                                                              ○                                                                            ⊚                       510G    ○  ○  ○                                                                              ○                                                                            ⊚                       511G    ○  ○  ○                                                                              ○                                                                            ⊚                       512G    ○  ○  ○                                                                              ○                                                                            ⊚                       513G    ○  ○  ○                                                                              ○                                                                            ⊚                       514G    ○  ○  ○                                                                              ○                                                                            ⊚                       515G    ○  ○  ○                                                                              ○                                                                            ⊚                       516G    ○  ○  ○                                                                              ○                                                                            ⊚                       517G    ○  ○  ○                                                                              ○                                                                            ⊚                       518G    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                                      TABLE 222                                    __________________________________________________________________________                               Substrate                                                                             RF  Internal                                                                            Layer                                Name of                   temperature                                                                           power                                                                              pressure                                                                            thickness                            layer Gas used & its flow rate (SCCM)                                                                    (°C.)                                                                          (W) (Torr)                                                                              (μm)                              __________________________________________________________________________     IR    SiH.sub.4      100  250    150 0.35 1                                    absorption                                                                           GeH.sub.4       50                                                       layer CH.sub.4 (substrate side 0.7 μm)                                                            10                                                             (surface side 0.3 μm)                                                                       10 → 0                                                  (constantly decrease)                                                          NO (substrate side 0.7 μm)                                                                  5                                                              (surface side 0.3 μm)                                                                       5 → 0                                                   (constantly decrease)                                                          N.sub.2 (substrate side 0.7 μm)                                                             30                                                             (surface side 0.3 μm)                                                                       30 → 0                                                  (constantly decrease)                                                    CGL/CTL                                                                              Combination as shown in Table 18                                         Surface                                                                              SiH.sub.4       10  250    200 0.4  2                                    layer N.sub.2        500                                                             C.sub.2 H.sub.2                                                                                20                                                       __________________________________________________________________________

                  TABLE 223                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         601G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       602G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       603G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       604G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       605G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       606G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       607G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       608G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       609G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       610G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       611G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       612G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       613G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       614G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       615G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       616G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       617G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       618G    ○  ○  ○                                                                              ⊚                                                                    ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 224                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         701G    ○ ○ ○                                                                              ○                                                                             ⊚                        702G    ○ ○ ○                                                                              ○                                                                             ⊚                        703G    ○ ○ ○                                                                              ○                                                                             ⊚                        704G    ○ ○ ○                                                                              ○                                                                             ⊚                        705G    ○ ○ ○                                                                              ○                                                                             ⊚                        706G    ○ ○ ○                                                                              ○                                                                             ⊚                        707G    ○ ○ ○                                                                              ○                                                                             ⊚                        708G    ○ ○ ○                                                                              ○                                                                             ⊚                        709G    ○ ○ ○                                                                              ○                                                                             ⊚                        710G    ○ ○ ○                                                                              ○                                                                             ⊚                        711G    ○ ○ ○                                                                              ○                                                                             ⊚                        712G    ○ ○ ○                                                                              ○                                                                             ⊚                        713G    ○ ○ ○                                                                              ○                                                                             ⊚                        714G    ○ ○ ○                                                                              ○                                                                             ⊚                        715G    ○ ○ ○                                                                              ○                                                                             ⊚                        716G    ○ ○ ○                                                                              ○                                                                             ⊚                        717G    ○ ○ ○                                                                              ○                                                                             ⊚                        718G    ○ ○ ○                                                                              ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 225                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         801G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        802G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        803G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        804G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        805G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        806G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        807G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        808G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        809G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        810G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        811G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        812G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        813G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        814G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        815G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        816G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        817G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        818G    ○ ○ ⊚                                                                      ⊚                                                                     ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 226                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         901G    ○ ○ ○                                                                              ○                                                                             ○                                902G    ○ ○ ○                                                                              ○                                                                             ⊚                        903G    ○ ○ ○                                                                              ○                                                                             ⊚                        904G    ○ ○ ○                                                                              ○                                                                             ⊚                        905G    ○ ○ ○                                                                              ○                                                                             ⊚                        906G    ○ ○ ○                                                                              ○                                                                             ⊚                        907G    ○ ○ ○                                                                              ○                                                                             ⊚                        908G    ○ ○ ○                                                                              ○                                                                             ⊚                        909G    ○ ○ ○                                                                              ○                                                                             ⊚                        910G    ○ ○ ○                                                                              ○                                                                             ⊚                        911G    ○ ○ ○                                                                              ○                                                                             ⊚                        912G    ○ ○ ○                                                                              ○                                                                             ⊚                        913G    ○ ○ ○                                                                              ○                                                                             ⊚                        914G    ○ ○ ○                                                                              ○                                                                             ⊚                        915G    ○ ○ ○                                                                              ○                                                                             ⊚                        916G    ○ ○ ○                                                                              ○                                                                             ⊚                        917G    ○ ○ ○                                                                              ○                                                                             ⊚                        918G    ○ ○ ○                                                                              ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 227                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         1001    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1002    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1003    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1004    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1005    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1006    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1007    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1008    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1009    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1010    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1011    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1012    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1013    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1014    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1015    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1016    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1017    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        1018    ○ ⊚                                                                        ○                                                                              ⊚                                                                     ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                                      TABLE 228                                    __________________________________________________________________________                                Substrate                                                                             RF  Internal                                                                            Layer                               Name of                    temperature                                                                           power                                                                              pressure                                                                            thickness                           layer Gas used & its flow rate (SCCM)                                                                     (°C.)                                                                          (W) (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4      100                                                       absorption                                                                           GeH.sub.4      50                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                10                                                                  (surface side 0.3 μm)                                                                  10 → 0                                                       (constantly decrease)                                                                           250    150 0.35 1                                         NO  (substrate side 0.7 μm)                                                                5                                                                   (surface side 0.3 μm)                                                                  5  → 0                                                       (constantly decrease)                                                      N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                CGL/CTL                                                                              Combination as shown in Table 57                                         Surface                                                                              SiH.sub.4      50    250    150 0.4  5                                   layer CH.sub.4       600                                                       __________________________________________________________________________

                  TABLE 229                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         1101G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1102G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1103G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1104G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1105G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1106G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1107G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1108G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1109G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1110G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1111G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1112G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1113G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1114G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1115G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1116G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1117G   ○ ○ Δ                                                                               ○                                                                             ⊚                        1118G   ○ ○ Δ                                                                               ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                                      TABLE 230                                    __________________________________________________________________________                                     Inter-                                                             Substrate   nal Layer                                           Gas used       temper- RF  pres-                                                                              thick-                                     Name of                                                                             & its flow     ature   power                                                                              sure                                                                               ness                                       layer                                                                               rate (SCCM)    (°C.)                                                                           (W) (Torr)                                                                             (μm)                                    __________________________________________________________________________     IR   SiH.sub.4 100  250     150 0.35                                                                               1                                          absorp-                                                                             GeH.sub.4  50                                                             tion PH.sub.3 (against SiH.sub.4)                                                             800 ppm                                                         layer                                                                               NO         5                                                                   N.sub.2    30                                                                  H.sub.2   100                                                                  GeH.sub.4  10                                                             CGL/ Combination as shown                                                      CTL  in Table 57                                                               Surface                                                                             SiH.sub.4  10  250     150 0.4 2                                          layer                                                                               N.sub.2   500                                                                  CH.sub.4   20                                                             __________________________________________________________________________

                  TABLE 231                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         1201G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1202G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1203G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1204G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1205G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1206G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1207G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1208G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1209G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1210G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1211G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1212G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1213G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1214G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1215G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1216G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1217G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1218G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 232                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         1301G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1302G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1303G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1304G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1305G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1306G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1307G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1308G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1309G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1310G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1311G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1312G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1313G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1314G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1315G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1316G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1317G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1318G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 233                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         1401G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1402G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1403G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1404G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1405G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1406G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1407G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1408G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1409G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1410G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1411G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1412G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1413G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1414G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1415G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1416G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1417G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        1418G   ○ ○ ⊚                                                                      ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 234                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         1501G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1502G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1503G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1504G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1505G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1506G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1507G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1508G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1509G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1510G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1511G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1512G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1513G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1514G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1515G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1516G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1517G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1518G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 235                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         1601G   ○ ○ ○                                                                              ○                                                                             ⊚                        1602G   ○ ○ ○                                                                              ○                                                                             ⊚                        1603G   ○ ○ ○                                                                              ○                                                                             ⊚                        1604G   ○ ○ ○                                                                              ○                                                                             ⊚                        1605G   ○ ○ ○                                                                              ○                                                                             ⊚                        1606G   ○ ○ ○                                                                              ○                                                                             ⊚                        1607G   ○ ○ ○                                                                              ○                                                                             ⊚                        1608G   ○ ○ ○                                                                              ○                                                                             ⊚                        1609G   ○ ○ ○                                                                              ○                                                                             ⊚                        1610G   ○ ○ ○                                                                              ○                                                                             ⊚                        1611G   ○ ○ ○                                                                              ○                                                                             ⊚                        1612G   ○ ○ ○                                                                              ○                                                                             ⊚                        1613G   ○ ○ ○                                                                              ○                                                                             ⊚                        1614G   ○ ○ ○                                                                              ○                                                                             ⊚                        1615G   ○ ○ ○                                                                              ○                                                                             ⊚                        1616G   ○ ○ ○                                                                              ○                                                                             ⊚                        1617G   ○ ○ ○                                                                              ○                                                                             ⊚                        1618G   ○ ○ ○                                                                              ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                                      TABLE 236                                    __________________________________________________________________________                                Substrate                                                                             RF  Internal                                                                            Layer                               Name of                    temperature                                                                           power                                                                              pressure                                                                            thickness                           layer Gas used & its flow rate (SCCM)                                                                     (°C.)                                                                          (W) (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4      100                                                       absorption                                                                           GeH.sub.4      10                                                        layer CH.sub.4                                                                           (substrate side 0.7 μm)                                                                25                                                                  (surface side 0.3 μm)                                                                  25 → 20                                                      (constantly decrease)                                                                           250    150 0.35 1                                         NO             10                                                              N.sub.2                                                                            (substrate side 0.7 μm)                                                                30                                                                  (surface side 0.3 μm)                                                                  30 → 0                                                       (constantly decrease)                                                CGL/  Combination as shown in Table 78                                         CTL                                                                            Surface                                                                              SiH.sub.4      10    250    200 0.4  2                                   layer N.sub.2        500                                                             CH.sub.4       20                                                        __________________________________________________________________________

                  TABLE 237                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         1701G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1702G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1703G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1704G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1705G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1706G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1707G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1708G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1709G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1710G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1711G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1712G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1713G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1714G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1715G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1716G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1717G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        1718G   ○ ○ ○                                                                              ⊚                                                                     ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 238                                                        ______________________________________                                                 initial                                                                        charge-  photo-   residual                                             Drum No.                                                                               retentivity                                                                             sensitivity                                                                             potential                                                                             ghost durability                              ______________________________________                                         1801G   ○ ○ ○                                                                              ○                                                                             ⊚                        1802G   ○ ○ ○                                                                              ○                                                                             ⊚                        1803G   ○ ○ ○                                                                              ○                                                                             ⊚                        1804G   ○ ○ ○                                                                              ○                                                                             ⊚                        1805G   ○ ○ ○                                                                              ○                                                                             ⊚                        1806G   ○ ○ ○                                                                              ○                                                                             ⊚                        1807G   ○ ○ ○                                                                              ○                                                                             ⊚                        1808G   ○ ○ ○                                                                              ○                                                                             ⊚                        1809G   ○ ○ ○                                                                              ○                                                                             ⊚                        1810G   ○ ○ ○                                                                              ○                                                                             ⊚                        1811G   ○ ○ ○                                                                              ○                                                                             ⊚                        1812G   ○ ○ ○                                                                              ○                                                                             ⊚                        1813G   ○ ○ ○                                                                              ○                                                                             ⊚                        1814G   ○ ○ ○                                                                              ○                                                                             ⊚                        1815G   ○ ○ ○                                                                              ○                                                                             ⊚                        1816G   ○ ○ ○                                                                              ○                                                                             ⊚                        1817G   ○ ○ ○                                                                              ○                                                                             ⊚                        1818G   ○ ○ ○                                                                              ○                                                                             ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 239                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         1901G   ○  ○  ○                                                                              ○                                                                            ⊚                       1902G   ○  ○  ○                                                                              ○                                                                            ⊚                       1903G   ○  ○  ○                                                                              ○                                                                            ⊚                       1904G   ○  ○  ○                                                                              ○                                                                            ⊚                       1905G   ○  ○  ○                                                                              ○                                                                            ⊚                       1906G   ○  ○  ○                                                                              ○                                                                            ⊚                       1907G   ○  ○  ○                                                                              ○                                                                            ⊚                       1908G   ○  ○  ○                                                                              ○                                                                            ⊚                       1909G   ○  ○  ○                                                                              ○                                                                            ⊚                       1910G   ○  ○  ○                                                                              ○                                                                            ⊚                       1911G   ○  ○  ○                                                                              ○                                                                            ⊚                       1912G   ○  ○  ○                                                                              ○                                                                            ⊚                       1913G   ○  ○  ○                                                                              ○                                                                            ⊚                       1914G   ○  ○  ○                                                                              ○                                                                            ⊚                       1915G   ○  ○  ○                                                                              ○                                                                            ⊚                       1916G   ○  ○  ○                                                                              ○                                                                            ⊚                       1917G   ○  ○  ○                                                                              ○                                                                            ⊚                       1918G   ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 240                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2001    ○  ○  ○                                                                              ○                                                                            ⊚                       2002    ○  ○  ○                                                                              ○                                                                            ⊚                       2003    ○  ○  ○                                                                              ○                                                                            ⊚                       2004    ○  ○  ○                                                                              ○                                                                            ⊚                       2005    ○  ○  ○                                                                              ○                                                                            ⊚                       2006    ○  ○  ○                                                                              ○                                                                            ⊚                       2007    ○  ○  ○                                                                              ○                                                                            ⊚                       2008    ○  ○  ○                                                                              ○                                                                            ⊚                       2009    ○  ○  ○                                                                              ○                                                                            ⊚                       2010    ○  ○  ○                                                                              ○                                                                            ⊚                       2011    ○  ○  ○                                                                              ○                                                                            ⊚                       2012    ○  ○  ○                                                                              ○                                                                            ⊚                       2013    ○  ○  ○                                                                              ○                                                                            ⊚                       2014    ○  ○  ○                                                                              ○                                                                            ⊚                       2015    ○  ○  ○                                                                              ○                                                                            ⊚                       2016    ○  ○  ○                                                                              ○                                                                            ⊚                       2017    ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 241                                                        ______________________________________                                         Drum No.                                                                               2101G    2102G    2103G  2104G  2105G                                  ______________________________________                                         a [μm]                                                                              25       50       50     12     12                                     b [μm]                                                                              0.8      2.5      0.8    1.5    0.3                                    ______________________________________                                    

                  TABLE 241 A                                                      ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         2101G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  2102G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  2103G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ○                          2104G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ⊚                  2105G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ○                                                                             ○                          ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 242                                                        ______________________________________                                         Drum No.                                                                               2111G    2112G    2113G  2114G  2115G                                  ______________________________________                                         a [μm]                                                                              30       40       50     70     100                                    b [μm]                                                                              0.7      1.0      1.2    2      5                                      ______________________________________                                    

                  TABLE 242G                                                       ______________________________________                                               initial                                                                        charge- photo-                   defec-                                                                               inter-                            Drum  reten-  sensi-  residual    dura-                                                                               tive  ference                           No.   tivity  tivity  potential                                                                             ghost                                                                               bility                                                                              image fringe                            ______________________________________                                         2111G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          2112G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ⊚                  2113G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ⊚                  2114G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          2115G ○                                                                               ○                                                                               ○                                                                              ○                                                                            ⊚                                                                    ⊚                                                                     ○                          ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                            

                  TABLE 243                                                        ______________________________________                                                 initial                                                                        charge-   photo-    residual                                           Drum No.                                                                               retentivity                                                                              sensitivity                                                                              potential                                                                             ghost                                                                               durability                             ______________________________________                                         2201G   ○  ○  ○                                                                              ○                                                                            ⊚                       2202G   ○  ○  ○                                                                              ○                                                                            ⊚                       2203G   ○  ○  ○                                                                              ○                                                                            ⊚                       2204G   ○  ○  ○                                                                              ○                                                                            ⊚                       2205G   ○  ○  ○                                                                              ○                                                                            ⊚                       2206G   ○  ○  ○                                                                              ○                                                                            ⊚                       2207G   ○  ○  ○                                                                              ○                                                                            ⊚                       2208G   ○  ○  ○                                                                              ○                                                                            ⊚                       2209G   ○  ○  ○                                                                              ○                                                                            ⊚                       2210G   ○  ○  ○                                                                              ○                                                                            ⊚                       2211G   ○  ○  ○                                                                              ○                                                                            ⊚                       2212G   ○  ○  ○                                                                              ○                                                                            ⊚                       2213G   ○  ○  ○                                                                              ○                                                                            ⊚                       2214G   ○  ○  ○                                                                              ○                                                                            ⊚                       2215G   ○  ○  ○                                                                              ○                                                                            ⊚                       2216G   ○  ○  ○                                                                              ○                                                                            ⊚                       2217G   ○  ○  ○                                                                              ○                                                                            ⊚                       2218G   ○  ○  ○                                                                              ○                                                                            ⊚                       ______________________________________                                          ⊚: Excellent                                                     ○ : good                                                               Δ: practically applicable                                                X: practically not applicable                                             

What is claimed is:
 1. A light receiving member for use in electrophotography comprising a substrate for electrophotography and a light receiving layer having, in sequence, (i) a charge carrier generation layer and (ii) a charge carrier transport layer on said substrate, said charge carrier generation layer (i) being formed of a non-single-crystal material substantially consisting of silicon atoms as the main constituent atoms and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms in a total amount of 1 to 40 atomic percent and said charge carrier transport layer (ii) being formed of a non-single-crystal material containing silicon atoms as the main constituent atoms, carbon atoms, a conductivity controlling element capable of providing p-type conductivity or n-type conductivity in an unevenly distributed state in the thickness direction and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms.
 2. A light receiving member for use in electrophotography according to claim 1, wherein the charge carrier generation layer is 0.01 to 30 μm thick and the charge carrier transport layer is 5 to 50 μm thick.
 3. A light receiving member for use in electrophotography according to claim 1, the substrate is electroconductive.
 4. A light receiving member for use in electrophotography according to claim 1, wherein the substrate is electrically insulative.
 5. A light receiving member for use in electrophotography according to claim 1, wherein the substrate is cylindrical in form.
 6. A light receiving member for use in electrophotography according to claim 1, wherein the substrate has an uneven surface.
 7. A light receiving member for use in electrophotography according to claim 1, wherein the substrate has an irregular surface.
 8. A light receiving member for use in electrophotography according to claim 1, wherein said conductivity controlling element capable of providing p-type conductivity contained in the charge carrier transport layer is an element selected from the group consisting of boron, aluminum, gallium, indium and thallium.
 9. A light receiving member for use in electrophotography according to claim 1, wherein the amount of said element in the charge carrier transport layer is in the range of from 0.001 to 3000 atomic ppm.
 10. A light receiving member for use in electrophotography according to claim 1, wherein said conductivity controlling element capable of providing n-type conductivity contained in the charge carrier transport layer is an element selected from the group consisting of phosphorous, arsenic, antimony and bismuth.
 11. A light receiving member for use in electrophotography according to claim 1, wherein the amount of said element in the charge carrier transport layer is in the range of from 0.001 to 3000 atomic ppm.
 12. A light receiving member for use in electrophotography according to claim 1, wherein the amount of said carbon atoms in the charge carrier transport layer is in the range of from 0.01 to 50 atomic percent.
 13. A light receiving member for use in electrophotography according to claim 1, wherein the charge carrier transport layer contains said carbon atoms in a uniformly distributed state in the thickness direction.
 14. A light receiving member for use in electrophotography according to claim 1, wherein the charge carrier transport layer contains said carbon atoms in an unevenly distributed state in the thickness direction.
 15. A light receiving member for use in electrophotography according to claim 1, wherein the charge carrier transport layer contains at least one kind selected from the group consisting of nitrogen atoms and oxygen atoms in addition to said carbon atoms.
 16. A light receiving member for use in electrophotography according to claim 1, wherein the total amount of the carbon atoms and said at least one kind selected from the group consisting of nitrogen atoms and oxygen atoms in the charge carrier transport layer is in the range of from 0.01 to 50 atomic percent.
 17. A light receiving member for use in electrophotography according to claim 1, wherein the charge carrier transport layer contains said at least one kind selected from the group consisting of hydrogen atoms and halogen atoms in a total amount of 1 to 70 atomic percent.
 18. A light receiving member for use in electrophotography according to claim 1, wherein the light receiving layer contains a charge injection inhibition layer under the charge carrier generation layer.
 19. A light receiving member for use in electrophotography according to claim 18, wherein the charge injection inhibition layer is 0.01 to 10 μm thick and comprises a member selected from the group consisting of (a) a non-single-crystal silicon-containing material containing a conductivity controlling element and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms, (b) a non-single-crystal silicon-containing material at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and (c) a non-single-crystal silicon-containing material containing at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and at least one kind selected from the group consisting of hydrogen atoms, halogen atoms and a conductivity controlling element capable of providing p-type conductivity or n-type conductivity.
 20. A light receiving member for use in electrophotography according to claim 1, wherein the light receiving layer contains an infrared absorptive layer under the charge carrier generation layer.
 21. A light receiving member for use in electrophotography according to claim 20, wherein the infrared absorption layer is 0.05 to 25 μm thick and comprises a non-single-crystal material containing at least one kind selected from the group consisting of germanium atoms and tin atoms and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms.
 22. A light receiving member for use in electrophotography according to claim 21, wherein the infrared absorption layer further contains silicon atoms.
 23. A light receiving member for use in electrophotography according to claim 21, wherein the infrared absorption layer further contains a conductivity controlling element capable of providing p-type conductivity or n-type conductivity.
 24. A light receiving member for use in electrophotography according to claim 21, wherein the infrared absorption layer further contains at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms.
 25. A light receiving member for use in electrophotography according to claim 1, wherein the light receiving layer contains a surface layer on the charge carrier transport layer.
 26. A light receiving member for use in electrophotography according to claim 25, wherein the surface layer is 0.003 to 30 μm thick and comprises a non-single-crystal material substantially composed of silicon atoms as the main constituent atoms, at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms.
 27. A light receiving member for use in electrophotography according to claim 18, wherein an infrared absorption layer is disposed between the substrate and the charge injection inhibition layer.
 28. A light receiving member for use in electrophotography according to claim 27, wherein the charge injection inhibition layer is 0.01 to 10 μm thick and comprises a member selected from the group consisting of (a) a non-single-crystal silicon-containing material containing a conductivity controlling element and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms, (b) a non-single-crystal silicon-containing material containing at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms, and (c) a non-single-crystal silicon-containing material containing at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and at least one kind selected from the group consisting of hydrogen atoms, halogen atoms and a conductivity controlling element capable of providing p-type conductivity or n-type conductivity and wherein the infrared absorption layer is 0.05 to 25 μm thick and comprises a non-single-crystal material containing at least one kind selected from the group consisting of germanium atoms and tin atoms and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms.
 29. A light receiving member for use in electrophotography according to claim 28, wherein the infrared absorption layer further contains silicon atoms.
 30. A light receiving member for use in electrophotography according to claim 28, wherein the infrared absorption layer further contains a conductivity controlling element capable of providing p-type conductivity or n-type conductivity.
 31. A light receiving member for use in electrophotography according to claim 28, wherein the infrared absorption layer further contains at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms.
 32. A light receiving member for use in electrophotography according to claim 18, wherein a surface layer is disposed on the charge carrier transport layer.
 33. A light receiving member for use in electrophotography according to claim 32, wherein the charge injection inhibition layer is 0.01 to 10 μm thick and comprises a member selected from the group consisting of (a) a non-single-crystal silicon-containing material containing a conductivity controlling element and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms, (b) a non-single-crystal silicon-containing material containing at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and (c) a non-single-crystal silicon-containing material containing at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and at least one kind selected from the group consisting of hydrogen atoms, halogen atoms and a conductivity controlling element capable of providing p-type conductivity or n-type conductivity and wherein the surface layer is 0.003 to 30 μm thick and comprises a non-single-crystal material substantially composed of silicon atoms as the main constituent atoms, at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms.
 34. A light receiving member for use in electrophotography according to claim 20, wherein a surface layer is disposed on the charge carrier transport layer.
 35. A light receiving member for use in electrophotography according to claim 35, wherein the infrared absorption layer is 0.05 to 25 μm thick and comprises a non-single-crystal material containing at least one kind selected from the group consisting of germanium atoms and tin atoms and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms and wherein the surface layer is 0.003 to 30 μm thick and comprises a non-single-crystal material substantially composed of silicon atoms as the main constituent atoms, at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms.
 36. A light receiving member for use in electrophotography according to claim 35, wherein the infrared absorption layer further contains silicon atoms.
 37. A light receiving member for use in electrophotography according to claim 35, wherein the infrared absorption layer further contains a conductivity controlling element capable of providing p-type conductivity or n-type conductivity.
 38. A light receiving member for use in electrophotography according to claim 35, wherein the infrared absorption layer further contains at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms.
 39. A light receiving member for use in electrophotography according to claim 27, wherein a surface layer is disposed on the charge carrier transport layer.
 40. A light receiving member for use in electrophotography according to claim 39, wherein the infrared absorption layer is 0.05 to 25 μm thick and comprises a non-single-crystal material containing at least one kind selected from the group consisting of germanium atoms and tin atoms and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms, the charge injection inhibition layer is 0.01 to 10 μm thick and comprises a member selected from the group consisting of (a) a non-single-crystal silicon-containing material containing a conductivity controlling element and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms, (b) a non-single-crystal silicon-containing material containing at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and (c) a non-single-crystal silicon-containing material containing at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and at least one kind selected from the group consisting of hydrogen atoms, halogen atoms and a conductivity controlling element capable of providing p-type conductivity or n-type conductivity and wherein the surface layer is 0.003 to 30 μm thick and comprises a non-single-crystal material substantially composed of silicon atoms as the main constituent atoms, at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms and at least one kind selected from the group consisting of hydrogen atoms and halogen atoms.
 41. A light receiving member for use in electrophotography according to claim 40, wherein the infrared absorption layer further contains silicon atoms.
 42. A light receiving member for use in electrophotography according to claim 40, wherein the infrared absorption layer further contains a conductivity controlling element capable of providing p-type conductivity or n-type conductivity.
 43. A light receiving member for use in electrophotography according to claim 40, wherein the infrared absorption layer further contains at least one kind selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms.
 44. An electrophotographic process comprising:(a) applying a charge to the light receiving member of claim 1; and (b) applying an electromagnetic wave to said light receiving member thereby forming an electrostatic image. 